JPS59141262A - 半導体メモリセル - Google Patents

半導体メモリセル

Info

Publication number
JPS59141262A
JPS59141262A JP58015661A JP1566183A JPS59141262A JP S59141262 A JPS59141262 A JP S59141262A JP 58015661 A JP58015661 A JP 58015661A JP 1566183 A JP1566183 A JP 1566183A JP S59141262 A JPS59141262 A JP S59141262A
Authority
JP
Japan
Prior art keywords
polycrystalline silicon
silicon
memory cell
silicon dioxide
dioxide film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58015661A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0423832B2 (enExample
Inventor
Toshiyuki Ishijima
石嶋　俊之
Masaaki Yoshida
正昭 吉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP58015661A priority Critical patent/JPS59141262A/ja
Publication of JPS59141262A publication Critical patent/JPS59141262A/ja
Publication of JPH0423832B2 publication Critical patent/JPH0423832B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
    • H10B12/37—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells the capacitor being at least partially in a trench in the substrate

Landscapes

  • Semiconductor Memories (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP58015661A 1983-02-02 1983-02-02 半導体メモリセル Granted JPS59141262A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58015661A JPS59141262A (ja) 1983-02-02 1983-02-02 半導体メモリセル

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58015661A JPS59141262A (ja) 1983-02-02 1983-02-02 半導体メモリセル

Publications (2)

Publication Number Publication Date
JPS59141262A true JPS59141262A (ja) 1984-08-13
JPH0423832B2 JPH0423832B2 (enExample) 1992-04-23

Family

ID=11894920

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58015661A Granted JPS59141262A (ja) 1983-02-02 1983-02-02 半導体メモリセル

Country Status (1)

Country Link
JP (1) JPS59141262A (enExample)

