JPS60161641A - 回路パツケージとその製造方法 - Google Patents

回路パツケージとその製造方法

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Publication number
JPS60161641A
JPS60161641A JP60003920A JP392085A JPS60161641A JP S60161641 A JPS60161641 A JP S60161641A JP 60003920 A JP60003920 A JP 60003920A JP 392085 A JP392085 A JP 392085A JP S60161641 A JPS60161641 A JP S60161641A
Authority
JP
Japan
Prior art keywords
carrier
circuit assembly
circuit
layer
insulator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP60003920A
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English (en)
Inventor
ジョン　スチュアート　ヒークス
ジョセブ・マン
リチャード　ゴードン　プラム
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STC PLC
Original Assignee
Standard Telephone and Cables PLC
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Filing date
Publication date
Application filed by Standard Telephone and Cables PLC filed Critical Standard Telephone and Cables PLC
Publication of JPS60161641A publication Critical patent/JPS60161641A/ja
Pending legal-status Critical Current

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    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
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    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/538—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates
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    • H01L23/5389—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates the chips being integrally enclosed by the interconnect and support structures
    • H—ELECTRICITY
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    • H01L24/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto
    • H01L24/23—Structure, shape, material or disposition of the high density interconnect connectors after the connecting process
    • H01L24/24—Structure, shape, material or disposition of the high density interconnect connectors after the connecting process of an individual high density interconnect connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
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    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/82—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected by forming build-up interconnects at chip-level, e.g. for high density interconnects [HDI]
    • H—ELECTRICITY
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    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/16—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different main groups of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. forming hybrid circuits
    • H—ELECTRICITY
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    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto
    • H01L2224/23—Structure, shape, material or disposition of the high density interconnect connectors after the connecting process
    • H01L2224/24—Structure, shape, material or disposition of the high density interconnect connectors after the connecting process of an individual high density interconnect connector
    • H01L2224/241—Disposition
    • H01L2224/24151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/24221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/24225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/24227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation the HDI interconnect not connecting to the same level of the item at which the semiconductor or solid-state body is mounted, e.g. the semiconductor or solid-state body being mounted in a cavity or on a protrusion of the item
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    • H01L2924/11—Device type
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    • H01L2924/1304—Transistor
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  • Engineering & Computer Science (AREA)
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  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Wire Bonding (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Light Receiving Elements (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。

Description

【発明の詳細な説明】 産業上の利用分野 本発明は集積回路及びハイブリッド集積回路のパッケー
ジングに関りる。
従来の技術 ガリウム　ヒ素で代表される高速度集積回路は規在開発
途上でありパイロワ１〜製造ラインでプロトタイプチッ
プがある程度の最生産されている。
回路チップの全能力を引き出すことは工業的に生産され
た標準的なパッケージが入手できないことから困難であ
る。小さな高周波パッケージがそこここのマイクロ波装
置で使われているがそれらのパッケージは複雑なデジタ
ルあるいはリニア回路には全く不適当である。複数のビ
ンを有ＪるＬＳＩパッケージは数多くあるがそれらは非
常な高周波で使用するには適していない。
発明が解決しようとする問題点 本発明の目的はこれらの困難を最小化ないし克服するこ
とにある。
問題点を解決するための手段 本発明は板状の担体と、この担体上へ配置された複数の
半導体素子と、該素子を被覆し平坦面を与える一層ない
しそれ以上の絶縁体の層と、該平面上へ設けられ該素子
間を結線゛す゛る一層ないしそれ以上の金属蒸着被膜層
を含む回路アセンブリを提供する。
実施例 本発明の実施例につき回路７’　ｔンブリを製造１−る
一連の］工程を示した第１図から第４図を参照しながら
説明リ−る。
図示の如く、回路アセンブリはキＡ７リア（担体）１１
（第１図）上に配置され、該キャリアの表面は例えばポ
リイミドなど絶縁体の厚い層１２で被覆されている。キ
ャリアは金属など導体でもまたセラミックなどの絶縁体
でも良いが、該キャリア上に支持される半導体素子と熱
的に整合するものが有利である。いくつかの用途例えば
フォトダイオード／増幅器アセンブリなどではキャリア
１１は透明で素子下方から光照射できるようになってい
Ｃも良い。このような構成は光伝送システムに利用でき
よう。
層１２は窒化珪素の薄い層１３で被覆され次にフォトレ
ジスト１４で選択的にマスクされる。該アセンブリは例
えば２段階の反性性イオンエツチングプロセスなどでマ
スクの上からエツチングされ、層１２上に窓１５（第２
図）が形成される。
該窓１５各々にはガリウム　ヒ素集積回路に代表される
半導体あるいは他の素子１６が設置される。
さらに例えばポリイミドなどの平面化層１７（第３図）
が付着せしめられ以後の加工のために実質的に平坦な表
面を与える。
次に層１７に開口部１８がエツチングにより形成され、
素子１６の端子部を露出させる。
次に最初の金属蒸着被膜層ないし結線層１９が真空蒸着
などでイ］与された適当なマスクの上から形成せしめら
れる。その上にさらにポリイミド層２０（第４図）をイ
１与し続いて第２の金属蒸着被膜２１による結線層をエ
ツチング及び金属蒸着工程により追加形成り−ることか
できる。この上部の金属蒸着パターン２１はボンドパッ
ド２２を含み、該回路アセンブリを外部へ接続できるよ
うになっ−Ｃいる。
ボンドパッド２２にはリード線を取りつけることができ
回路基板へ７リツプ取付【プすることができよう。ある
いはアレンブリは共面伝送線型式の入出力端子を有する
多ビンセラミックパッケージへ装着しても良い。インピ
ーダンス不整合を最小にするため入力ビンに厚膜抵抗器
を設（プでもよい。
本方法は高周波ガリウム　ヒ素回路への利用の他にフォ
トダイオード／増幅器のハイブリッド構成のパッケージ
ングにも有効である。典型的なハイブリッド組成はＧｃ
ｌｌｎＡＳフォトダイオードとＧａ　Ａｓ　ＭＥＳＦＥ
Ｔ増幅器、あルイハＧａ１ｎＡｓフ第１〜ダイオードと
シリコン　バイポーラ増幅器、またはシリコン　フ第１
−ダイオードと１ｎＧａＡｓ増幅器の組合せを含むが、
これらに限定されるものではない。
本回路構成は集積回路を対象として記述されたが他の能
動ｄ３よび／あるいは受動素子も本方法により同一のキ
ャリア上に結線され得ることは明らかであろう。
【図面の簡単な説明】
第１図は窒化珪素被膜１３とフォトレジスト１４を施さ
れたキャリア１１及び絶縁体層１２を示す図、第２図は
第１図の構成を１ツヂング後、絶縁体層１２に形成され
る窓に素子１６を設置した状態を承り図、第３図は第２
図の構成をさらに平面化層１７で被覆後マスク及びエツ
チングを施し、その上に金属蒸着被１１！Ｊ１９をマス
クを用いて選択的に形成せしめた状態を示Ｊ−図、第４
図は第３図の構成にさらに絶縁体層２０を付与した後エ
ツチングと金属蒸着を施し第２の金属魚盾層２１が形成
された状態を示ｕ図である。 １１・・・キャリア、１２・・・絶縁体、１３・・・窒
化■１素、１４・・・フォトレジスト、１５・・・窓、
１６・・・素子、１７・・・平面化層、１８・・・開口
部、１つ・・・金属蒸着被膜、２０・・・ポリイミド層
、２１・・・金属蒸着被膜、２２・・・ボンドパッド。 特Ｙ１出願人　スタンダード　テレフォンズアンド　ケ
ーブルス　パブリック 第１頁の続き ０発　明　者　リチャード　ゴートン　イギリス国プラ
ム　２番地

