JPS60109249A - 多層配線部材 - Google Patents

多層配線部材

Info

Publication number
JPS60109249A
JPS60109249A JP58216313A JP21631383A JPS60109249A JP S60109249 A JPS60109249 A JP S60109249A JP 58216313 A JP58216313 A JP 58216313A JP 21631383 A JP21631383 A JP 21631383A JP S60109249 A JPS60109249 A JP S60109249A
Authority
JP
Japan
Prior art keywords
word line
stepped portion
memory cell
wiring
insulating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58216313A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0572754B2 (enExample
Inventor
Yoshihisa Koyama
小山　芳久
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Microcomputer System Ltd
Hitachi Ltd
Original Assignee
Hitachi Ltd
Hitachi Microcomputer Engineering Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Hitachi Microcomputer Engineering Ltd filed Critical Hitachi Ltd
Priority to JP58216313A priority Critical patent/JPS60109249A/ja
Publication of JPS60109249A publication Critical patent/JPS60109249A/ja
Publication of JPH0572754B2 publication Critical patent/JPH0572754B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Semiconductor Memories (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP58216313A 1983-11-18 1983-11-18 多層配線部材 Granted JPS60109249A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58216313A JPS60109249A (ja) 1983-11-18 1983-11-18 多層配線部材

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58216313A JPS60109249A (ja) 1983-11-18 1983-11-18 多層配線部材

Publications (2)

Publication Number Publication Date
JPS60109249A true JPS60109249A (ja) 1985-06-14
JPH0572754B2 JPH0572754B2 (enExample) 1993-10-12

Family

ID=16686559

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58216313A Granted JPS60109249A (ja) 1983-11-18 1983-11-18 多層配線部材

Country Status (1)

Country Link
JP (1) JPS60109249A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62145863A (ja) * 1985-12-20 1987-06-29 Sanyo Electric Co Ltd 半導体記憶装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54524A (en) * 1977-06-02 1979-01-05 Nec Corp Semiconductor memory unit
JPS5694769A (en) * 1979-12-26 1981-07-31 Ibm Integrated circuit memory array

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54524A (en) * 1977-06-02 1979-01-05 Nec Corp Semiconductor memory unit
JPS5694769A (en) * 1979-12-26 1981-07-31 Ibm Integrated circuit memory array

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62145863A (ja) * 1985-12-20 1987-06-29 Sanyo Electric Co Ltd 半導体記憶装置

Also Published As

Publication number Publication date
JPH0572754B2 (enExample) 1993-10-12

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