JPH0572754B2 - - Google Patents

Info

Publication number
JPH0572754B2
JPH0572754B2 JP58216313A JP21631383A JPH0572754B2 JP H0572754 B2 JPH0572754 B2 JP H0572754B2 JP 58216313 A JP58216313 A JP 58216313A JP 21631383 A JP21631383 A JP 21631383A JP H0572754 B2 JPH0572754 B2 JP H0572754B2
Authority
JP
Japan
Prior art keywords
region
word line
layer
conductive layer
stepped portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58216313A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60109249A (ja
Inventor
Yoshihisa Koyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Microcomputer System Ltd
Hitachi Ltd
Original Assignee
Hitachi Microcomputer System Ltd
Hitachi Ltd
Hitachi Microcomputer Engineering Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Microcomputer System Ltd, Hitachi Ltd, Hitachi Microcomputer Engineering Ltd filed Critical Hitachi Microcomputer System Ltd
Priority to JP58216313A priority Critical patent/JPS60109249A/ja
Publication of JPS60109249A publication Critical patent/JPS60109249A/ja
Publication of JPH0572754B2 publication Critical patent/JPH0572754B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Semiconductor Memories (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP58216313A 1983-11-18 1983-11-18 多層配線部材 Granted JPS60109249A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58216313A JPS60109249A (ja) 1983-11-18 1983-11-18 多層配線部材

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58216313A JPS60109249A (ja) 1983-11-18 1983-11-18 多層配線部材

Publications (2)

Publication Number Publication Date
JPS60109249A JPS60109249A (ja) 1985-06-14
JPH0572754B2 true JPH0572754B2 (enExample) 1993-10-12

Family

ID=16686559

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58216313A Granted JPS60109249A (ja) 1983-11-18 1983-11-18 多層配線部材

Country Status (1)

Country Link
JP (1) JPS60109249A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62145863A (ja) * 1985-12-20 1987-06-29 Sanyo Electric Co Ltd 半導体記憶装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS596516B2 (ja) * 1977-06-02 1984-02-13 日本電気株式会社 半導体記憶装置
US4319342A (en) * 1979-12-26 1982-03-09 International Business Machines Corporation One device field effect transistor (FET) AC stable random access memory (RAM) array

Also Published As

Publication number Publication date
JPS60109249A (ja) 1985-06-14

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