JPS5947471B2 - 絶縁ゲ−ト型電界効果半導体装置の製造方法 - Google Patents

絶縁ゲ−ト型電界効果半導体装置の製造方法

Info

Publication number
JPS5947471B2
JPS5947471B2 JP49139096A JP13909674A JPS5947471B2 JP S5947471 B2 JPS5947471 B2 JP S5947471B2 JP 49139096 A JP49139096 A JP 49139096A JP 13909674 A JP13909674 A JP 13909674A JP S5947471 B2 JPS5947471 B2 JP S5947471B2
Authority
JP
Japan
Prior art keywords
oxidation
film
resistant
insulated gate
field effect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP49139096A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5164876A (enExample
Inventor
泰一 井上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP49139096A priority Critical patent/JPS5947471B2/ja
Publication of JPS5164876A publication Critical patent/JPS5164876A/ja
Publication of JPS5947471B2 publication Critical patent/JPS5947471B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)
JP49139096A 1974-12-03 1974-12-03 絶縁ゲ−ト型電界効果半導体装置の製造方法 Expired JPS5947471B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP49139096A JPS5947471B2 (ja) 1974-12-03 1974-12-03 絶縁ゲ−ト型電界効果半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49139096A JPS5947471B2 (ja) 1974-12-03 1974-12-03 絶縁ゲ−ト型電界効果半導体装置の製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP59017950A Division JPS59188142A (ja) 1984-02-03 1984-02-03 半導体装置

Publications (2)

Publication Number Publication Date
JPS5164876A JPS5164876A (enExample) 1976-06-04
JPS5947471B2 true JPS5947471B2 (ja) 1984-11-19

Family

ID=15237390

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49139096A Expired JPS5947471B2 (ja) 1974-12-03 1974-12-03 絶縁ゲ−ト型電界効果半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS5947471B2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61500887A (ja) * 1984-01-06 1986-05-08 ブランズウイツク　コ−ポレ−シヨン 魚釣り用急速ベイル開放装置

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54162479A (en) * 1978-06-13 1979-12-24 Nec Corp Manufacture of semiconductor device
JPS5679444A (en) * 1979-12-03 1981-06-30 Toshiba Corp Semiconductor device and production thereof
JPS56135941A (en) * 1980-03-28 1981-10-23 Nec Corp Semiconductor ic device
JPS56142649A (en) * 1980-04-07 1981-11-07 Hitachi Ltd Semiconductor device
GB2084794B (en) * 1980-10-03 1984-07-25 Philips Electronic Associated Methods of manufacturing insulated gate field effect transistors
JPS5779667A (en) * 1980-11-05 1982-05-18 Fujitsu Ltd Manufacture of semiconductor device
JPS5837969A (ja) * 1981-08-31 1983-03-05 Fujitsu Ltd 保護回路素子
JPS57136369A (en) * 1981-02-17 1982-08-23 Fujitsu Ltd Protective circuit element
JPH079385Y2 (ja) * 1985-07-19 1995-03-06 三洋電機株式会社 半導体集積回路装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61500887A (ja) * 1984-01-06 1986-05-08 ブランズウイツク　コ−ポレ−シヨン 魚釣り用急速ベイル開放装置

Also Published As

Publication number Publication date
JPS5164876A (enExample) 1976-06-04

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