JPS5948948A - 半導体構造素子中の半導体結晶と接続部位とをボンデイングするための金又は金合金線材 - Google Patents

半導体構造素子中の半導体結晶と接続部位とをボンデイングするための金又は金合金線材

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Publication number
JPS5948948A
JPS5948948A JP58146781A JP14678183A JPS5948948A JP S5948948 A JPS5948948 A JP S5948948A JP 58146781 A JP58146781 A JP 58146781A JP 14678183 A JP14678183 A JP 14678183A JP S5948948 A JPS5948948 A JP S5948948A
Authority
JP
Japan
Prior art keywords
wire
gold
semiconductor crystal
insemiconductor
alloy wire
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP58146781A
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English (en)
Inventor
フオルカ−・ルスビユルト
ギユンタ−・シユランプ
ヴオルフラム・マルチン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DEMETORON G FUYUURU EREKUTORON
DEMETORON G FUYUURU EREKUTORONIIKU BUERUKUSHIYUTOTSUFUE MBH
Original Assignee
DEMETORON G FUYUURU EREKUTORON
DEMETORON G FUYUURU EREKUTORONIIKU BUERUKUSHIYUTOTSUFUE MBH
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Application filed by DEMETORON G FUYUURU EREKUTORON, DEMETORON G FUYUURU EREKUTORONIIKU BUERUKUSHIYUTOTSUFUE MBH filed Critical DEMETORON G FUYUURU EREKUTORON
Publication of JPS5948948A publication Critical patent/JPS5948948A/ja
Pending legal-status Critical Current

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    • H01L24/42—Wire connectors; Manufacturing methods related thereto
    • H01L24/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L24/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
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    • H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001—Core members of the connector
    • H01L2224/4501—Shape
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    • H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/45144—Gold (Au) as principal constituent
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    • H01L2224/484—Connecting portions
    • H01L2224/48463—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
    • H01L2224/48465—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond the other connecting portion not on the bonding area being a wedge bond, i.e. ball-to-wedge, regular stitch
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    • H01L2224/8512—Aligning
    • H01L2224/85148—Aligning involving movement of a part of the bonding apparatus
    • H01L2224/85169—Aligning involving movement of a part of the bonding apparatus being the upper part of the bonding apparatus, i.e. bonding head, e.g. capillary or wedge
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  • Engineering & Computer Science (AREA)
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  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Wire Bonding (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。

