JPH0319298B2 - - Google Patents

Info

Publication number
JPH0319298B2
JPH0319298B2 JP59077470A JP7747084A JPH0319298B2 JP H0319298 B2 JPH0319298 B2 JP H0319298B2 JP 59077470 A JP59077470 A JP 59077470A JP 7747084 A JP7747084 A JP 7747084A JP H0319298 B2 JPH0319298 B2 JP H0319298B2
Authority
JP
Japan
Prior art keywords
metal
oxide
tin
target
indium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59077470A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60221569A (ja
Inventor
Minoru Kojima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kojundo Kagaku Kenkyusho KK
Original Assignee
Kojundo Kagaku Kenkyusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kojundo Kagaku Kenkyusho KK filed Critical Kojundo Kagaku Kenkyusho KK
Priority to JP7747084A priority Critical patent/JPS60221569A/ja
Publication of JPS60221569A publication Critical patent/JPS60221569A/ja
Publication of JPH0319298B2 publication Critical patent/JPH0319298B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP7747084A 1984-04-19 1984-04-19 電気的蒸着用タ−ゲツト Granted JPS60221569A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7747084A JPS60221569A (ja) 1984-04-19 1984-04-19 電気的蒸着用タ−ゲツト

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7747084A JPS60221569A (ja) 1984-04-19 1984-04-19 電気的蒸着用タ−ゲツト

Publications (2)

Publication Number Publication Date
JPS60221569A JPS60221569A (ja) 1985-11-06
JPH0319298B2 true JPH0319298B2 (enExample) 1991-03-14

Family

ID=13634869

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7747084A Granted JPS60221569A (ja) 1984-04-19 1984-04-19 電気的蒸着用タ−ゲツト

Country Status (1)

Country Link
JP (1) JPS60221569A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2680799B1 (fr) * 1991-09-03 1993-10-29 Elf Aquitaine Ste Nale Element de cible pour pulverisation cathodique, procede de preparation dudit element et cibles, notamment de grande surface, realisees a partir de cet element.
JP3779856B2 (ja) * 2000-04-10 2006-05-31 株式会社日鉱マテリアルズ 光ディスク保護膜形成用スパッタリングターゲット

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5156788A (ja) * 1974-11-14 1976-05-18 Nichiden Varian Kk Supatsutasochotaagetsutodenkyoku
GB1574007A (en) * 1975-12-24 1980-09-03 Johnson Matthey Co Ltd Cermets

Also Published As

Publication number Publication date
JPS60221569A (ja) 1985-11-06

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