JPH0353586B2 - - Google Patents

Info

Publication number
JPH0353586B2
JPH0353586B2 JP57172666A JP17266682A JPH0353586B2 JP H0353586 B2 JPH0353586 B2 JP H0353586B2 JP 57172666 A JP57172666 A JP 57172666A JP 17266682 A JP17266682 A JP 17266682A JP H0353586 B2 JPH0353586 B2 JP H0353586B2
Authority
JP
Japan
Prior art keywords
container
liquid nitrogen
edx
cooling
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57172666A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5961794A (ja
Inventor
Hiroyoshi Soejima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP57172666A priority Critical patent/JPS5961794A/ja
Publication of JPS5961794A publication Critical patent/JPS5961794A/ja
Publication of JPH0353586B2 publication Critical patent/JPH0353586B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measurement Of Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP57172666A 1982-09-30 1982-09-30 Ｅｄｘ冷却用液体窒素容器の取付構造 Granted JPS5961794A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57172666A JPS5961794A (ja) 1982-09-30 1982-09-30 Ｅｄｘ冷却用液体窒素容器の取付構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57172666A JPS5961794A (ja) 1982-09-30 1982-09-30 Ｅｄｘ冷却用液体窒素容器の取付構造

Publications (2)

Publication Number Publication Date
JPS5961794A JPS5961794A (ja) 1984-04-09
JPH0353586B2 true JPH0353586B2 (cg-RX-API-DMAC7.html) 1991-08-15

Family

ID=15946115

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57172666A Granted JPS5961794A (ja) 1982-09-30 1982-09-30 Ｅｄｘ冷却用液体窒素容器の取付構造

Country Status (1)

Country Link
JP (1) JPS5961794A (cg-RX-API-DMAC7.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS619761U (ja) * 1984-06-25 1986-01-21 日本電子株式会社 電子線装置
CN102575994B (zh) * 2009-05-15 2016-08-17 Fei公司 带集成探测器的电子显微镜
CN103076309B (zh) * 2012-12-20 2014-12-17 北京农业信息技术研究中心 一种土壤表面氮元素分布的快速测量方法和系统
US9972474B2 (en) 2016-07-31 2018-05-15 Fei Company Electron microscope with multiple types of integrated x-ray detectors arranged in an array

Also Published As

Publication number Publication date
JPS5961794A (ja) 1984-04-09

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