JPS6057624A - ハ−ドマスクの製作方法 - Google Patents

ハ−ドマスクの製作方法

Info

Publication number
JPS6057624A
JPS6057624A JP58164222A JP16422283A JPS6057624A JP S6057624 A JPS6057624 A JP S6057624A JP 58164222 A JP58164222 A JP 58164222A JP 16422283 A JP16422283 A JP 16422283A JP S6057624 A JPS6057624 A JP S6057624A
Authority
JP
Japan
Prior art keywords
layer
pattern
resist layer
hard mask
resist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58164222A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0352213B2 (enExample
Inventor
Yasuo Matsuoka
康男 松岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP58164222A priority Critical patent/JPS6057624A/ja
Publication of JPS6057624A publication Critical patent/JPS6057624A/ja
Publication of JPH0352213B2 publication Critical patent/JPH0352213B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Electron Beam Exposure (AREA)
JP58164222A 1983-09-08 1983-09-08 ハ−ドマスクの製作方法 Granted JPS6057624A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58164222A JPS6057624A (ja) 1983-09-08 1983-09-08 ハ−ドマスクの製作方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58164222A JPS6057624A (ja) 1983-09-08 1983-09-08 ハ−ドマスクの製作方法

Publications (2)

Publication Number Publication Date
JPS6057624A true JPS6057624A (ja) 1985-04-03
JPH0352213B2 JPH0352213B2 (enExample) 1991-08-09

Family

ID=15788989

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58164222A Granted JPS6057624A (ja) 1983-09-08 1983-09-08 ハ−ドマスクの製作方法

Country Status (1)

Country Link
JP (1) JPS6057624A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63244622A (ja) * 1987-03-30 1988-10-12 Nec Corp 半導体装置の製造方法
JPH02272454A (ja) * 1989-04-13 1990-11-07 Toshiba Corp 半導体製造用マスクの製造方法及びその製造装置
JPH07169675A (ja) * 1993-12-16 1995-07-04 Natl Res Inst For Metals 電子線リソグラフィー用基板材料

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58170830U (ja) * 1982-05-10 1983-11-15 沖電気工業株式会社 描画用マスクホルダとマスク基板との導通機構

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58170830U (ja) * 1982-05-10 1983-11-15 沖電気工業株式会社 描画用マスクホルダとマスク基板との導通機構

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63244622A (ja) * 1987-03-30 1988-10-12 Nec Corp 半導体装置の製造方法
JPH02272454A (ja) * 1989-04-13 1990-11-07 Toshiba Corp 半導体製造用マスクの製造方法及びその製造装置
JPH07169675A (ja) * 1993-12-16 1995-07-04 Natl Res Inst For Metals 電子線リソグラフィー用基板材料

Also Published As

Publication number Publication date
JPH0352213B2 (enExample) 1991-08-09

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