JPS59145539A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS59145539A
JPS59145539A JP58020032A JP2003283A JPS59145539A JP S59145539 A JPS59145539 A JP S59145539A JP 58020032 A JP58020032 A JP 58020032A JP 2003283 A JP2003283 A JP 2003283A JP S59145539 A JPS59145539 A JP S59145539A
Authority
JP
Japan
Prior art keywords
film
region
active region
field
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58020032A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0450748B2 (cg-RX-API-DMAC10.html
Inventor
Kunihiko Asahi
旭　国彦
Shuichi Mayumi
周一 真弓
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp, Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electronics Corp
Priority to JP58020032A priority Critical patent/JPS59145539A/ja
Publication of JPS59145539A publication Critical patent/JPS59145539A/ja
Publication of JPH0450748B2 publication Critical patent/JPH0450748B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W10/0126—
    • H10W10/13—

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Element Separation (AREA)
JP58020032A 1983-02-09 1983-02-09 半導体装置の製造方法 Granted JPS59145539A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58020032A JPS59145539A (ja) 1983-02-09 1983-02-09 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58020032A JPS59145539A (ja) 1983-02-09 1983-02-09 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS59145539A true JPS59145539A (ja) 1984-08-21
JPH0450748B2 JPH0450748B2 (cg-RX-API-DMAC10.html) 1992-08-17

Family

ID=12015722

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58020032A Granted JPS59145539A (ja) 1983-02-09 1983-02-09 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS59145539A (cg-RX-API-DMAC10.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01283854A (ja) * 1988-05-10 1989-11-15 Nec Corp 半導体装置の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01283854A (ja) * 1988-05-10 1989-11-15 Nec Corp 半導体装置の製造方法

Also Published As

Publication number Publication date
JPH0450748B2 (cg-RX-API-DMAC10.html) 1992-08-17

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