JPH023298B2 - - Google Patents

Info

Publication number
JPH023298B2
JPH023298B2 JP57230103A JP23010382A JPH023298B2 JP H023298 B2 JPH023298 B2 JP H023298B2 JP 57230103 A JP57230103 A JP 57230103A JP 23010382 A JP23010382 A JP 23010382A JP H023298 B2 JPH023298 B2 JP H023298B2
Authority
JP
Japan
Prior art keywords
substrate
susceptor
disk
holding
main surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57230103A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59125611A (ja
Inventor
Juji Furumura
Takeshi Nishizawa
Masayuki Takeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP57230103A priority Critical patent/JPS59125611A/ja
Publication of JPS59125611A publication Critical patent/JPS59125611A/ja
Publication of JPH023298B2 publication Critical patent/JPH023298B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P10/00—
JP57230103A 1982-12-28 1982-12-28 基板の熱処理装置 Granted JPS59125611A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57230103A JPS59125611A (ja) 1982-12-28 1982-12-28 基板の熱処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57230103A JPS59125611A (ja) 1982-12-28 1982-12-28 基板の熱処理装置

Publications (2)

Publication Number Publication Date
JPS59125611A JPS59125611A (ja) 1984-07-20
JPH023298B2 true JPH023298B2 (enExample) 1990-01-23

Family

ID=16902598

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57230103A Granted JPS59125611A (ja) 1982-12-28 1982-12-28 基板の熱処理装置

Country Status (1)

Country Link
JP (1) JPS59125611A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6424383A (en) * 1987-07-20 1989-01-26 Tokai Konetsu Kogyo Kk Graphite heat emitting body
JP3563224B2 (ja) 1996-03-25 2004-09-08 住友電気工業株式会社 半導体ウエハの評価方法、熱処理方法、および熱処理装置

Also Published As

Publication number Publication date
JPS59125611A (ja) 1984-07-20

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