JPS5459870A - Ion source unit - Google Patents
Ion source unitInfo
- Publication number
- JPS5459870A JPS5459870A JP12689977A JP12689977A JPS5459870A JP S5459870 A JPS5459870 A JP S5459870A JP 12689977 A JP12689977 A JP 12689977A JP 12689977 A JP12689977 A JP 12689977A JP S5459870 A JPS5459870 A JP S5459870A
- Authority
- JP
- Japan
- Prior art keywords
- source unit
- ion source
- ion
- unit
- source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Welding Or Cutting Using Electron Beams (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12689977A JPS5459870A (en) | 1977-10-21 | 1977-10-21 | Ion source unit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12689977A JPS5459870A (en) | 1977-10-21 | 1977-10-21 | Ion source unit |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5459870A true JPS5459870A (en) | 1979-05-14 |
JPS6118302B2 JPS6118302B2 (en) | 1986-05-12 |
Family
ID=14946625
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12689977A Granted JPS5459870A (en) | 1977-10-21 | 1977-10-21 | Ion source unit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5459870A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5974659U (en) * | 1982-11-10 | 1984-05-21 | 東京エレクトロン株式会社 | Ion generator of ion implanter |
-
1977
- 1977-10-21 JP JP12689977A patent/JPS5459870A/en active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5974659U (en) * | 1982-11-10 | 1984-05-21 | 東京エレクトロン株式会社 | Ion generator of ion implanter |
JPH051895Y2 (en) * | 1982-11-10 | 1993-01-19 |
Also Published As
Publication number | Publication date |
---|---|
JPS6118302B2 (en) | 1986-05-12 |
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