JPS60116178A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS60116178A
JPS60116178A JP58224650A JP22465083A JPS60116178A JP S60116178 A JPS60116178 A JP S60116178A JP 58224650 A JP58224650 A JP 58224650A JP 22465083 A JP22465083 A JP 22465083A JP S60116178 A JPS60116178 A JP S60116178A
Authority
JP
Japan
Prior art keywords
layer
semiconductor
mode
gate electrode
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58224650A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0123955B2 (enrdf_load_stackoverflow
Inventor
Yoshimi Yamashita
良美 山下
Kinshiro Kosemura
小瀬村　欣司郎
Hidetoshi Ishiwari
石割　秀敏
Sumio Yamamoto
純生 山本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP58224650A priority Critical patent/JPS60116178A/ja
Priority to KR1019840007422A priority patent/KR890003416B1/ko
Priority to DE8484308259T priority patent/DE3476841D1/de
Priority to EP84308259A priority patent/EP0143656B1/en
Priority to US06/676,359 priority patent/US4742379A/en
Publication of JPS60116178A publication Critical patent/JPS60116178A/ja
Priority to US07/146,664 priority patent/US4849368A/en
Publication of JPH0123955B2 publication Critical patent/JPH0123955B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/80—FETs having rectifying junction gate electrodes

Landscapes

  • Drying Of Semiconductors (AREA)
  • Junction Field-Effect Transistors (AREA)
JP58224650A 1983-11-29 1983-11-29 半導体装置の製造方法 Granted JPS60116178A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP58224650A JPS60116178A (ja) 1983-11-29 1983-11-29 半導体装置の製造方法
KR1019840007422A KR890003416B1 (ko) 1983-11-29 1984-11-27 반도체 장치 및 그의 제조방법
DE8484308259T DE3476841D1 (en) 1983-11-29 1984-11-28 Compound semiconductor device and method of producing it
EP84308259A EP0143656B1 (en) 1983-11-29 1984-11-28 Compound semiconductor device and method of producing it
US06/676,359 US4742379A (en) 1983-11-29 1984-11-29 HEMT with etch-stop
US07/146,664 US4849368A (en) 1983-11-29 1988-01-21 Method of producing a two-dimensional electron gas semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58224650A JPS60116178A (ja) 1983-11-29 1983-11-29 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS60116178A true JPS60116178A (ja) 1985-06-22
JPH0123955B2 JPH0123955B2 (enrdf_load_stackoverflow) 1989-05-09

Family

ID=16817043

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58224650A Granted JPS60116178A (ja) 1983-11-29 1983-11-29 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS60116178A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62194678A (ja) * 1986-02-20 1987-08-27 Fujitsu Ltd 半導体装置の製造方法
JPH02205362A (ja) * 1988-12-28 1990-08-15 American Teleph & Telegr Co <Att> ＧａＡｓ集積回路およびその製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62194678A (ja) * 1986-02-20 1987-08-27 Fujitsu Ltd 半導体装置の製造方法
JPH02205362A (ja) * 1988-12-28 1990-08-15 American Teleph & Telegr Co <Att> ＧａＡｓ集積回路およびその製造方法

Also Published As

Publication number Publication date
JPH0123955B2 (enrdf_load_stackoverflow) 1989-05-09

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