JPS59125611A - 基板の熱処理装置 - Google Patents

基板の熱処理装置

Info

Publication number
JPS59125611A
JPS59125611A JP57230103A JP23010382A JPS59125611A JP S59125611 A JPS59125611 A JP S59125611A JP 57230103 A JP57230103 A JP 57230103A JP 23010382 A JP23010382 A JP 23010382A JP S59125611 A JPS59125611 A JP S59125611A
Authority
JP
Japan
Prior art keywords
substrate
susceptor
discoid
heat treatment
disk
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57230103A
Other languages
English (en)
Japanese (ja)
Other versions
JPH023298B2 (enExample
Inventor
Yuji Furumura
雄二 古村
Takeshi Nishizawa
西沢　武志
Masayuki Takeda
正行 武田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP57230103A priority Critical patent/JPS59125611A/ja
Publication of JPS59125611A publication Critical patent/JPS59125611A/ja
Publication of JPH023298B2 publication Critical patent/JPH023298B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P10/00—
JP57230103A 1982-12-28 1982-12-28 基板の熱処理装置 Granted JPS59125611A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57230103A JPS59125611A (ja) 1982-12-28 1982-12-28 基板の熱処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57230103A JPS59125611A (ja) 1982-12-28 1982-12-28 基板の熱処理装置

Publications (2)

Publication Number Publication Date
JPS59125611A true JPS59125611A (ja) 1984-07-20
JPH023298B2 JPH023298B2 (enExample) 1990-01-23

Family

ID=16902598

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57230103A Granted JPS59125611A (ja) 1982-12-28 1982-12-28 基板の熱処理装置

Country Status (1)

Country Link
JP (1) JPS59125611A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6424383A (en) * 1987-07-20 1989-01-26 Tokai Konetsu Kogyo Kk Graphite heat emitting body
US6127288A (en) * 1996-03-25 2000-10-03 Sumitomo Electric Industries, Ltd. Method of thermally processing semiconductor wafer

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6424383A (en) * 1987-07-20 1989-01-26 Tokai Konetsu Kogyo Kk Graphite heat emitting body
US6127288A (en) * 1996-03-25 2000-10-03 Sumitomo Electric Industries, Ltd. Method of thermally processing semiconductor wafer
US6184498B1 (en) 1996-03-25 2001-02-06 Sumitomo Electric Industries, Ltd. Apparatus for thermally processing semiconductor wafer
US6235543B1 (en) 1996-03-25 2001-05-22 Sumitomo Electric Industries, Ltd. Method of evaluating a semiconductor wafer

Also Published As

Publication number Publication date
JPH023298B2 (enExample) 1990-01-23

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