FR2531775A1 - Dispositif de mesure de l'epaisseur d'une couche deposee sur un substrat transparent - Google Patents

Dispositif de mesure de l'epaisseur d'une couche deposee sur un substrat transparent Download PDF

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Publication number
FR2531775A1
FR2531775A1 FR8214035A FR8214035A FR2531775A1 FR 2531775 A1 FR2531775 A1 FR 2531775A1 FR 8214035 A FR8214035 A FR 8214035A FR 8214035 A FR8214035 A FR 8214035A FR 2531775 A1 FR2531775 A1 FR 2531775A1
Authority
FR
France
Prior art keywords
thickness
sent
output
light
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR8214035A
Other languages
English (en)
French (fr)
Other versions
FR2531775B1 (enExample
Inventor
Jean Canteloup
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nokia Inc
Original Assignee
Nokia Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nokia Inc filed Critical Nokia Inc
Priority to FR8214035A priority Critical patent/FR2531775A1/fr
Priority to EP83107844A priority patent/EP0101997A1/fr
Priority to JP14726783A priority patent/JPS5948605A/ja
Publication of FR2531775A1 publication Critical patent/FR2531775A1/fr
Application granted granted Critical
Publication of FR2531775B1 publication Critical patent/FR2531775B1/fr
Granted legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
FR8214035A 1982-08-12 1982-08-12 Dispositif de mesure de l'epaisseur d'une couche deposee sur un substrat transparent Granted FR2531775A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
FR8214035A FR2531775A1 (fr) 1982-08-12 1982-08-12 Dispositif de mesure de l'epaisseur d'une couche deposee sur un substrat transparent
EP83107844A EP0101997A1 (fr) 1982-08-12 1983-08-09 Dispositif de mesure de l'épaisseur d'une couche déposée sur un substrat transparent
JP14726783A JPS5948605A (ja) 1982-08-12 1983-08-11 透明基板にデポジツトされる膜の厚みの測定デバイス

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8214035A FR2531775A1 (fr) 1982-08-12 1982-08-12 Dispositif de mesure de l'epaisseur d'une couche deposee sur un substrat transparent

Publications (2)

Publication Number Publication Date
FR2531775A1 true FR2531775A1 (fr) 1984-02-17
FR2531775B1 FR2531775B1 (enExample) 1985-01-25

Family

ID=9276825

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8214035A Granted FR2531775A1 (fr) 1982-08-12 1982-08-12 Dispositif de mesure de l'epaisseur d'une couche deposee sur un substrat transparent

Country Status (3)

Country Link
EP (1) EP0101997A1 (enExample)
JP (1) JPS5948605A (enExample)
FR (1) FR2531775A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2210558C2 (ru) * 2001-01-19 2003-08-20 Федеральное государственное унитарное предприятие "Муромский приборостроительный завод" Устройство контроля сплошности напыления взрывчатого вещества на поверхность канала ударно-волновой трубки

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE29506765U1 (de) * 1995-04-21 1995-06-22 "Optikzentrum NRW GmbH (OZ)" i.K., 44799 Bochum Vorrichtung zum Messen der Dicke dünner farbiger Schichten
JP2986072B2 (ja) * 1995-06-16 1999-12-06 インターナショナル・ビジネス・マシーンズ・コーポレイション 膜厚の検査方法
JP2006300811A (ja) * 2005-04-22 2006-11-02 Hitachi Displays Ltd 薄膜の膜厚測定方法、多結晶半導体薄膜の形成方法、半導体デバイスの製造方法、およびその製造装置、並びに画像表示装置の製造方法
CN107687815B (zh) * 2017-07-31 2020-06-30 深港产学研基地 透光薄膜厚度测量方法、系统及终端设备

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3743429A (en) * 1970-05-18 1973-07-03 Kyoto Daiichi Kogaku Kk Colorimeter for measuring concentration and indicating the concentration as a digital quantity
FR2356191A1 (fr) * 1976-06-21 1978-01-20 Leybold Heraeus Gmbh & Co Kg Montage et photometre pour la mesure et la commande de l'epaisseur de couches minces optiques

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52153468A (en) * 1976-06-15 1977-12-20 Fujitsu Ltd Thickness measuring method of substrates
JPS5674607A (en) * 1979-11-26 1981-06-20 Diafoil Co Ltd Film thickness measuring device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3743429A (en) * 1970-05-18 1973-07-03 Kyoto Daiichi Kogaku Kk Colorimeter for measuring concentration and indicating the concentration as a digital quantity
FR2356191A1 (fr) * 1976-06-21 1978-01-20 Leybold Heraeus Gmbh & Co Kg Montage et photometre pour la mesure et la commande de l'epaisseur de couches minces optiques

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2210558C2 (ru) * 2001-01-19 2003-08-20 Федеральное государственное унитарное предприятие "Муромский приборостроительный завод" Устройство контроля сплошности напыления взрывчатого вещества на поверхность канала ударно-волновой трубки

Also Published As

Publication number Publication date
FR2531775B1 (enExample) 1985-01-25
EP0101997A1 (fr) 1984-03-07
JPS5948605A (ja) 1984-03-19

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