JPS5948605A - 透明基板にデポジツトされる膜の厚みの測定デバイス - Google Patents

透明基板にデポジツトされる膜の厚みの測定デバイス

Info

Publication number
JPS5948605A
JPS5948605A JP14726783A JP14726783A JPS5948605A JP S5948605 A JPS5948605 A JP S5948605A JP 14726783 A JP14726783 A JP 14726783A JP 14726783 A JP14726783 A JP 14726783A JP S5948605 A JPS5948605 A JP S5948605A
Authority
JP
Japan
Prior art keywords
thickness
film
logarithmic amplifier
converter
output
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14726783A
Other languages
English (en)
Japanese (ja)
Inventor
ジヤン・カントル−
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
Nokia Inc
Original Assignee
Compagnie Industrielle de Telecommunication CIT Alcatel SA
Nokia Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Compagnie Industrielle de Telecommunication CIT Alcatel SA, Nokia Inc filed Critical Compagnie Industrielle de Telecommunication CIT Alcatel SA
Publication of JPS5948605A publication Critical patent/JPS5948605A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP14726783A 1982-08-12 1983-08-11 透明基板にデポジツトされる膜の厚みの測定デバイス Pending JPS5948605A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8214035A FR2531775A1 (fr) 1982-08-12 1982-08-12 Dispositif de mesure de l'epaisseur d'une couche deposee sur un substrat transparent
FR8214035 1982-08-12

Publications (1)

Publication Number Publication Date
JPS5948605A true JPS5948605A (ja) 1984-03-19

Family

ID=9276825

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14726783A Pending JPS5948605A (ja) 1982-08-12 1983-08-11 透明基板にデポジツトされる膜の厚みの測定デバイス

Country Status (3)

Country Link
EP (1) EP0101997A1 (enExample)
JP (1) JPS5948605A (enExample)
FR (1) FR2531775A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006300811A (ja) * 2005-04-22 2006-11-02 Hitachi Displays Ltd 薄膜の膜厚測定方法、多結晶半導体薄膜の形成方法、半導体デバイスの製造方法、およびその製造装置、並びに画像表示装置の製造方法

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE29506765U1 (de) * 1995-04-21 1995-06-22 "Optikzentrum NRW GmbH (OZ)" i.K., 44799 Bochum Vorrichtung zum Messen der Dicke dünner farbiger Schichten
JP2986072B2 (ja) * 1995-06-16 1999-12-06 インターナショナル・ビジネス・マシーンズ・コーポレイション 膜厚の検査方法
RU2210558C2 (ru) * 2001-01-19 2003-08-20 Федеральное государственное унитарное предприятие "Муромский приборостроительный завод" Устройство контроля сплошности напыления взрывчатого вещества на поверхность канала ударно-волновой трубки
CN107687815B (zh) * 2017-07-31 2020-06-30 深港产学研基地 透光薄膜厚度测量方法、系统及终端设备

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52153468A (en) * 1976-06-15 1977-12-20 Fujitsu Ltd Thickness measuring method of substrates
JPS5674607A (en) * 1979-11-26 1981-06-20 Diafoil Co Ltd Film thickness measuring device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7106648A (enExample) * 1970-05-18 1971-11-22 Kyoto Daiichi Kagaku Kk
DE2627753C2 (de) * 1976-06-21 1983-09-01 Leybold-Heraeus GmbH, 5000 Köln Anordnung zur Dickenmessung und -steuerung optisch wirksamer Dünnschichten

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52153468A (en) * 1976-06-15 1977-12-20 Fujitsu Ltd Thickness measuring method of substrates
JPS5674607A (en) * 1979-11-26 1981-06-20 Diafoil Co Ltd Film thickness measuring device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006300811A (ja) * 2005-04-22 2006-11-02 Hitachi Displays Ltd 薄膜の膜厚測定方法、多結晶半導体薄膜の形成方法、半導体デバイスの製造方法、およびその製造装置、並びに画像表示装置の製造方法

Also Published As

Publication number Publication date
FR2531775A1 (fr) 1984-02-17
FR2531775B1 (enExample) 1985-01-25
EP0101997A1 (fr) 1984-03-07

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