JPS6034020Y2 - 蒸着用メタルマスク - Google Patents

蒸着用メタルマスク

Info

Publication number
JPS6034020Y2
JPS6034020Y2 JP1978021103U JP2110378U JPS6034020Y2 JP S6034020 Y2 JPS6034020 Y2 JP S6034020Y2 JP 1978021103 U JP1978021103 U JP 1978021103U JP 2110378 U JP2110378 U JP 2110378U JP S6034020 Y2 JPS6034020 Y2 JP S6034020Y2
Authority
JP
Japan
Prior art keywords
metal mask
vapor deposition
vapor
deposited
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1978021103U
Other languages
English (en)
Japanese (ja)
Other versions
JPS54124052U (enExample
Inventor
信夫 前田
Original Assignee
赤井電機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 赤井電機株式会社 filed Critical 赤井電機株式会社
Priority to JP1978021103U priority Critical patent/JPS6034020Y2/ja
Publication of JPS54124052U publication Critical patent/JPS54124052U/ja
Application granted granted Critical
Publication of JPS6034020Y2 publication Critical patent/JPS6034020Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
JP1978021103U 1978-02-20 1978-02-20 蒸着用メタルマスク Expired JPS6034020Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1978021103U JPS6034020Y2 (ja) 1978-02-20 1978-02-20 蒸着用メタルマスク

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1978021103U JPS6034020Y2 (ja) 1978-02-20 1978-02-20 蒸着用メタルマスク

Publications (2)

Publication Number Publication Date
JPS54124052U JPS54124052U (enExample) 1979-08-30
JPS6034020Y2 true JPS6034020Y2 (ja) 1985-10-09

Family

ID=28853339

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1978021103U Expired JPS6034020Y2 (ja) 1978-02-20 1978-02-20 蒸着用メタルマスク

Country Status (1)

Country Link
JP (1) JPS6034020Y2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190089412A (ko) * 2018-01-22 2019-07-31 공주대학교 산학협력단 파이프 펀칭 장치

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006199998A (ja) * 2005-01-20 2006-08-03 Seiko Epson Corp 成膜装置、成膜方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5180165A (ja) * 1975-01-10 1976-07-13 Hitachi Ltd Jochakuyokinzokumasuku
JPS51103041U (enExample) * 1975-02-14 1976-08-18

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190089412A (ko) * 2018-01-22 2019-07-31 공주대학교 산학협력단 파이프 펀칭 장치

Also Published As

Publication number Publication date
JPS54124052U (enExample) 1979-08-30

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