JPS5976439A - 半導体装置の診断方法 - Google Patents

半導体装置の診断方法

Info

Publication number
JPS5976439A
JPS5976439A JP57185537A JP18553782A JPS5976439A JP S5976439 A JPS5976439 A JP S5976439A JP 57185537 A JP57185537 A JP 57185537A JP 18553782 A JP18553782 A JP 18553782A JP S5976439 A JPS5976439 A JP S5976439A
Authority
JP
Japan
Prior art keywords
voltage
semiconductor device
electron beam
region
control device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57185537A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6327854B2 (enrdf_load_stackoverflow
Inventor
Yoshiaki Goto
後藤　善朗
Akio Ito
昭夫 伊藤
Yasuo Furukawa
古川　泰男
Yushi Inagaki
雄史 稲垣
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP57185537A priority Critical patent/JPS5976439A/ja
Publication of JPS5976439A publication Critical patent/JPS5976439A/ja
Publication of JPS6327854B2 publication Critical patent/JPS6327854B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP57185537A 1982-10-22 1982-10-22 半導体装置の診断方法 Granted JPS5976439A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57185537A JPS5976439A (ja) 1982-10-22 1982-10-22 半導体装置の診断方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57185537A JPS5976439A (ja) 1982-10-22 1982-10-22 半導体装置の診断方法

Publications (2)

Publication Number Publication Date
JPS5976439A true JPS5976439A (ja) 1984-05-01
JPS6327854B2 JPS6327854B2 (enrdf_load_stackoverflow) 1988-06-06

Family

ID=16172535

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57185537A Granted JPS5976439A (ja) 1982-10-22 1982-10-22 半導体装置の診断方法

Country Status (1)

Country Link
JP (1) JPS5976439A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6211148A (ja) * 1985-06-28 1987-01-20 Hitachi Electronics Eng Co Ltd 異物検査装置
JP2002260569A (ja) * 2001-02-27 2002-09-13 Shimadzu Corp Ｅｚフィルタ分光方法及びその装置
JP2005227263A (ja) * 2004-02-12 2005-08-25 Applied Materials Inc 集積基板搬送モジュールを備えた電子ビームテストシステム
JP2006506629A (ja) * 2002-11-18 2006-02-23 アプライド マテリアルズ ゲーエムベーハー 検査体の接触のための装置及び方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6211148A (ja) * 1985-06-28 1987-01-20 Hitachi Electronics Eng Co Ltd 異物検査装置
JP2002260569A (ja) * 2001-02-27 2002-09-13 Shimadzu Corp Ｅｚフィルタ分光方法及びその装置
JP2006506629A (ja) * 2002-11-18 2006-02-23 アプライド マテリアルズ ゲーエムベーハー 検査体の接触のための装置及び方法
JP2005227263A (ja) * 2004-02-12 2005-08-25 Applied Materials Inc 集積基板搬送モジュールを備えた電子ビームテストシステム

Also Published As

Publication number Publication date
JPS6327854B2 (enrdf_load_stackoverflow) 1988-06-06

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