JPS60114578A - 金属薄板のエッチング方法 - Google Patents
金属薄板のエッチング方法Info
- Publication number
- JPS60114578A JPS60114578A JP22271583A JP22271583A JPS60114578A JP S60114578 A JPS60114578 A JP S60114578A JP 22271583 A JP22271583 A JP 22271583A JP 22271583 A JP22271583 A JP 22271583A JP S60114578 A JPS60114578 A JP S60114578A
- Authority
- JP
- Japan
- Prior art keywords
- opening
- etching
- resist film
- plate
- width
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005530 etching Methods 0.000 title claims abstract description 30
- 238000000034 method Methods 0.000 title claims description 18
- 239000002184 metal Substances 0.000 claims description 21
- 229910052751 metal Inorganic materials 0.000 claims description 21
- 239000010408 film Substances 0.000 claims 3
- 238000003754 machining Methods 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 229910000833 kovar Inorganic materials 0.000 abstract description 8
- 239000013078 crystal Substances 0.000 description 12
- 229920002120 photoresistant polymer Polymers 0.000 description 6
- 239000011521 glass Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 101100016026 Drosophila melanogaster GstE14 gene Proteins 0.000 description 1
- 235000016623 Fragaria vesca Nutrition 0.000 description 1
- 240000009088 Fragaria x ananassa Species 0.000 description 1
- 235000011363 Fragaria x ananassa Nutrition 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 235000003642 hunger Nutrition 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 239000005360 phosphosilicate glass Substances 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 230000037351 starvation Effects 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22271583A JPS60114578A (ja) | 1983-11-25 | 1983-11-25 | 金属薄板のエッチング方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22271583A JPS60114578A (ja) | 1983-11-25 | 1983-11-25 | 金属薄板のエッチング方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60114578A true JPS60114578A (ja) | 1985-06-21 |
| JPS6219506B2 JPS6219506B2 (enExample) | 1987-04-28 |
Family
ID=16786766
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22271583A Granted JPS60114578A (ja) | 1983-11-25 | 1983-11-25 | 金属薄板のエッチング方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60114578A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10123953B2 (en) | 2012-06-21 | 2018-11-13 | The Procter & Gamble Company | Reduction of tooth staining derived from cationic antimicrobials |
-
1983
- 1983-11-25 JP JP22271583A patent/JPS60114578A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6219506B2 (enExample) | 1987-04-28 |
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