Cited By (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59191374A (ja) * 1983-04-15 1984-10-30 Hitachi Ltd 半導体集積回路装置
JPS59191373A (ja) * 1983-04-15 1984-10-30 Hitachi Ltd 半導体集積回路装置
JPS6187359A (ja) * 1984-10-05 1986-05-02 Nec Corp 半導体メモリセル
JPS6187358A (ja) * 1984-10-05 1986-05-02 Nec Corp 半導体記憶装置およびその製造方法
JPS6188555A (ja) * 1984-10-08 1986-05-06 Nec Corp 半導体メモリセル
JPS6188554A (ja) * 1984-10-08 1986-05-06 Nippon Telegr & Teleph Corp <Ntt> 半導体メモリおよびその製造方法
JPS61216447A (ja) * 1985-03-22 1986-09-26 Fujitsu Ltd 半導体装置の製造方法
JPS61288460A (ja) * 1985-06-17 1986-12-18 Nippon Telegr & Teleph Corp <Ntt> 半導体記憶装置およびその製造方法
JPS61288461A (ja) * 1985-06-17 1986-12-18 Nippon Telegr & Teleph Corp <Ntt> 半導体装置とその製造方法
EP0176254A3 (en) * 1984-08-27 1986-12-30 Kabushiki Kaisha Toshiba Semiconductor memory device
JPS6221266A (ja) * 1985-07-19 1987-01-29 Sanyo Electric Co Ltd 半導体メモリセル
JPS6239053A (ja) * 1985-08-14 1987-02-20 Nec Corp 半導体メモリセル及びその製造方法
JPS6279659A (ja) * 1985-10-03 1987-04-13 Hitachi Ltd 半導体装置
JPS6290966A (ja) * 1985-10-16 1987-04-25 Mitsubishi Electric Corp 半導体記憶装置
JPS62131563A (ja) * 1985-12-03 1987-06-13 Matsushita Electronics Corp 半導体メモリ装置
US4673962A (en) * 1985-03-21 1987-06-16 Texas Instruments Incorporated Vertical DRAM cell and method
JPS62183167A (ja) * 1985-11-18 1987-08-11 テキサス　インスツルメンツ　インコ−ポレイテツド 相互接続部を形成する方法
JPS62208659A (ja) * 1986-03-03 1987-09-12 Fujitsu Ltd ダイナミツクランダムアクセスメモリ
JPS62208661A (ja) * 1986-03-03 1987-09-12 Fujitsu Ltd 半導体メモリ
JPS62208658A (ja) * 1986-02-20 1987-09-12 Fujitsu Ltd ダイナミツクランダムアクセスメモリ
JPS62208660A (ja) * 1986-03-03 1987-09-12 Fujitsu Ltd ダイナミツクランダムアクセスメモリ
JPS62213273A (ja) * 1986-03-14 1987-09-19 Fujitsu Ltd ダイナミツクランダムアクセスメモリ
US4785337A (en) * 1986-10-17 1988-11-15 International Business Machines Corporation Dynamic ram cell having shared trench storage capacitor with sidewall-defined bridge contacts and gate electrodes
US4801989A (en) * 1986-02-20 1989-01-31 Fujitsu Limited Dynamic random access memory having trench capacitor with polysilicon lined lower electrode
US4845539A (en) * 1984-12-24 1989-07-04 Nec Corporation Semiconductor memory device
US4916524A (en) * 1987-03-16 1990-04-10 Texas Instruments Incorporated Dram cell and method
USRE33261E (en) * 1984-07-03 1990-07-10 Texas Instruments, Incorporated Trench capacitor for high density dynamic RAM
US4958206A (en) * 1988-06-28 1990-09-18 Texas Instruments Incorporated Diffused bit line trench capacitor dram cell
WO1990011619A1 (en) * 1989-03-23 1990-10-04 Grumman Aerospace Corporation Single trench mosfet-capacitor cell for analog signal processing
US5013676A (en) * 1987-04-27 1991-05-07 Nec Corporation Structure of MIS-type field effect transistor and process of fabrication thereof
US5075745A (en) * 1987-12-11 1991-12-24 Oki Electric Industry Co., Ltd. Capacitor cell for use in a semiconductor memory integrated circuit device
US5102817A (en) * 1985-03-21 1992-04-07 Texas Instruments Incorporated Vertical DRAM cell and method
US5105245A (en) * 1988-06-28 1992-04-14 Texas Instruments Incorporated Trench capacitor DRAM cell with diffused bit lines adjacent to a trench
US5109259A (en) * 1987-09-22 1992-04-28 Texas Instruments Incorporated Multiple DRAM cells in a trench
US5164917A (en) * 1985-06-26 1992-11-17 Texas Instruments Incorporated Vertical one-transistor DRAM with enhanced capacitance and process for fabricating
US5225363A (en) * 1988-06-28 1993-07-06 Texas Instruments Incorporated Trench capacitor DRAM cell and method of manufacture
US5394000A (en) * 1992-07-30 1995-02-28 Northern Telecom Limited Trench capacitor structure

