JPS60216878A - 空間を有する被洗浄物の超音波洗浄装置 - Google Patents

空間を有する被洗浄物の超音波洗浄装置

Info

Publication number
JPS60216878A
JPS60216878A JP7184584A JP7184584A JPS60216878A JP S60216878 A JPS60216878 A JP S60216878A JP 7184584 A JP7184584 A JP 7184584A JP 7184584 A JP7184584 A JP 7184584A JP S60216878 A JPS60216878 A JP S60216878A
Authority
JP
Japan
Prior art keywords
ultrasonic
cleaned
space
cleaning
washed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7184584A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0330437B2 (enExample
Inventor
鈴木　協一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimada Rika Kogyo KK
Original Assignee
Shimada Rika Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimada Rika Kogyo KK filed Critical Shimada Rika Kogyo KK
Priority to JP7184584A priority Critical patent/JPS60216878A/ja
Publication of JPS60216878A publication Critical patent/JPS60216878A/ja
Publication of JPH0330437B2 publication Critical patent/JPH0330437B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP7184584A 1984-04-12 1984-04-12 空間を有する被洗浄物の超音波洗浄装置 Granted JPS60216878A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7184584A JPS60216878A (ja) 1984-04-12 1984-04-12 空間を有する被洗浄物の超音波洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7184584A JPS60216878A (ja) 1984-04-12 1984-04-12 空間を有する被洗浄物の超音波洗浄装置

Publications (2)

Publication Number Publication Date
JPS60216878A true JPS60216878A (ja) 1985-10-30
JPH0330437B2 JPH0330437B2 (enExample) 1991-04-30

Family

ID=13472280

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7184584A Granted JPS60216878A (ja) 1984-04-12 1984-04-12 空間を有する被洗浄物の超音波洗浄装置

Country Status (1)

Country Link
JP (1) JPS60216878A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0319588U (enExample) * 1989-06-30 1991-02-26

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5690983U (enExample) * 1979-12-12 1981-07-20

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5690983U (enExample) * 1979-12-12 1981-07-20

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0319588U (enExample) * 1989-06-30 1991-02-26

Also Published As

Publication number Publication date
JPH0330437B2 (enExample) 1991-04-30

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