JPS5452461A - Ion source - Google Patents

Ion source

Info

Publication number
JPS5452461A
JPS5452461A JP11931977A JP11931977A JPS5452461A JP S5452461 A JPS5452461 A JP S5452461A JP 11931977 A JP11931977 A JP 11931977A JP 11931977 A JP11931977 A JP 11931977A JP S5452461 A JPS5452461 A JP S5452461A
Authority
JP
Japan
Prior art keywords
ion source
ion
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11931977A
Other languages
Japanese (ja)
Other versions
JPS6262020B2 (en
Inventor
Kouji Matsuda
Susumu Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin High Voltage Co Ltd
Original Assignee
Nissin High Voltage Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin High Voltage Co Ltd filed Critical Nissin High Voltage Co Ltd
Priority to JP11931977A priority Critical patent/JPS5452461A/en
Publication of JPS5452461A publication Critical patent/JPS5452461A/en
Publication of JPS6262020B2 publication Critical patent/JPS6262020B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP11931977A 1977-10-03 1977-10-03 Ion source Granted JPS5452461A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11931977A JPS5452461A (en) 1977-10-03 1977-10-03 Ion source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11931977A JPS5452461A (en) 1977-10-03 1977-10-03 Ion source

Publications (2)

Publication Number Publication Date
JPS5452461A true JPS5452461A (en) 1979-04-25
JPS6262020B2 JPS6262020B2 (en) 1987-12-24

Family

ID=14758501

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11931977A Granted JPS5452461A (en) 1977-10-03 1977-10-03 Ion source

Country Status (1)

Country Link
JP (1) JPS5452461A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0276218U (en) * 1988-11-29 1990-06-12

Also Published As

Publication number Publication date
JPS6262020B2 (en) 1987-12-24

Similar Documents

Publication Publication Date Title
JPS52125998A (en) Ion source
HU179482B (en) Penning pulverizel source
GB2003318B (en) Tandem ion accelerators
CS178278A2 (en) Zarizeni k vytvareni tenkeho filmu kapaliny
JPS5641659A (en) Xxray source
JPS53123798A (en) Ion generator
JPS524998A (en) Ion beam unit
JPS53114041A (en) Selffbalance type power source device
JPS5679900A (en) Ion source
JPS5663799A (en) Ion source
GB2014355B (en) Ion sources
JPS53140498A (en) Ion source
JPS5424627A (en) Removinggagent for phtoresist
JPS5438776A (en) Fet
GB2028575B (en) Ion sources
JPS5482796A (en) Ion source
JPS51123196A (en) Ion source
JPS5452461A (en) Ion source
GB1543530A (en) Ion source
JPS5410941A (en) Power source
JPS5486667A (en) Instant curry source
JPS53112696A (en) Ion generator
JPS5459870A (en) Ion source unit
AU4076678A (en) Nd catalystused therein
JPS53123797A (en) Ion source