Cited By (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59191374A (ja) * 1983-04-15 1984-10-30 Hitachi Ltd 半導体集積回路装置
JPS59191373A (ja) * 1983-04-15 1984-10-30 Hitachi Ltd 半導体集積回路装置
USRE33261E (en) * 1984-07-03 1990-07-10 Texas Instruments, Incorporated Trench capacitor for high density dynamic RAM
EP0176254A3 (en) * 1984-08-27 1986-12-30 Kabushiki Kaisha Toshiba Semiconductor memory device
US5012308A (en) * 1984-08-27 1991-04-30 Kabushiki Kaisha Toshiba Semiconductor memory device
JPS6187359A (ja) * 1984-10-05 1986-05-02 Nec Corp 半導体メモリセル
JPS6187358A (ja) * 1984-10-05 1986-05-02 Nec Corp 半導体記憶装置およびその製造方法
EP0177066A3 (en) * 1984-10-05 1987-01-28 Nec Corporation Semiconductor memory device with information storage vertical trench capacitor and method of manufacturing the same
JPS6188555A (ja) * 1984-10-08 1986-05-06 Nec Corp 半導体メモリセル
JPS6188554A (ja) * 1984-10-08 1986-05-06 Nippon Telegr & Teleph Corp <Ntt> 半導体メモリおよびその製造方法
US4845539A (en) * 1984-12-24 1989-07-04 Nec Corporation Semiconductor memory device
US5102817A (en) * 1985-03-21 1992-04-07 Texas Instruments Incorporated Vertical DRAM cell and method
US4673962A (en) * 1985-03-21 1987-06-16 Texas Instruments Incorporated Vertical DRAM cell and method
JPS61216447A (ja) * 1985-03-22 1986-09-26 Fujitsu Ltd 半導体装置の製造方法
JPS61288461A (ja) * 1985-06-17 1986-12-18 Nippon Telegr & Teleph Corp <Ntt> 半導体装置とその製造方法
JPS61288460A (ja) * 1985-06-17 1986-12-18 Nippon Telegr & Teleph Corp <Ntt> 半導体記憶装置およびその製造方法
US5164917A (en) * 1985-06-26 1992-11-17 Texas Instruments Incorporated Vertical one-transistor DRAM with enhanced capacitance and process for fabricating
JPS6221266A (ja) * 1985-07-19 1987-01-29 Sanyo Electric Co Ltd 半導体メモリセル
JPS6239053A (ja) * 1985-08-14 1987-02-20 Nec Corp 半導体メモリセル及びその製造方法
JPS6279659A (ja) * 1985-10-03 1987-04-13 Hitachi Ltd 半導体装置
JPS6290966A (ja) * 1985-10-16 1987-04-25 Mitsubishi Electric Corp 半導体記憶装置
JPS62183167A (ja) * 1985-11-18 1987-08-11 テキサス　インスツルメンツ　インコ−ポレイテツド 相互接続部を形成する方法
JPS62131563A (ja) * 1985-12-03 1987-06-13 Matsushita Electronics Corp 半導体メモリ装置
JPS62208658A (ja) * 1986-02-20 1987-09-12 Fujitsu Ltd ダイナミツクランダムアクセスメモリ
US4801989A (en) * 1986-02-20 1989-01-31 Fujitsu Limited Dynamic random access memory having trench capacitor with polysilicon lined lower electrode
JPS62208661A (ja) * 1986-03-03 1987-09-12 Fujitsu Ltd 半導体メモリ
JPS62208660A (ja) * 1986-03-03 1987-09-12 Fujitsu Ltd ダイナミツクランダムアクセスメモリ
JPS62208659A (ja) * 1986-03-03 1987-09-12 Fujitsu Ltd ダイナミツクランダムアクセスメモリ
JPS62213273A (ja) * 1986-03-14 1987-09-19 Fujitsu Ltd ダイナミツクランダムアクセスメモリ
US4785337A (en) * 1986-10-17 1988-11-15 International Business Machines Corporation Dynamic ram cell having shared trench storage capacitor with sidewall-defined bridge contacts and gate electrodes
US4916524A (en) * 1987-03-16 1990-04-10 Texas Instruments Incorporated Dram cell and method
US5013676A (en) * 1987-04-27 1991-05-07 Nec Corporation Structure of MIS-type field effect transistor and process of fabrication thereof
US5109259A (en) * 1987-09-22 1992-04-28 Texas Instruments Incorporated Multiple DRAM cells in a trench
US5075745A (en) * 1987-12-11 1991-12-24 Oki Electric Industry Co., Ltd. Capacitor cell for use in a semiconductor memory integrated circuit device
US5105245A (en) * 1988-06-28 1992-04-14 Texas Instruments Incorporated Trench capacitor DRAM cell with diffused bit lines adjacent to a trench
US4958206A (en) * 1988-06-28 1990-09-18 Texas Instruments Incorporated Diffused bit line trench capacitor dram cell
US5225363A (en) * 1988-06-28 1993-07-06 Texas Instruments Incorporated Trench capacitor DRAM cell and method of manufacture
WO1990011619A1 (en) * 1989-03-23 1990-10-04 Grumman Aerospace Corporation Single trench mosfet-capacitor cell for analog signal processing
US5394000A (en) * 1992-07-30 1995-02-28 Northern Telecom Limited Trench capacitor structure

Also Published As

Publication number Publication date
JPH0423832B2 (enExample) 1992-04-23

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