JPS59208074A - 枚葉式膜形成装置 - Google Patents
枚葉式膜形成装置Info
- Publication number
- JPS59208074A JPS59208074A JP8361683A JP8361683A JPS59208074A JP S59208074 A JPS59208074 A JP S59208074A JP 8361683 A JP8361683 A JP 8361683A JP 8361683 A JP8361683 A JP 8361683A JP S59208074 A JPS59208074 A JP S59208074A
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- substrate
- sputtering
- film forming
- forming apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims abstract description 74
- 238000000151 deposition Methods 0.000 claims abstract description 46
- 238000004544 sputter deposition Methods 0.000 claims abstract description 46
- 230000008021 deposition Effects 0.000 claims description 42
- 238000005530 etching Methods 0.000 claims description 22
- 230000007246 mechanism Effects 0.000 claims description 22
- 238000000034 method Methods 0.000 claims description 10
- 230000007723 transport mechanism Effects 0.000 claims description 2
- 238000005477 sputtering target Methods 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 abstract description 14
- 230000008020 evaporation Effects 0.000 abstract description 6
- 238000001704 evaporation Methods 0.000 abstract description 6
- 229910052721 tungsten Inorganic materials 0.000 abstract description 3
- 230000015572 biosynthetic process Effects 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 12
- 229910052751 metal Inorganic materials 0.000 description 11
- 239000002184 metal Substances 0.000 description 11
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 8
- 238000005192 partition Methods 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 6
- 229910052786 argon Inorganic materials 0.000 description 4
- 230000008018 melting Effects 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 239000002356 single layer Substances 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 239000000356 contaminant Substances 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 230000003670 easy-to-clean Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 229910021332 silicide Inorganic materials 0.000 description 2
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 2
- 240000002834 Paulownia tomentosa Species 0.000 description 1
- 229910000676 Si alloy Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 150000002632 lipids Chemical class 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/568—Transferring the substrates through a series of coating stations
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8361683A JPS59208074A (ja) | 1983-05-13 | 1983-05-13 | 枚葉式膜形成装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8361683A JPS59208074A (ja) | 1983-05-13 | 1983-05-13 | 枚葉式膜形成装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59208074A true JPS59208074A (ja) | 1984-11-26 |
| JPS6325068B2 JPS6325068B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-05-24 |
Family
ID=13807417
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8361683A Granted JPS59208074A (ja) | 1983-05-13 | 1983-05-13 | 枚葉式膜形成装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59208074A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6244571A (ja) * | 1985-08-20 | 1987-02-26 | Toshiba Mach Co Ltd | イオン注入装置 |
| JPS6280265A (ja) * | 1985-10-04 | 1987-04-13 | Toshiba Corp | 真空処理装置 |
| JPS63153288A (ja) * | 1986-12-17 | 1988-06-25 | Hosiden Electronics Co Ltd | 真空加工装置 |
| JPS63303059A (ja) * | 1987-05-30 | 1988-12-09 | Tokuda Seisakusho Ltd | 真空処理装置 |
| JPS63303060A (ja) * | 1987-05-30 | 1988-12-09 | Tokuda Seisakusho Ltd | 真空処理装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5741369A (en) * | 1980-08-27 | 1982-03-08 | Hitachi Ltd | Continuous vacuum treatment device |
| JPS5763678A (en) * | 1980-10-03 | 1982-04-17 | Hitachi Ltd | Sputtering device |
-
1983
- 1983-05-13 JP JP8361683A patent/JPS59208074A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5741369A (en) * | 1980-08-27 | 1982-03-08 | Hitachi Ltd | Continuous vacuum treatment device |
| JPS5763678A (en) * | 1980-10-03 | 1982-04-17 | Hitachi Ltd | Sputtering device |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6244571A (ja) * | 1985-08-20 | 1987-02-26 | Toshiba Mach Co Ltd | イオン注入装置 |
| JPS6280265A (ja) * | 1985-10-04 | 1987-04-13 | Toshiba Corp | 真空処理装置 |
| JPS63153288A (ja) * | 1986-12-17 | 1988-06-25 | Hosiden Electronics Co Ltd | 真空加工装置 |
| JPS63303059A (ja) * | 1987-05-30 | 1988-12-09 | Tokuda Seisakusho Ltd | 真空処理装置 |
| JPS63303060A (ja) * | 1987-05-30 | 1988-12-09 | Tokuda Seisakusho Ltd | 真空処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6325068B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-05-24 |