JPS6045252A - 投影露光装置の照明系 - Google Patents

投影露光装置の照明系

Info

Publication number
JPS6045252A
JPS6045252A JP58152474A JP15247483A JPS6045252A JP S6045252 A JPS6045252 A JP S6045252A JP 58152474 A JP58152474 A JP 58152474A JP 15247483 A JP15247483 A JP 15247483A JP S6045252 A JPS6045252 A JP S6045252A
Authority
JP
Japan
Prior art keywords
reticle
light shielding
light
circuit pattern
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58152474A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0429212B2 (en, 2012
Inventor
Toshio Matsuki
松木　敏雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP58152474A priority Critical patent/JPS6045252A/ja
Priority to US06/640,611 priority patent/US4589769A/en
Priority to GB08420726A priority patent/GB2147113B/en
Priority to DE19843430752 priority patent/DE3430752A1/de
Publication of JPS6045252A publication Critical patent/JPS6045252A/ja
Publication of JPH0429212B2 publication Critical patent/JPH0429212B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70066—Size and form of the illuminated area in the mask plane, e.g. reticle masking blades or blinds

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Light Sources And Details Of Projection-Printing Devices (AREA)
JP58152474A 1983-08-23 1983-08-23 投影露光装置の照明系 Granted JPS6045252A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP58152474A JPS6045252A (ja) 1983-08-23 1983-08-23 投影露光装置の照明系
US06/640,611 US4589769A (en) 1983-08-23 1984-08-14 Exposure apparatus
GB08420726A GB2147113B (en) 1983-08-23 1984-08-15 Exposure apparatus
DE19843430752 DE3430752A1 (de) 1983-08-23 1984-08-21 Belichtungsvorrichtung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58152474A JPS6045252A (ja) 1983-08-23 1983-08-23 投影露光装置の照明系

Related Child Applications (3)

Application Number Title Priority Date Filing Date
JP62088718A Division JPS6323319A (ja) 1987-04-13 1987-04-13 投影露光方法
JP62088716A Division JPS6323317A (ja) 1987-04-13 1987-04-13 投影露光装置
JP62088717A Division JPS6323318A (ja) 1987-04-13 1987-04-13 投影露光装置

Publications (2)

Publication Number Publication Date
JPS6045252A true JPS6045252A (ja) 1985-03-11
JPH0429212B2 JPH0429212B2 (en, 2012) 1992-05-18

Family

ID=15541302

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58152474A Granted JPS6045252A (ja) 1983-08-23 1983-08-23 投影露光装置の照明系

Country Status (4)

Country Link
US (1) US4589769A (en, 2012)
JP (1) JPS6045252A (en, 2012)
DE (1) DE3430752A1 (en, 2012)
GB (1) GB2147113B (en, 2012)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61247025A (ja) * 1985-04-25 1986-11-04 Canon Inc 表示パネル製造方法
JPS62229838A (ja) * 1985-12-26 1987-10-08 Nikon Corp 投影露光方法及び装置
JPS6370418A (ja) * 1986-09-11 1988-03-30 Canon Inc 半導体露光装置
US5161176A (en) * 1989-09-21 1992-11-03 Canon Kabushiki Kaisha Exposure apparatus
US7130024B2 (en) 2003-05-22 2006-10-31 Canon Kabushiki Kaisha Exposure apparatus
JP2008252092A (ja) * 2007-03-29 2008-10-16 Asml Netherlands Bv リソグラフィシステムおよびデバイス製造方法
US8059261B2 (en) 2003-05-30 2011-11-15 Asml Netherlands B.V. Masking device, lithographic apparatus, and device manufacturing method
US11020782B2 (en) 2016-09-12 2021-06-01 Olavi Venäläinen Straightening apparatus for vehicle