Claims (1)

  1. 【特許請求の範囲】 （１）板状の担体と、該担体上に配置された複数の半導
    体装置と、該装置を被覆し平坦面をなす一層ないしそれ
    以上の絶縁体の層と、該面上に設けられ該装置間を結線
    する一層ないしそれ以上の金属蒸着′ａ膜層を合む回路
    アセンブリ。 ■　該担体は電気伝導性である特許請求の範囲第１項記
    載の回路アセンブリ。 ■　該装置はガリウム　ヒ素集積回路である特許請求の
    範囲第１項記載の回路アセンブリ。 （４）該担体は光学的に透明である特許請求の範囲第１
    項記載の回路アレンブリ。 （５）　フ第１−ダイΔ−ド／増幅器のハイブリッド構
    成を含む特許請求の範囲第４項記載の回路アセンブリ。 （６）　ガリウム　インジウム　ヒ素　フォトダイオー
    ドを含む特許請求の範囲第５項記載の回路アセンブリ。 の　ガリウム　ヒｍ　ＭＥＳＦＥ−ｒ増幅器又は　・シ
    リコン　バイポーラ増幅器を含む特許請求の範囲第６項
    記載の回路アセンブリ。 （８）該絶縁体はポリイミドである特許請求の範囲第７
    項記載の回路アセンブリ。 ■）　該担体上へ固定された複数の素子を絶縁体により
    実質的に表面が平坦になるにうに被覆し、一層ないしそ
    れ以上の金属蒸着結線パターン層を該絶縁体上に施し、
    さらに該結線パターン層と該素子との接続を付与する構
    成を含む、同一の担体上へ複数の回路素子を装着づ°る
    方法。 （１０）全屈蒸着層は２層である特許請求の範囲第９項
    記載の方法。 （１１）絶縁体層は下部層及び上部層を含み、下部層は
    窓を有し該素子が該窓位置にて担体に設置される構、成
    のアセンブリを提供Ｊる特許請求の範囲第９項記載の方
    法。 （１２）該アセンブリは共面伝送線へと入力端を接続さ
    れたパッケージ内に設置される特許請求の範囲第１１項
    記載の方法。 （１３）各入力端がそれぞれ抵抗器で終結している特許
    請求範囲第１２項記載の方法。 （１４）特許請求の範囲第９項に記載の方法で構成され
    １＝回路アゼンブリ。 （１５）特許請求の範囲第１項に記載された回路アレン
    ブリを組込んだ光伝送システム。
JP60003920A 1984-01-13 1985-01-12 回路パツケージとその製造方法 Pending JPS60161641A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB08400954A GB2153144A (en) 1984-01-13 1984-01-13 Circuit packaging
GB8400954 1984-01-13

Publications (1)

Publication Number Publication Date
JPS60161641A true JPS60161641A (ja) 1985-08-23

Family

ID=10554966

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60003920A Pending JPS60161641A (ja) 1984-01-13 1985-01-12 回路パツケージとその製造方法

Country Status (3)

Country Link
EP (1) EP0149317A3 (ja)
JP (1) JPS60161641A (ja)
GB (1) GB2153144A (ja)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6281745A (ja) * 1985-10-05 1987-04-15 Fujitsu Ltd ウエハ−規模のｌｓｉ半導体装置とその製造方法
GB2189084B (en) * 1986-04-10 1989-11-22 Stc Plc Integrated circuit package
EP0398628A3 (en) * 1989-05-15 1991-09-25 Kabushiki Kaisha Toshiba Semiconductor memory device
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GB8400954D0 (en) 1984-02-15
GB2153144A (en) 1985-08-14
EP0149317A2 (en) 1985-07-24
EP0149317A3 (en) 1987-01-21

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