Description

【発明の詳細な説明】 本発明は、半導体構造素子中の半導体結晶と接続部位と
をボンディングするための金又は金合金線材に関する。
半導体工業では金又は全合金製の細い線材が半導体結晶
とケーシングの接続部位もしくはシステム支持体の接続
部位とのボンディングに使われる。一般に、半導体結晶
でのボンディングは、予め線材の溶融により形成したボ
ールを押圧することにより形成する（所謂゛°セール・
丁ンディン〆″）。システム支持体でＱ：１、線材を特
別な形状の縁を有するスタンプを月１いて接続部位とぎ
ンデイングする（所謂゛ウェッジ・ｄ？ンデイング′”
）。両者において、線４′、ｊの供給は送出ボビンから
クランプにより所謂ｉンデ・ｒング用細管を通して行な
われる。この７１川管ｄ、線材の出口部に、線材を接続
部位に押何けかつその際にその部位と・１ごシデインダ
させる縁を有する殊に、このｙ＋？：ｌ：”法は完全自
動製造に々ｒ適である。最近は、土導体結晶と接続部位
との間で１秒間に４本及びそれ以上までのアーチ形、１
？ンＩ−線を製作するイ、−のための白動高゛ｌｆｆ１
ｇ能装置が開発された。細い線材は、Ｉ？ンデ・ｒング
］１：稈てクンンブにより細管中に供給される間もかつ
＝Ａたーノ′−チ形ボンド線の製造の際にも顕旨な機械
的ｆ′↓荷を受ける。この負荷は一部はりＩＩ′ｌ／１
．変形であるが、より多くは既にアーチ形７１？ンド線
の形成の際に可塑性変形である。しばしば復１イ［な集
積回路では、単結晶に対１−で、−・股に結合間１“１
・４及び橋かけ空隙の高さの点て著しくイＵ迫している
多数の線４４結合部、例えば２４個又は４８個の接続部
が製造される。
自動高速、Ｉ？ンデイング装置の導入以来１．ｌｒンデ
イング速度が次第に高まりかつ線拐の］・乏さ及び高さ
寸法が増すまず異なるにイ゛１′い古典的な金線では著
しいどンデイング誤差が生しｐｌることが明らかになっ
た。最も懸念していることは、構造素子中で短絡を惹起
し得るアーチ線材のたるみ（“’　ｓａｇｇｉｎｇ　”
　）、アーチ線材が全体的に傾いたり又は捩れる所謂゛
ドリフト″並びにアーチ形線材中に折れを生せしめる過
大長さである。通常の許容度における所定の破壊荷重及
び伸び率を有する線材から種々のアーチ形線材を製造す
る際に極めて様々な負荷により惹起されるこれらの作用
は完全自動半導体製−造で深刻な問題をもたらす。
それ故、本発明の課題は、アーチ形線材のたるみ、所謂
ドリフト並びに過大長さを確実に回避する、半導体構造
素子中の半導体結晶を接続部位上デンディングするため
の金又は金合金製線材を開示することであった。
本発明によれば、この課題は、、　線１＋（中のクリス
タリット少なくとも５０％が繊維組織（１００）に相応
する軸方向における１憂先方向性を有することにより解
決された。
本発明による金製もしくは金合金製線４′Ａによ−り公
知の線４４で明らかとなった困難が回ＪＩ？？される。
殊に、直径範囲１２〜１５６μｍである金製もしくは金
合金製線イ゛イが線材の軸方向において配向性（１００
）の特徴的な結晶粒子の繊組組織を有する場合に、通常
のボンガイレグ法ではたるんだアーチ形線材、ドｌ）　
−）　ｌ−及び過大長さを惹起しないことが判明し驚異
的であった。
繊祁４組織（１００）に配向された部分と基本的に組織
（１，１１）に配向されているものを包含する二重繊組
：組織が特に有利である。、その際に、存在する結晶配
向の相対的な部的；ｉｊ１合を結晶粒子の少なくとも５
０％、有利に６５％以上が繊維組織（ｌ○０）で存在す
るように決定することが重要である。、（１００）及び
（］−１１）配向の繊維組織が同峙に存在する際に、こ
れらが列、に（１，１１）ｄｌｌ織が線材ＩＩ伯の艮丁
力向において線材の内部に及び（ｌ○０）配向の糺識が
同様に縦刺Ｉの方向で表１・ご中に、つまり線材の外周
範囲に存在する」、うに描成されている」場合に特に有
利であることが明らかになった。、線材中のクリスタリ
ットの優先方向性の形成は公知である。例えば金線を３
００　’Ｌ：で５０分間にわたって焼鈍することにより
ｉ：ｌｌｔた繊維組織（１００）が得られる。例えば破
壊荷重及び伸びのような一定の機械的’＋ｆｌ：　ｆ’
ｆを達成するためこの目的に関して公知の一定の元素を
金線に添加して合金形成することができる。例えば、所
定の伸びで十分な破壊荷重を達成するためベリリウム３
〜１０ｐｐｍを含有する金線を使用することは知られて
いる。
しかしながら、特に高速自動ゼンデイング装置を使用す
る際に確実で均質なｓｔン１：′品質を保障するには組
織のないそのような合金又は類縁合金は十分ではない。
勿論、そのような線材で線材中のクリスタリットの本発
明による優先方向性を形成する場合に、完全に機能的な
かつ妨害なく作動するＳ？ンＰ線材が得られる。その際
に、必要な組織の生成に必要であるｄｌｌ：鈍時間及び
焼鈍温度は線材の合金系及びその都度の線イオ直径に左
右される１、それは数回の手による試験で容易に決定す
ることができる。（１００）及び（ｌｌ’ｌ）への完全
な組織イ１ｊｌ造という理想的な形成は全く稀ＩＬにし
か可能でｉｔないことｔｔｒｙｊらかである。通’ｌ：
？は若干のクリスタリツＩ・分Ｑｊ：無秩序なばらつき
“ＩＪＳ態で存在する。１２０３−

Claims (1)

  1. 【特許請求の範囲】 １、　線４°イ中のクリスタリット少なくとも５０％が
    繊に＋ｌｌＡ’、Ｉｔ織（１００）に相応する軸方向に
    おけるｆＱＨ−光力向性を有することを特徴とする、半
    導体ＩＸ’ｘ造素子中の半導体結晶と接続部位とヲＨ？
    ンデイングするための金又は金合金線材２、　クリスタ
    リットの少なくとも６５％が繊維組織（ｌｏ’０）を有
    する特許請求の範囲第１項記載の線材。 ３、　他のクリスタリットが主に繊維組織（１１１）で
    排列している特許請求の範囲第１項又は第２項記載の線
    材。 ４、繊維組織（１１１）が線材の忌中にかつ繊維組織（
    １００）が線材の表層中に構成されている特許請求の範
    囲第１項〜第３項のいずれか１項に記載の線材。 ５、　直径１２〜１’５０μｌｕをイｊする’（’ｋ　
    ｔｆ’ｌ晶求の範囲第１項〜第４項のいずれか１項に記
    載の線材。
JP58146781A 1982-08-14 1983-08-12 半導体構造素子中の半導体結晶と接続部位とをボンデイングするための金又は金合金線材 Pending JPS5948948A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE32303769 1982-08-14
DE3230376A DE3230376C2 (de) 1982-08-14 1982-08-14 Draht aus Gold oder Goldlegierung

