JPS59132654A - 長尺薄膜原稿読取素子の製造方法 - Google Patents
長尺薄膜原稿読取素子の製造方法Info
- Publication number
- JPS59132654A JPS59132654A JP58007666A JP766683A JPS59132654A JP S59132654 A JPS59132654 A JP S59132654A JP 58007666 A JP58007666 A JP 58007666A JP 766683 A JP766683 A JP 766683A JP S59132654 A JPS59132654 A JP S59132654A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- reading element
- manufacturing
- heat treatment
- long thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
- H10F30/10—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices being sensitive to infrared radiation, visible or ultraviolet radiation, and having no potential barriers, e.g. photoresistors
- H10F30/15—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices being sensitive to infrared radiation, visible or ultraviolet radiation, and having no potential barriers, e.g. photoresistors comprising amorphous semiconductors
Landscapes
- Solid State Image Pick-Up Elements (AREA)
- Facsimile Heads (AREA)
- Light Receiving Elements (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58007666A JPS59132654A (ja) | 1983-01-20 | 1983-01-20 | 長尺薄膜原稿読取素子の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58007666A JPS59132654A (ja) | 1983-01-20 | 1983-01-20 | 長尺薄膜原稿読取素子の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS59132654A true JPS59132654A (ja) | 1984-07-30 |
JPH0245344B2 JPH0245344B2 (enrdf_load_html_response) | 1990-10-09 |
Family
ID=11672125
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP58007666A Granted JPS59132654A (ja) | 1983-01-20 | 1983-01-20 | 長尺薄膜原稿読取素子の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59132654A (enrdf_load_html_response) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5635407A (en) * | 1979-08-31 | 1981-04-08 | Fujitsu Ltd | Manufacture of amorphous silicon film |
JPS5721875A (en) * | 1980-07-14 | 1982-02-04 | Canon Inc | Photosensor |
-
1983
- 1983-01-20 JP JP58007666A patent/JPS59132654A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5635407A (en) * | 1979-08-31 | 1981-04-08 | Fujitsu Ltd | Manufacture of amorphous silicon film |
JPS5721875A (en) * | 1980-07-14 | 1982-02-04 | Canon Inc | Photosensor |
Also Published As
Publication number | Publication date |
---|---|
JPH0245344B2 (enrdf_load_html_response) | 1990-10-09 |
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