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4883359A (en) * 1984-02-28 1989-11-28 Canon Kabushiki Kaisha Alignment method and pattern forming method using the same
US4937618A (en) * 1984-10-18 1990-06-26 Canon Kabushiki Kaisha Alignment and exposure apparatus and method for manufacture of integrated circuits
US4814830A (en) * 1985-04-01 1989-03-21 Canon Kabushiki Kaisha Flat panel display device and manufacturing of the same
US4878086A (en) * 1985-04-01 1989-10-31 Canon Kabushiki Kaisha Flat panel display device and manufacturing of the same
US4947030A (en) * 1985-05-22 1990-08-07 Canon Kabushiki Kaisha Illuminating optical device
USRE37352E1 (en) 1985-12-26 2001-09-04 Nikon Corporation Projection optical apparatus
JPH0721643B2 (ja) * 1986-03-13 1995-03-08 ウシオ電機株式会社 レジスト処理方法
AT391224B (de) * 1988-01-26 1990-09-10 Thallner Erich Belichtungseinrichtung fuer lichtempfindlich gemachte substrate
US5218415A (en) * 1988-05-31 1993-06-08 Canon Kabushiki Kaisha Device for optically detecting inclination of a surface
JP2699433B2 (ja) * 1988-08-12 1998-01-19 株式会社ニコン 投影型露光装置及び投影露光方法
JP2893778B2 (ja) * 1990-01-17 1999-05-24 キヤノン株式会社 露光装置
EP0444937B1 (en) * 1990-03-02 1998-01-14 Canon Kabushiki Kaisha Exposure apparatus
US6128068A (en) * 1991-02-22 2000-10-03 Canon Kabushiki Kaisha Projection exposure apparatus including an illumination optical system that forms a secondary light source with a particular intensity distribution
JPH0536586A (ja) * 1991-08-02 1993-02-12 Canon Inc 像投影方法及び該方法を用いた半導体デバイスの製造方法
JP3165711B2 (ja) * 1991-08-02 2001-05-14 キヤノン株式会社 像投影方法及び該方法を用いた半導体デバイスの製造方法
US5424803A (en) * 1991-08-09 1995-06-13 Canon Kabushiki Kaisha Projection exposure apparatus and semiconductor device manufacturing method
JPH0547628A (ja) * 1991-08-09 1993-02-26 Canon Inc 像投影方法及びそれを用いた半導体デバイスの製造方法
JP3194155B2 (ja) * 1992-01-31 2001-07-30 キヤノン株式会社 半導体デバイスの製造方法及びそれを用いた投影露光装置
JP3275575B2 (ja) * 1993-10-27 2002-04-15 キヤノン株式会社 投影露光装置及び該投影露光装置を用いたデバイスの製造方法
KR0143814B1 (ko) * 1995-03-28 1998-07-01 이대원 반도체 노광 장치
US6268908B1 (en) 1999-08-30 2001-07-31 International Business Machines Corporation Micro adjustable illumination aperture
US7423730B2 (en) * 2003-05-28 2008-09-09 Asml Netherlands B.V. Lithographic apparatus
EP1491960B1 (en) * 2003-05-30 2012-04-25 ASML Netherlands B.V. Lithographic apparatus
KR100872142B1 (ko) * 2007-01-30 2008-12-08 서울시립대학교 산학협력단 가변형 콜리메이터
DE102007061800A1 (de) * 2007-12-19 2009-01-29 Carl Zeiss Smt Ag Beleuchtungssystem
KR200449959Y1 (ko) 2008-12-05 2010-08-25 (주)바텍이우홀딩스 치과용 엑스선 촬영장치의 콜리메이터
KR101149478B1 (ko) 2009-08-10 2012-05-24 부산대학교 산학협력단 광학적 모드 이득 특성 측정 장치 및 방법

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5329277U (en, 2012) * 1976-08-19 1978-03-13
JPS5393371A (en) * 1977-01-28 1978-08-16 Hitachi Ltd Device for drawing scan pattern
JPS55129333A (en) * 1979-03-28 1980-10-07 Hitachi Ltd Scale-down projection aligner and mask used for this
JPS55132039A (en) * 1979-04-02 1980-10-14 Mitsubishi Electric Corp Forming method for repeated figure
JPS5845533U (ja) * 1981-09-24 1983-03-26 株式会社日立製作所 照度分布測定装置
JPS6030132A (ja) * 1983-07-29 1985-02-15 Hitachi Ltd フオトリソグラフイ−装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE389057B (sv) * 1975-04-30 1976-10-25 Misomex Ab Forfarande for framstellning av genomlysningsoriginal for tryckplatsframstellning, eller for direktframstellning av en tryckplat
DE3071052D1 (en) * 1979-04-03 1985-10-10 Eaton Optimetrix Inc Improved step-and-repeat projection alignment and exposure system
US4474463A (en) * 1982-08-30 1984-10-02 Tre Semiconductor Equipment Corporation Mixer coupling lens subassembly for photolithographic system

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5329277U (en, 2012) * 1976-08-19 1978-03-13
JPS5393371A (en) * 1977-01-28 1978-08-16 Hitachi Ltd Device for drawing scan pattern
JPS55129333A (en) * 1979-03-28 1980-10-07 Hitachi Ltd Scale-down projection aligner and mask used for this
JPS55132039A (en) * 1979-04-02 1980-10-14 Mitsubishi Electric Corp Forming method for repeated figure
JPS5845533U (ja) * 1981-09-24 1983-03-26 株式会社日立製作所 照度分布測定装置
JPS6030132A (ja) * 1983-07-29 1985-02-15 Hitachi Ltd フオトリソグラフイ−装置

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61247025A (ja) * 1985-04-25 1986-11-04 Canon Inc 表示パネル製造方法
JPS62229838A (ja) * 1985-12-26 1987-10-08 Nikon Corp 投影露光方法及び装置
JPS6370418A (ja) * 1986-09-11 1988-03-30 Canon Inc 半導体露光装置
US5161176A (en) * 1989-09-21 1992-11-03 Canon Kabushiki Kaisha Exposure apparatus
US7130024B2 (en) 2003-05-22 2006-10-31 Canon Kabushiki Kaisha Exposure apparatus
US8059261B2 (en) 2003-05-30 2011-11-15 Asml Netherlands B.V. Masking device, lithographic apparatus, and device manufacturing method
JP2008252092A (ja) * 2007-03-29 2008-10-16 Asml Netherlands Bv リソグラフィシステムおよびデバイス製造方法
US11020782B2 (en) 2016-09-12 2021-06-01 Olavi Venäläinen Straightening apparatus for vehicle

Also Published As

Publication number Publication date
GB2147113A (en) 1985-05-01
GB2147113B (en) 1988-05-18
DE3430752A1 (de) 1985-03-14
US4589769A (en) 1986-05-20
GB8420726D0 (en) 1984-09-19
DE3430752C2 (en, 2012) 1992-07-23
JPH0429212B2 (en, 2012) 1992-05-18

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