Publications (1)

Publication Number Publication Date
JPS5948948A true JPS5948948A (ja) 1984-03-21

Family

ID=6170951

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58146781A Pending JPS5948948A (ja) 1982-08-14 1983-08-12 半導体構造素子中の半導体結晶と接続部位とをボンデイングするための金又は金合金線材

Country Status (4)

Country Link
EP (1) EP0101592A3 (ja)
JP (1) JPS5948948A (ja)
BR (1) BR8304323A (ja)
DE (1) DE3230376C2 (ja)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004049425A1 (ja) * 2002-11-27 2004-06-10 Nippon Steel Corporation 半導体装置用金ボンディングワイヤおよびその製造方法
JP2005268771A (ja) * 2004-02-20 2005-09-29 Nippon Steel Corp 半導体装置用金ボンディングワイヤ及びその接続方法
CN100352026C (zh) * 2002-11-27 2007-11-28 新日本制铁株式会社 半导体器件的金连接线及其生产方法
US7390370B2 (en) 2002-04-05 2008-06-24 Nippon Steel Corporation Gold bonding wires for semiconductor devices and method of producing the wires
WO2009072525A1 (ja) * 2007-12-03 2009-06-11 Nippon Steel Materials Co., Ltd. 半導体装置用ボンディングワイヤ
WO2009072498A1 (ja) * 2007-12-03 2009-06-11 Nippon Steel Materials Co., Ltd. 半導体装置用ボンディングワイヤ

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE555587C (de) * 1926-04-07 1932-07-27 Degussa Verfahren zur Waermebehandlung von Goldlegierungen
US3141799A (en) * 1958-08-27 1964-07-21 Brellier Edmond Heat treatment of gold alloys
GB1134492A (en) * 1964-03-11 1968-11-27 Johnson Matthey Co Ltd Methods of improving the mechanical properties of metals and their alloys
US4330329A (en) * 1979-11-28 1982-05-18 Tanaka Denshi Kogyo Kabushiki Kaisha Gold bonding wire for semiconductor elements and the semiconductor element

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7390370B2 (en) 2002-04-05 2008-06-24 Nippon Steel Corporation Gold bonding wires for semiconductor devices and method of producing the wires
WO2004049425A1 (ja) * 2002-11-27 2004-06-10 Nippon Steel Corporation 半導体装置用金ボンディングワイヤおよびその製造方法
CN100352026C (zh) * 2002-11-27 2007-11-28 新日本制铁株式会社 半导体器件的金连接线及其生产方法
JP2005268771A (ja) * 2004-02-20 2005-09-29 Nippon Steel Corp 半導体装置用金ボンディングワイヤ及びその接続方法
WO2009072525A1 (ja) * 2007-12-03 2009-06-11 Nippon Steel Materials Co., Ltd. 半導体装置用ボンディングワイヤ
WO2009072498A1 (ja) * 2007-12-03 2009-06-11 Nippon Steel Materials Co., Ltd. 半導体装置用ボンディングワイヤ
JP2009158931A (ja) * 2007-12-03 2009-07-16 Nippon Steel Materials Co Ltd 半導体装置用ボンディングワイヤ
JP4617375B2 (ja) * 2007-12-03 2011-01-26 新日鉄マテリアルズ株式会社 半導体装置用ボンディングワイヤ
KR101030384B1 (ko) 2007-12-03 2011-04-20 가부시키가이샤 닛데쓰 마이크로 메탈 반도체 장치용 본딩 와이어
KR101055957B1 (ko) 2007-12-03 2011-08-09 가부시키가이샤 닛데쓰 마이크로 메탈 반도체 장치용 본딩 와이어
JP5073759B2 (ja) * 2007-12-03 2012-11-14 新日鉄マテリアルズ株式会社 半導体装置用ボンディングワイヤ
US8389860B2 (en) 2007-12-03 2013-03-05 Nippon Steel Materials Co., Ltd. Bonding wire for semiconductor devices

Also Published As

Publication number Publication date
EP0101592A2 (de) 1984-02-29
DE3230376A1 (de) 1984-02-23
BR8304323A (pt) 1984-03-20
DE3230376C2 (de) 1984-10-11
EP0101592A3 (de) 1985-10-30

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