JPS5961794A - Ｅｄｘ冷却用液体窒素容器の取付構造 - Google Patents

Ｅｄｘ冷却用液体窒素容器の取付構造

Info

Publication number
JPS5961794A
JPS5961794A JP57172666A JP17266682A JPS5961794A JP S5961794 A JPS5961794 A JP S5961794A JP 57172666 A JP57172666 A JP 57172666A JP 17266682 A JP17266682 A JP 17266682A JP S5961794 A JPS5961794 A JP S5961794A
Authority
JP
Japan
Prior art keywords
liquid nitrogen
container
edx
cooling
nitrogen container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57172666A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0353586B2 (cg-RX-API-DMAC7.html
Inventor
Hiroyoshi Soejima
啓義 副島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Shimazu Seisakusho KK
Original Assignee
Shimadzu Corp
Shimazu Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp, Shimazu Seisakusho KK filed Critical Shimadzu Corp
Priority to JP57172666A priority Critical patent/JPS5961794A/ja
Publication of JPS5961794A publication Critical patent/JPS5961794A/ja
Publication of JPH0353586B2 publication Critical patent/JPH0353586B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measurement Of Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP57172666A 1982-09-30 1982-09-30 Ｅｄｘ冷却用液体窒素容器の取付構造 Granted JPS5961794A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57172666A JPS5961794A (ja) 1982-09-30 1982-09-30 Ｅｄｘ冷却用液体窒素容器の取付構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57172666A JPS5961794A (ja) 1982-09-30 1982-09-30 Ｅｄｘ冷却用液体窒素容器の取付構造

Publications (2)

Publication Number Publication Date
JPS5961794A true JPS5961794A (ja) 1984-04-09
JPH0353586B2 JPH0353586B2 (cg-RX-API-DMAC7.html) 1991-08-15

Family

ID=15946115

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57172666A Granted JPS5961794A (ja) 1982-09-30 1982-09-30 Ｅｄｘ冷却用液体窒素容器の取付構造

Country Status (1)

Country Link
JP (1) JPS5961794A (cg-RX-API-DMAC7.html)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS619761U (ja) * 1984-06-25 1986-01-21 日本電子株式会社 電子線装置
US20130299698A1 (en) * 2009-05-15 2013-11-14 Fei Company Electron Microscope with Integrated Detector(s)
WO2014094381A1 (zh) * 2012-12-20 2014-06-26 北京农业信息技术研究中心 一种土壤表面氮元素分布的快速测量方法和系统
US9972474B2 (en) 2016-07-31 2018-05-15 Fei Company Electron microscope with multiple types of integrated x-ray detectors arranged in an array

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS619761U (ja) * 1984-06-25 1986-01-21 日本電子株式会社 電子線装置
US20130299698A1 (en) * 2009-05-15 2013-11-14 Fei Company Electron Microscope with Integrated Detector(s)
US8987665B2 (en) * 2009-05-15 2015-03-24 Fei Company Electron microscope with integrated detector(s)
WO2014094381A1 (zh) * 2012-12-20 2014-06-26 北京农业信息技术研究中心 一种土壤表面氮元素分布的快速测量方法和系统
US9972474B2 (en) 2016-07-31 2018-05-15 Fei Company Electron microscope with multiple types of integrated x-ray detectors arranged in an array

Also Published As

Publication number Publication date
JPH0353586B2 (cg-RX-API-DMAC7.html) 1991-08-15

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