JPS5951544A - 誘電体分離半導体集積回路装置の製造方法 - Google Patents

誘電体分離半導体集積回路装置の製造方法

Info

Publication number
JPS5951544A
JPS5951544A JP57162730A JP16273082A JPS5951544A JP S5951544 A JPS5951544 A JP S5951544A JP 57162730 A JP57162730 A JP 57162730A JP 16273082 A JP16273082 A JP 16273082A JP S5951544 A JPS5951544 A JP S5951544A
Authority
JP
Japan
Prior art keywords
film
silicon nitride
silicon
dielectric material
nitride film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57162730A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6317334B2 (enExample
Inventor
Akinobu Satou
佐藤　倬暢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JIDO KEISOKU GIJUTSU KENKIYUUKUMIAI
Original Assignee
JIDO KEISOKU GIJUTSU KENKIYUUKUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by JIDO KEISOKU GIJUTSU KENKIYUUKUMIAI filed Critical JIDO KEISOKU GIJUTSU KENKIYUUKUMIAI
Priority to JP57162730A priority Critical patent/JPS5951544A/ja
Publication of JPS5951544A publication Critical patent/JPS5951544A/ja
Publication of JPS6317334B2 publication Critical patent/JPS6317334B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W10/019—
    • H10W10/10—

Landscapes

  • Element Separation (AREA)
JP57162730A 1982-09-17 1982-09-17 誘電体分離半導体集積回路装置の製造方法 Granted JPS5951544A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57162730A JPS5951544A (ja) 1982-09-17 1982-09-17 誘電体分離半導体集積回路装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57162730A JPS5951544A (ja) 1982-09-17 1982-09-17 誘電体分離半導体集積回路装置の製造方法

Publications (2)

Publication Number Publication Date
JPS5951544A true JPS5951544A (ja) 1984-03-26
JPS6317334B2 JPS6317334B2 (enExample) 1988-04-13

Family

ID=15760174

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57162730A Granted JPS5951544A (ja) 1982-09-17 1982-09-17 誘電体分離半導体集積回路装置の製造方法

Country Status (1)

Country Link
JP (1) JPS5951544A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60177644A (ja) * 1984-02-23 1985-09-11 Matsushita Electric Works Ltd 高耐圧半導体装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS568842A (en) * 1979-07-04 1981-01-29 Nippon Telegr & Teleph Corp <Ntt> Semiconductor integrated circuit device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS568842A (en) * 1979-07-04 1981-01-29 Nippon Telegr & Teleph Corp <Ntt> Semiconductor integrated circuit device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60177644A (ja) * 1984-02-23 1985-09-11 Matsushita Electric Works Ltd 高耐圧半導体装置

Also Published As

Publication number Publication date
JPS6317334B2 (enExample) 1988-04-13

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