JPH0330437B2 - - Google Patents

Info

Publication number
JPH0330437B2
JPH0330437B2 JP59071845A JP7184584A JPH0330437B2 JP H0330437 B2 JPH0330437 B2 JP H0330437B2 JP 59071845 A JP59071845 A JP 59071845A JP 7184584 A JP7184584 A JP 7184584A JP H0330437 B2 JPH0330437 B2 JP H0330437B2
Authority
JP
Japan
Prior art keywords
ultrasonic
cleaned
cleaning
space
radiator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59071845A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60216878A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7184584A priority Critical patent/JPS60216878A/ja
Publication of JPS60216878A publication Critical patent/JPS60216878A/ja
Publication of JPH0330437B2 publication Critical patent/JPH0330437B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP7184584A 1984-04-12 1984-04-12 空間を有する被洗浄物の超音波洗浄装置 Granted JPS60216878A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7184584A JPS60216878A (ja) 1984-04-12 1984-04-12 空間を有する被洗浄物の超音波洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7184584A JPS60216878A (ja) 1984-04-12 1984-04-12 空間を有する被洗浄物の超音波洗浄装置

Publications (2)

Publication Number Publication Date
JPS60216878A JPS60216878A (ja) 1985-10-30
JPH0330437B2 true JPH0330437B2 (enExample) 1991-04-30

Family

ID=13472280

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7184584A Granted JPS60216878A (ja) 1984-04-12 1984-04-12 空間を有する被洗浄物の超音波洗浄装置

Country Status (1)

Country Link
JP (1) JPS60216878A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0319588U (enExample) * 1989-06-30 1991-02-26

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6020468Y2 (ja) * 1979-12-12 1985-06-19 日本特殊陶業株式会社 洗浄用超音波振動装置

Also Published As

Publication number Publication date
JPS60216878A (ja) 1985-10-30

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