JPS60221311A - 非晶質複合粉末組成物 - Google Patents

非晶質複合粉末組成物

Info

Publication number
JPS60221311A
JPS60221311A JP59077790A JP7779084A JPS60221311A JP S60221311 A JPS60221311 A JP S60221311A JP 59077790 A JP59077790 A JP 59077790A JP 7779084 A JP7779084 A JP 7779084A JP S60221311 A JPS60221311 A JP S60221311A
Authority
JP
Japan
Prior art keywords
amorphous composition
silicon
nitrogen
carbon
composition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59077790A
Other languages
English (en)
Japanese (ja)
Other versions
JPH05326B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Takashi Suzuki
喬 鈴木
Takamasa Kawakami
川上　殷正
Goji Koyama
剛司 小山
Masami Osaku
織作　正美
Hiromasa Isaki
寛正 伊崎
Aiko Nakanori
里愛子 中野
Akira Mori
晃 森
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Gas Chemical Co Inc
Original Assignee
Mitsubishi Gas Chemical Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Gas Chemical Co Inc filed Critical Mitsubishi Gas Chemical Co Inc
Priority to JP59077790A priority Critical patent/JPS60221311A/ja
Priority to US06/712,036 priority patent/US4594330A/en
Priority to DE19853510264 priority patent/DE3510264A1/de
Publication of JPS60221311A publication Critical patent/JPS60221311A/ja
Publication of JPH05326B2 publication Critical patent/JPH05326B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Carbon And Carbon Compounds (AREA)
  • Ceramic Products (AREA)
JP59077790A 1984-03-22 1984-04-18 非晶質複合粉末組成物 Granted JPS60221311A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP59077790A JPS60221311A (ja) 1984-04-18 1984-04-18 非晶質複合粉末組成物
US06/712,036 US4594330A (en) 1984-03-22 1985-03-15 Fine amorphous powder and process for preparing fine powdery mixture of silicon nitride and silicon carbide
DE19853510264 DE3510264A1 (de) 1984-03-22 1985-03-21 Amorphes feinteiliges pulver und verfahren zur herstellung einer feinteiligen pulvermischung aus siliciumnitrid und siliciumcarbid

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59077790A JPS60221311A (ja) 1984-04-18 1984-04-18 非晶質複合粉末組成物

Publications (2)

Publication Number Publication Date
JPS60221311A true JPS60221311A (ja) 1985-11-06
JPH05326B2 JPH05326B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-01-05

Family

ID=13643775

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59077790A Granted JPS60221311A (ja) 1984-03-22 1984-04-18 非晶質複合粉末組成物

Country Status (1)

Country Link
JP (1) JPS60221311A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6148409A (ja) * 1984-08-16 1986-03-10 Shin Etsu Chem Co Ltd けい素、炭素、窒素からなる微粉末およびその製造方法
JPH0356660A (ja) * 1989-07-26 1991-03-12 Shin Etsu Chem Co Ltd ＳｉＣとＳｉ↓３Ｎ↓４よりなる薄膜、その製造方法およびＸ線リソグラフィー用マスク

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4969717A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1972-09-05 1974-07-05
JPS573710A (en) * 1980-06-09 1982-01-09 Mitsubishi Metal Corp Amophous silicon and its production
JPS58161909A (ja) * 1982-03-15 1983-09-26 Shin Etsu Chem Co Ltd シリコンイミドおよび／または窒化けい素の製造方法
JPS58213607A (ja) * 1982-06-07 1983-12-12 Shin Etsu Chem Co Ltd シリコンイミドおよび／または窒化けい素の製造方法
JPS59174506A (ja) * 1983-03-23 1984-10-03 Mitsui Toatsu Chem Inc 新規な窒化珪素粉末の製造法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4969717A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1972-09-05 1974-07-05
JPS573710A (en) * 1980-06-09 1982-01-09 Mitsubishi Metal Corp Amophous silicon and its production
JPS58161909A (ja) * 1982-03-15 1983-09-26 Shin Etsu Chem Co Ltd シリコンイミドおよび／または窒化けい素の製造方法
JPS58213607A (ja) * 1982-06-07 1983-12-12 Shin Etsu Chem Co Ltd シリコンイミドおよび／または窒化けい素の製造方法
JPS59174506A (ja) * 1983-03-23 1984-10-03 Mitsui Toatsu Chem Inc 新規な窒化珪素粉末の製造法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6148409A (ja) * 1984-08-16 1986-03-10 Shin Etsu Chem Co Ltd けい素、炭素、窒素からなる微粉末およびその製造方法
JPH0356660A (ja) * 1989-07-26 1991-03-12 Shin Etsu Chem Co Ltd ＳｉＣとＳｉ↓３Ｎ↓４よりなる薄膜、その製造方法およびＸ線リソグラフィー用マスク

Also Published As

Publication number Publication date
JPH05326B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-01-05

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