JPS60231498A - ダイヤモンド低圧合成法 - Google Patents

ダイヤモンド低圧合成法

Info

Publication number
JPS60231498A
JPS60231498A JP8805284A JP8805284A JPS60231498A JP S60231498 A JPS60231498 A JP S60231498A JP 8805284 A JP8805284 A JP 8805284A JP 8805284 A JP8805284 A JP 8805284A JP S60231498 A JPS60231498 A JP S60231498A
Authority
JP
Japan
Prior art keywords
diamond
hydrogen
pressure
low
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8805284A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0448757B2 (enrdf_load_stackoverflow
Inventor
Yukio Saito
幸雄 斉藤
Shinpei Matsuda
松田 臣平
Mamoru Mizumoto
水本 守
Hiromi Matsumoto
松本 浩美
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8805284A priority Critical patent/JPS60231498A/ja
Publication of JPS60231498A publication Critical patent/JPS60231498A/ja
Publication of JPH0448757B2 publication Critical patent/JPH0448757B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Recrystallisation Techniques (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP8805284A 1984-05-01 1984-05-01 ダイヤモンド低圧合成法 Granted JPS60231498A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8805284A JPS60231498A (ja) 1984-05-01 1984-05-01 ダイヤモンド低圧合成法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8805284A JPS60231498A (ja) 1984-05-01 1984-05-01 ダイヤモンド低圧合成法

Publications (2)

Publication Number Publication Date
JPS60231498A true JPS60231498A (ja) 1985-11-18
JPH0448757B2 JPH0448757B2 (enrdf_load_stackoverflow) 1992-08-07

Family

ID=13932061

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8805284A Granted JPS60231498A (ja) 1984-05-01 1984-05-01 ダイヤモンド低圧合成法

Country Status (1)

Country Link
JP (1) JPS60231498A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4882138A (en) * 1987-03-30 1989-11-21 Crystallume Method for preparation of diamond ceramics
US5015528A (en) * 1987-03-30 1991-05-14 Crystallume Fluidized bed diamond particle growth
US5075095A (en) * 1987-03-30 1991-12-24 Crystallume Method for preparation of diamond ceramics
FR2678956A1 (fr) * 1991-07-12 1993-01-15 Pechiney Recherche Dispositif et procede de depot de diamant par dcpv assiste par plasma microonde.
US5372799A (en) * 1988-10-20 1994-12-13 Sumitomo Electric Industries, Ltd. Process for the synthesis of granular diamond

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58110494A (ja) * 1981-12-17 1983-07-01 Natl Inst For Res In Inorg Mater ダイヤモンドの合成法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58110494A (ja) * 1981-12-17 1983-07-01 Natl Inst For Res In Inorg Mater ダイヤモンドの合成法

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4882138A (en) * 1987-03-30 1989-11-21 Crystallume Method for preparation of diamond ceramics
US5015528A (en) * 1987-03-30 1991-05-14 Crystallume Fluidized bed diamond particle growth
US5075095A (en) * 1987-03-30 1991-12-24 Crystallume Method for preparation of diamond ceramics
US5372799A (en) * 1988-10-20 1994-12-13 Sumitomo Electric Industries, Ltd. Process for the synthesis of granular diamond
FR2678956A1 (fr) * 1991-07-12 1993-01-15 Pechiney Recherche Dispositif et procede de depot de diamant par dcpv assiste par plasma microonde.
US5360485A (en) * 1991-07-12 1994-11-01 Pechiney Recherche Apparatus for diamond deposition by microwave plasma-assisted CVPD

Also Published As

Publication number Publication date
JPH0448757B2 (enrdf_load_stackoverflow) 1992-08-07

Similar Documents

Publication Publication Date Title
JPS58135117A (ja) ダイヤモンドの製造法
JPS62138395A (ja) ダイヤモンド膜の製造方法
JPS60231498A (ja) ダイヤモンド低圧合成法
JPS6136200A (ja) ダイヤモンドの気相合成法
JPS62265198A (ja) ダイヤモンドの合成方法
JPH0733243B2 (ja) 光照射併用プラズマcvd法による硬質窒化ホウ素の製造法
CN116730334A (zh) 一种竖立石墨烯转变为金刚石的方法
Benac et al. Growth of polycrystalline calcium fluoride via low-temperature organometallic chemical vapor deposition
JP3176086B2 (ja) ダイヤモンド結晶及びダイヤモンド形成用基体
JPH0341435B2 (enrdf_load_stackoverflow)
JPS62120B2 (enrdf_load_stackoverflow)
JPS61201698A (ja) ダイヤモンド膜およびその製造法
JPH01290591A (ja) ダイヤモンドの気相合成法
JP2799849B2 (ja) 化学蒸着法によるダイヤモンドの合成方法
JPS63277767A (ja) 高圧相窒化ホウ素の気相合成法
JP2977619B2 (ja) ダイヤモンド膜形成方法
JPS593098A (ja) ダイヤモンドの合成法
JP6944699B2 (ja) 六方晶系窒化ホウ素膜の製造方法
JPH07118093A (ja) ダイヤモンド結晶の形成方法
JPS63134662A (ja) 高硬度窒化硼素の合成法
JPH04240190A (ja) CVD法によるSi基板へのダイヤモンド膜形成方法
JP2975971B2 (ja) 炭素膜形成方法
JPS63252998A (ja) ヘテロ接合構造
JPH064915B2 (ja) 立方晶窒化ホウ素の合成方法
JPH05306193A (ja) ダイヤモンド膜の被覆方法