JPS60221569A - 電気的蒸着用タ−ゲツト - Google Patents
電気的蒸着用タ−ゲツトInfo
- Publication number
- JPS60221569A JPS60221569A JP7747084A JP7747084A JPS60221569A JP S60221569 A JPS60221569 A JP S60221569A JP 7747084 A JP7747084 A JP 7747084A JP 7747084 A JP7747084 A JP 7747084A JP S60221569 A JPS60221569 A JP S60221569A
- Authority
- JP
- Japan
- Prior art keywords
- metal
- target
- cermet
- oxide
- vapor deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007740 vapor deposition Methods 0.000 title claims abstract description 13
- 229910052751 metal Inorganic materials 0.000 claims abstract description 36
- 239000002184 metal Substances 0.000 claims abstract description 30
- 229910044991 metal oxide Inorganic materials 0.000 claims abstract description 19
- 239000011195 cermet Substances 0.000 claims abstract description 10
- 239000002245 particle Substances 0.000 claims abstract description 8
- 239000011248 coating agent Substances 0.000 claims abstract description 4
- 238000000576 coating method Methods 0.000 claims abstract description 4
- 239000000203 mixture Substances 0.000 claims description 19
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical group O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims description 16
- 150000004706 metal oxides Chemical class 0.000 claims description 15
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 9
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 claims description 9
- 229910052738 indium Inorganic materials 0.000 claims description 5
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 5
- 229910052787 antimony Inorganic materials 0.000 claims description 4
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 claims description 4
- 239000000470 constituent Substances 0.000 claims 1
- 239000000843 powder Substances 0.000 abstract description 14
- 238000000034 method Methods 0.000 abstract description 8
- 238000005245 sintering Methods 0.000 abstract description 4
- 239000000155 melt Substances 0.000 abstract description 3
- 239000011230 binding agent Substances 0.000 abstract description 2
- 238000000465 moulding Methods 0.000 abstract 2
- 238000013019 agitation Methods 0.000 abstract 1
- 230000008020 evaporation Effects 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 abstract 1
- 239000010408 film Substances 0.000 description 12
- 239000000758 substrate Substances 0.000 description 9
- 239000010409 thin film Substances 0.000 description 9
- 150000002736 metal compounds Chemical class 0.000 description 8
- 229910001887 tin oxide Inorganic materials 0.000 description 8
- 238000010304 firing Methods 0.000 description 6
- 238000000151 deposition Methods 0.000 description 5
- 229910003437 indium oxide Inorganic materials 0.000 description 5
- 229910000410 antimony oxide Inorganic materials 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 238000002844 melting Methods 0.000 description 4
- 230000008018 melting Effects 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- RHZWSUVWRRXEJF-UHFFFAOYSA-N indium tin Chemical compound [In].[Sn] RHZWSUVWRRXEJF-UHFFFAOYSA-N 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- VTRUBDSFZJNXHI-UHFFFAOYSA-N oxoantimony Chemical compound [Sb]=O VTRUBDSFZJNXHI-UHFFFAOYSA-N 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 239000004071 soot Substances 0.000 description 3
- 229910001128 Sn alloy Inorganic materials 0.000 description 2
- GVFOJDIFWSDNOY-UHFFFAOYSA-N antimony tin Chemical compound [Sn].[Sb] GVFOJDIFWSDNOY-UHFFFAOYSA-N 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000004070 electrodeposition Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910001245 Sb alloy Inorganic materials 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000002140 antimony alloy Substances 0.000 description 1
- GHPGOEFPKIHBNM-UHFFFAOYSA-N antimony(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Sb+3].[Sb+3] GHPGOEFPKIHBNM-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000005281 excited state Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229940110676 inzo Drugs 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7747084A JPS60221569A (ja) | 1984-04-19 | 1984-04-19 | 電気的蒸着用タ−ゲツト |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7747084A JPS60221569A (ja) | 1984-04-19 | 1984-04-19 | 電気的蒸着用タ−ゲツト |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60221569A true JPS60221569A (ja) | 1985-11-06 |
| JPH0319298B2 JPH0319298B2 (enExample) | 1991-03-14 |
Family
ID=13634869
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7747084A Granted JPS60221569A (ja) | 1984-04-19 | 1984-04-19 | 電気的蒸着用タ−ゲツト |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60221569A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2680799A1 (fr) * | 1991-09-03 | 1993-03-05 | Elf Aquitaine | Element de cible pour pulverisation cathodique, procede de preparation dudit element et cibles, notamment de grande surface, realisees a partir de cet element. |
| WO2001077404A1 (fr) * | 2000-04-10 | 2001-10-18 | Nikko Materials Company, Limited | Cible pour pulverisation cathodique servant a former les films protecteurs de disques optiques |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5156788A (ja) * | 1974-11-14 | 1976-05-18 | Nichiden Varian Kk | Supatsutasochotaagetsutodenkyoku |
| JPS5292217A (en) * | 1975-12-24 | 1977-08-03 | Johnson Matthey Co Ltd | Cermet and manufacture |
-
1984
- 1984-04-19 JP JP7747084A patent/JPS60221569A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5156788A (ja) * | 1974-11-14 | 1976-05-18 | Nichiden Varian Kk | Supatsutasochotaagetsutodenkyoku |
| JPS5292217A (en) * | 1975-12-24 | 1977-08-03 | Johnson Matthey Co Ltd | Cermet and manufacture |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2680799A1 (fr) * | 1991-09-03 | 1993-03-05 | Elf Aquitaine | Element de cible pour pulverisation cathodique, procede de preparation dudit element et cibles, notamment de grande surface, realisees a partir de cet element. |
| WO2001077404A1 (fr) * | 2000-04-10 | 2001-10-18 | Nikko Materials Company, Limited | Cible pour pulverisation cathodique servant a former les films protecteurs de disques optiques |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0319298B2 (enExample) | 1991-03-14 |
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