JPS6219506B2 - - Google Patents
Info
- Publication number
- JPS6219506B2 JPS6219506B2 JP22271583A JP22271583A JPS6219506B2 JP S6219506 B2 JPS6219506 B2 JP S6219506B2 JP 22271583 A JP22271583 A JP 22271583A JP 22271583 A JP22271583 A JP 22271583A JP S6219506 B2 JPS6219506 B2 JP S6219506B2
- Authority
- JP
- Japan
- Prior art keywords
- etching
- opening
- thin metal
- resist film
- metal plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002184 metal Substances 0.000 claims description 29
- 229910052751 metal Inorganic materials 0.000 claims description 29
- 238000005530 etching Methods 0.000 claims description 27
- 238000000034 method Methods 0.000 claims description 15
- 239000013078 crystal Substances 0.000 description 10
- 229910000833 kovar Inorganic materials 0.000 description 9
- 229920002120 photoresistant polymer Polymers 0.000 description 9
- 239000011521 glass Substances 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910000531 Co alloy Inorganic materials 0.000 description 1
- KGWWEXORQXHJJQ-UHFFFAOYSA-N [Fe].[Co].[Ni] Chemical compound [Fe].[Co].[Ni] KGWWEXORQXHJJQ-UHFFFAOYSA-N 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22271583A JPS60114578A (ja) | 1983-11-25 | 1983-11-25 | 金属薄板のエッチング方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22271583A JPS60114578A (ja) | 1983-11-25 | 1983-11-25 | 金属薄板のエッチング方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60114578A JPS60114578A (ja) | 1985-06-21 |
| JPS6219506B2 true JPS6219506B2 (enExample) | 1987-04-28 |
Family
ID=16786766
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22271583A Granted JPS60114578A (ja) | 1983-11-25 | 1983-11-25 | 金属薄板のエッチング方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60114578A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10596086B2 (en) | 2012-06-21 | 2020-03-24 | The Procter & Gamble Company | Reduction of tooth staining derived from cationic antibacterials |
-
1983
- 1983-11-25 JP JP22271583A patent/JPS60114578A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10596086B2 (en) | 2012-06-21 | 2020-03-24 | The Procter & Gamble Company | Reduction of tooth staining derived from cationic antibacterials |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60114578A (ja) | 1985-06-21 |
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