JPS60169138A - 真空処理装置 - Google Patents

真空処理装置

Info

Publication number
JPS60169138A
JPS60169138A JP59022807A JP2280784A JPS60169138A JP S60169138 A JPS60169138 A JP S60169138A JP 59022807 A JP59022807 A JP 59022807A JP 2280784 A JP2280784 A JP 2280784A JP S60169138 A JPS60169138 A JP S60169138A
Authority
JP
Japan
Prior art keywords
gas
vacuum processing
gas supply
orifice
stop valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59022807A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0521984B2 (OSRAM
Inventor
Yoshie Tanaka
田中　佳恵
Masaharu Saikai
西海　正治
Yoshifumi Ogawa
芳文 小川
Kazunori Tsujimoto
和典 辻本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP59022807A priority Critical patent/JPS60169138A/ja
Publication of JPS60169138A publication Critical patent/JPS60169138A/ja
Publication of JPH0521984B2 publication Critical patent/JPH0521984B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P50/00—

Landscapes

  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Chemical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP59022807A 1984-02-13 1984-02-13 真空処理装置 Granted JPS60169138A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59022807A JPS60169138A (ja) 1984-02-13 1984-02-13 真空処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59022807A JPS60169138A (ja) 1984-02-13 1984-02-13 真空処理装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP6086159A Division JP2646998B2 (ja) 1994-04-25 1994-04-25 真空処理方法

Publications (2)

Publication Number Publication Date
JPS60169138A true JPS60169138A (ja) 1985-09-02
JPH0521984B2 JPH0521984B2 (OSRAM) 1993-03-26

Family

ID=12092958

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59022807A Granted JPS60169138A (ja) 1984-02-13 1984-02-13 真空処理装置

Country Status (1)

Country Link
JP (1) JPS60169138A (OSRAM)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02216823A (ja) * 1989-02-17 1990-08-29 Tokyo Electron Ltd 処理方法
JPH04180567A (ja) * 1990-11-15 1992-06-26 Nec Kyushu Ltd 半導体製造装置の材料ガス供給システム
KR20020074708A (ko) * 2001-03-21 2002-10-04 삼성전자 주식회사 가스 투입 유량 증대 방법
JP2024509173A (ja) * 2021-06-23 2024-02-29 ウェハー・ワークス・エピタキシャル・コーポレーション エピタキシャルドーパントガス希釈装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57161065A (en) * 1981-03-31 1982-10-04 Fujitsu Ltd Continuous dry etching method

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57161065A (en) * 1981-03-31 1982-10-04 Fujitsu Ltd Continuous dry etching method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02216823A (ja) * 1989-02-17 1990-08-29 Tokyo Electron Ltd 処理方法
JPH04180567A (ja) * 1990-11-15 1992-06-26 Nec Kyushu Ltd 半導体製造装置の材料ガス供給システム
KR20020074708A (ko) * 2001-03-21 2002-10-04 삼성전자 주식회사 가스 투입 유량 증대 방법
JP2024509173A (ja) * 2021-06-23 2024-02-29 ウェハー・ワークス・エピタキシャル・コーポレーション エピタキシャルドーパントガス希釈装置

Also Published As

Publication number Publication date
JPH0521984B2 (OSRAM) 1993-03-26

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