JPS5974659U - イオン注入装置のイオン発生装置 - Google Patents

イオン注入装置のイオン発生装置

Info

Publication number
JPS5974659U
JPS5974659U JP17033382U JP17033382U JPS5974659U JP S5974659 U JPS5974659 U JP S5974659U JP 17033382 U JP17033382 U JP 17033382U JP 17033382 U JP17033382 U JP 17033382U JP S5974659 U JPS5974659 U JP S5974659U
Authority
JP
Japan
Prior art keywords
ion
arc chamber
generator
ion implantation
implanter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17033382U
Other languages
English (en)
Japanese (ja)
Other versions
JPH051895Y2 (enrdf_load_stackoverflow
Inventor
石垣　秀樹
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP17033382U priority Critical patent/JPS5974659U/ja
Publication of JPS5974659U publication Critical patent/JPS5974659U/ja
Application granted granted Critical
Publication of JPH051895Y2 publication Critical patent/JPH051895Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP17033382U 1982-11-10 1982-11-10 イオン注入装置のイオン発生装置 Granted JPS5974659U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17033382U JPS5974659U (ja) 1982-11-10 1982-11-10 イオン注入装置のイオン発生装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17033382U JPS5974659U (ja) 1982-11-10 1982-11-10 イオン注入装置のイオン発生装置

Publications (2)

Publication Number Publication Date
JPS5974659U true JPS5974659U (ja) 1984-05-21
JPH051895Y2 JPH051895Y2 (enrdf_load_stackoverflow) 1993-01-19

Family

ID=30371880

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17033382U Granted JPS5974659U (ja) 1982-11-10 1982-11-10 イオン注入装置のイオン発生装置

Country Status (1)

Country Link
JP (1) JPS5974659U (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07153417A (ja) * 1993-11-26 1995-06-16 Tel Varian Ltd イオン注入装置
JPH10188833A (ja) * 1996-12-26 1998-07-21 Toshiba Corp イオン発生装置及びイオン照射装置
JP2014086137A (ja) * 2012-10-19 2014-05-12 Ran Technical Service Kk コールドカソード型イオン源

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5252099A (en) * 1975-10-22 1977-04-26 Hitachi Ltd Plasma ion source
JPS5459870A (en) * 1977-10-21 1979-05-14 Japan Atomic Energy Res Inst Ion source unit

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5252099A (en) * 1975-10-22 1977-04-26 Hitachi Ltd Plasma ion source
JPS5459870A (en) * 1977-10-21 1979-05-14 Japan Atomic Energy Res Inst Ion source unit

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07153417A (ja) * 1993-11-26 1995-06-16 Tel Varian Ltd イオン注入装置
JPH10188833A (ja) * 1996-12-26 1998-07-21 Toshiba Corp イオン発生装置及びイオン照射装置
JP2014086137A (ja) * 2012-10-19 2014-05-12 Ran Technical Service Kk コールドカソード型イオン源

Also Published As

Publication number Publication date
JPH051895Y2 (enrdf_load_stackoverflow) 1993-01-19

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