FR2356191A1 - Montage et photometre pour la mesure et la commande de l'epaisseur de couches minces optiques - Google Patents

Montage et photometre pour la mesure et la commande de l'epaisseur de couches minces optiques

Info

Publication number
FR2356191A1
FR2356191A1 FR7719017A FR7719017A FR2356191A1 FR 2356191 A1 FR2356191 A1 FR 2356191A1 FR 7719017 A FR7719017 A FR 7719017A FR 7719017 A FR7719017 A FR 7719017A FR 2356191 A1 FR2356191 A1 FR 2356191A1
Authority
FR
France
Prior art keywords
thickness
measurement
photometer
mounting
control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7719017A
Other languages
English (en)
Other versions
FR2356191B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Publication of FR2356191A1 publication Critical patent/FR2356191A1/fr
Application granted granted Critical
Publication of FR2356191B1 publication Critical patent/FR2356191B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0683—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating measurement during deposition or removal of the layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
    • C23C14/547—Controlling the film thickness or evaporation rate using measurement on deposited material using optical methods
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D5/00—Control of dimensions of material
    • G05D5/02—Control of dimensions of material of thickness, e.g. of rolled material
    • G05D5/03—Control of dimensions of material of thickness, e.g. of rolled material characterised by the use of electric means

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Automation & Control Theory (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

Montage de mesure et de commande de l'épaisseur de couches optiques minces pendant leur production dans des équipements de dépôt sous vide. L'axe du faisceau de mesure 22 provenant de la source 23 est dirigé sur l'échantillon 16. Un récepteur de référence 26, indépendant des propriétés optiques de l'échantillon 16, est affecté au faisceau de mesure 23. Le signal de sortie du récepteur de référence 26 est appliqué au déclencheur 43 d'un amplificateur photométrique 46 sensible à la phase et, en parallèle, à un amplificateur 41 de compensation des fluctuations de luminance de la source 22.
FR7719017A 1976-06-21 1977-06-21 Montage et photometre pour la mesure et la commande de l'epaisseur de couches minces optiques Granted FR2356191A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2627753A DE2627753C2 (de) 1976-06-21 1976-06-21 Anordnung zur Dickenmessung und -steuerung optisch wirksamer Dünnschichten

Publications (2)

Publication Number Publication Date
FR2356191A1 true FR2356191A1 (fr) 1978-01-20
FR2356191B1 FR2356191B1 (fr) 1984-06-22

Family

ID=5981051

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7719017A Granted FR2356191A1 (fr) 1976-06-21 1977-06-21 Montage et photometre pour la mesure et la commande de l'epaisseur de couches minces optiques

Country Status (16)

Country Link
US (1) US4207835A (fr)
JP (1) JPS5322456A (fr)
AT (1) AT366505B (fr)
AU (1) AU520695B2 (fr)
BE (1) BE855932A (fr)
CA (1) CA1082486A (fr)
CH (1) CH616502A5 (fr)
DE (1) DE2627753C2 (fr)
ES (2) ES459933A1 (fr)
FR (1) FR2356191A1 (fr)
GB (2) GB1567556A (fr)
IT (1) IT1086231B (fr)
NL (1) NL186235C (fr)
SE (2) SE433003B (fr)
SU (1) SU845804A3 (fr)
ZA (1) ZA773609B (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2531775A1 (fr) * 1982-08-12 1984-02-17 Cit Alcatel Dispositif de mesure de l'epaisseur d'une couche deposee sur un substrat transparent

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52102783A (en) * 1976-02-25 1977-08-29 Kanagawa Prefecture Method of measuring maximum diameter of bruise in brinell hardness test
FI69370C (fi) * 1981-08-18 1986-01-10 Topwave Instr Oy Foerfarande foer maetning av egenskaperna hos ett plastskikt med hjaelp av infraroed straolning
DE3135443A1 (de) * 1981-09-08 1983-03-24 Leybold-Heraeus GmbH, 5000 Köln Verfahren und fotometrische anordnung zur dickenmessung und -steuerung optisch wirksamer schichten
DE3234534C2 (de) * 1982-09-17 1986-09-11 Kievskoe naučno-proizvodstvennoe obiedinenie "Analitpribor", Kiev Anordnung zum Aufstäuben von optischen Filmschichten
DE3220282C3 (de) * 1982-05-28 1995-05-18 Roland Man Druckmasch Vorrichtung zum betrieblichen Erfassen eines Maßes für die Feuchtmittelmenge auf der rotierenden Druckplatte in Offset-Druckmaschinen
US4676883A (en) * 1986-03-03 1987-06-30 Sierracin Corporation Optical disk transmission monitor for deposited films
EP0290657A1 (fr) * 1987-05-15 1988-11-17 KSB Aktiengesellschaft Méthode et dispositif pour mesurer les propriétés optiques des couches fines
US4669418A (en) * 1986-05-19 1987-06-02 Gte Laboratories Incorporated Optical coating apparatus
DE3623106C1 (en) * 1986-07-09 1987-12-10 Hewlett Packard Gmbh Optoelectronic measuring device having a light (optical) chopper
DE3803840A1 (de) * 1988-02-09 1989-08-17 Leybold Ag Fotometer
DE4123589C2 (de) * 1991-07-17 2001-03-29 Leybold Ag Vorrichtung zum Messen der Lichtstrahlung eines Plasmas
GB2272517B (en) * 1992-11-17 1996-04-24 Nissan Motor Measurement of paint film thickness based on dynamic levelling property of wet paint
DE4314251C2 (de) * 1993-04-30 2002-02-21 Unaxis Deutschland Holding Verfahren und Vorrichtung zum Aufdampfen absorbierender dünner Schichten auf ein Substrat
DE102005008889B4 (de) * 2005-02-26 2016-07-07 Leybold Optics Gmbh Optisches Monitoringsystem für Beschichtungsprozesse
US8958156B1 (en) 2007-05-30 2015-02-17 Semrock, Inc. Interference filter for non-zero angle of incidence spectroscopy
DE102018205236A1 (de) * 2018-04-06 2019-10-10 Bhs-Sonthofen Gmbh Vorrichtung und Verfahren zur Messung einer Filterkuchendicke

