JPS53100399A - Power source for ion source - Google Patents
Power source for ion sourceInfo
- Publication number
- JPS53100399A JPS53100399A JP1594477A JP1594477A JPS53100399A JP S53100399 A JPS53100399 A JP S53100399A JP 1594477 A JP1594477 A JP 1594477A JP 1594477 A JP1594477 A JP 1594477A JP S53100399 A JPS53100399 A JP S53100399A
- Authority
- JP
- Japan
- Prior art keywords
- source
- ion
- power source
- power
- ion source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1594477A JPS53100399A (en) | 1977-02-15 | 1977-02-15 | Power source for ion source |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1594477A JPS53100399A (en) | 1977-02-15 | 1977-02-15 | Power source for ion source |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53100399A true JPS53100399A (en) | 1978-09-01 |
Family
ID=11902864
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1594477A Pending JPS53100399A (en) | 1977-02-15 | 1977-02-15 | Power source for ion source |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53100399A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1085602C (en) * | 1997-05-30 | 2002-05-29 | 住友电木株式会社 | Sealed container |
-
1977
- 1977-02-15 JP JP1594477A patent/JPS53100399A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1085602C (en) * | 1997-05-30 | 2002-05-29 | 住友电木株式会社 | Sealed container |
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