JPS58120555U - Charged beam device - Google Patents
Charged beam deviceInfo
- Publication number
- JPS58120555U JPS58120555U JP1787882U JP1787882U JPS58120555U JP S58120555 U JPS58120555 U JP S58120555U JP 1787882 U JP1787882 U JP 1787882U JP 1787882 U JP1787882 U JP 1787882U JP S58120555 U JPS58120555 U JP S58120555U
- Authority
- JP
- Japan
- Prior art keywords
- charged beam
- beam device
- charged
- hole
- recorded
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Beam Exposure (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来の荷電ビーム装置の一部構成図、第２図は
本考案の一実施例を示した電子ビーム描画装置の概略図
、第３図はその一部詳細図である。
２：対物レンズのポールピース、３：材料、０：光軸、
６：電子計算機、７：偏向器、８：対物レンズ、９：駆
動機構、１０：高さ検出器、１２：孔、１４：センサ一
部。FIG. 1 is a partial block diagram of a conventional charged beam device, FIG. 2 is a schematic diagram of an electron beam lithography device showing an embodiment of the present invention, and FIG. 3 is a partially detailed diagram thereof. 2: Objective lens pole piece, 3: Material, 0: Optical axis,
6: Electronic computer, 7: Deflector, 8: Objective lens, 9: Drive mechanism, 10: Height detector, 12: Hole, 14: Part of sensor.
Claims (1)
する穴を大略中央部に設け、実質的に材料との間の静電
容量を検出するようになした検出手段を配置した荷電ビ
ーム装置。A charged beam device comprising: a hole through which the charged beam passes, provided above the material to be irradiated with the charged beam, and a detecting means configured to substantially detect the capacitance between the charged beam and the material; .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1787882U JPS58120555U (en) | 1982-02-10 | 1982-02-10 | Charged beam device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1787882U JPS58120555U (en) | 1982-02-10 | 1982-02-10 | Charged beam device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58120555U true JPS58120555U (en) | 1983-08-17 |
Family
ID=30030155
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1787882U Pending JPS58120555U (en) | 1982-02-10 | 1982-02-10 | Charged beam device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58120555U (en) |
-
1982
- 1982-02-10 JP JP1787882U patent/JPS58120555U/en active Pending
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