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1539538A (fr) * 1967-10-05 1968-09-13 Leybold Hochvakuum Anlagen Gmb Instrument optique de mesure de l'épaisseur de couches déposées par métallisationsous vide
FR1558072A (fr) * 1967-03-29 1969-02-21
US3544222A (en) * 1966-10-13 1970-12-01 Leybold Hochvakuum Anlagen Gmb Optical instrument for determining layer thickness
US3737237A (en) * 1971-11-18 1973-06-05 Nasa Monitoring deposition of films
US3869211A (en) * 1972-06-29 1975-03-04 Canon Kk Instrument for measuring thickness of thin film

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1079920B (de) * 1952-04-25 1960-04-14 Technicolor Corp Verfahren und Vorrichtung zum Aufdampfen von mehrschichtigen dichromatischen Interferenzueberzuegen im Vakuum
DE1797108U (de) 1959-07-17 1959-10-01 Schubert & Salzer Maschinen Speisevorrichtung fuer karden schlagmaschinen u. dgl.
DE1276976B (de) * 1962-01-29 1968-09-05 Lab Pristroje Narodni Podnik Verfahren und Vorrichtung zur optischen Schichtdickenmessung duenner Schichten waehrend ihrer Herstellung durch Aufdampfen im Vakuum
US3526460A (en) * 1967-06-27 1970-09-01 Webb James E Optical characteristics measuring apparatus
US3654109A (en) * 1968-04-25 1972-04-04 Ibm Apparatus and method for measuring rate in flow processes
DE2220231A1 (de) * 1972-04-25 1973-11-08 Serv Anstalt Photometer zur digitalen anzeige der lichtabsorption einer messprobe in einer kuevette
US3892490A (en) * 1974-03-06 1975-07-01 Minolta Camera Kk Monitoring system for coating a substrate
US4024291A (en) * 1975-06-17 1977-05-17 Leybold-Heraeus Gmbh & Co. Kg Control of vapor deposition

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3544222A (en) * 1966-10-13 1970-12-01 Leybold Hochvakuum Anlagen Gmb Optical instrument for determining layer thickness
FR1558072A (fr) * 1967-03-29 1969-02-21
US3491240A (en) * 1967-03-29 1970-01-20 Itek Corp Noncontacting surface sensor
FR1539538A (fr) * 1967-10-05 1968-09-13 Leybold Hochvakuum Anlagen Gmb Instrument optique de mesure de l'épaisseur de couches déposées par métallisationsous vide
US3737237A (en) * 1971-11-18 1973-06-05 Nasa Monitoring deposition of films
US3869211A (en) * 1972-06-29 1975-03-04 Canon Kk Instrument for measuring thickness of thin film

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2531775A1 (fr) * 1982-08-12 1984-02-17 Cit Alcatel Dispositif de mesure de l'epaisseur d'une couche deposee sur un substrat transparent
EP0101997A1 (fr) * 1982-08-12 1984-03-07 COMPAGNIE INDUSTRIELLE DES TELECOMMUNICATIONS CIT-ALCATEL S.A. dite: Dispositif de mesure de l'épaisseur d'une couche déposée sur un substrat transparent

Also Published As

Publication number Publication date
ZA773609B (en) 1978-06-28
US4207835A (en) 1980-06-17
CH616502A5 (fr) 1980-03-31
AU2625977A (en) 1979-01-04
AT366505B (de) 1982-04-26
SE8204900D0 (sv) 1982-08-27
JPS5322456A (en) 1978-03-01
SE456775B (sv) 1988-10-31
NL186235C (nl) 1990-10-16
SE7707141L (sv) 1977-12-22
ES459933A1 (es) 1978-04-16
ATA434977A (de) 1981-08-15
GB1567556A (en) 1980-05-14
SE433003B (sv) 1984-04-30
SU845804A3 (ru) 1981-07-07
NL186235B (nl) 1990-05-16
NL7706712A (nl) 1977-12-23
CA1082486A (fr) 1980-07-29
DE2627753C2 (de) 1983-09-01
DE2627753A1 (de) 1977-12-29
BE855932A (fr) 1977-10-17
SE8204900L (sv) 1982-08-27
AU520695B2 (en) 1982-02-25
IT1086231B (it) 1985-05-28
ES462916A1 (es) 1978-06-16
GB1567555A (en) 1980-05-14
FR2356191B1 (fr) 1984-06-22

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