JPS591158A - 磨きパツド組立体 - Google Patents

磨きパツド組立体

Info

Publication number
JPS591158A
JPS591158A JP58097760A JP9776083A JPS591158A JP S591158 A JPS591158 A JP S591158A JP 58097760 A JP58097760 A JP 58097760A JP 9776083 A JP9776083 A JP 9776083A JP S591158 A JPS591158 A JP S591158A
Authority
JP
Japan
Prior art keywords
vacuum chuck
polishing
assembly
backing
pad
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP58097760A
Other languages
English (en)
Japanese (ja)
Inventor
ロ−レンス・デイ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SPX Technologies Inc
Original Assignee
General Signal Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Signal Corp filed Critical General Signal Corp
Publication of JPS591158A publication Critical patent/JPS591158A/ja
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
JP58097760A 1982-06-01 1983-06-01 磨きパツド組立体 Pending JPS591158A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US38353382A 1982-06-01 1982-06-01
US383533 1982-06-01

Publications (1)

Publication Number Publication Date
JPS591158A true JPS591158A (ja) 1984-01-06

Family

ID=23513596

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58097760A Pending JPS591158A (ja) 1982-06-01 1983-06-01 磨きパツド組立体

Country Status (2)

Country Link
JP (1) JPS591158A (enrdf_load_stackoverflow)
DE (1) DE3319328A1 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61241059A (ja) * 1985-04-16 1986-10-27 Toshiba Corp 研磨装置
WO1995029039A1 (fr) * 1994-04-22 1995-11-02 Kabushiki Kaisha Toshiba Plaque support de surface de meulage separable et appareil associe

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SG70017A1 (en) * 1996-07-12 2000-01-25 Applied Materials Inc Holding a polishing pad on a platen in a chemical mechanical polishing system
US6379221B1 (en) 1996-12-31 2002-04-30 Applied Materials, Inc. Method and apparatus for automatically changing a polishing pad in a chemical mechanical polishing system

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1355345A (en) * 1919-03-17 1920-10-12 William A Lorenz Disk grinding-machine
DE1982787U (de) * 1968-01-13 1968-04-04 Albert Fezer Vorrichtung zum halten von insbesondere duennwandigen werkstuecken, z. b. duennen blechen, folien od. dgl.
DE1729540A1 (de) * 1968-01-15 1971-06-09 Lissmann Alkor Werk Verfahren und Einrichtung zum Aufbringen von Flaechenmustern auf Kunststoffhohlkoerper
US3562964A (en) * 1970-02-24 1971-02-16 Spitfire Tool & Machine Co Inc Lapping machine
DE2644054A1 (de) * 1976-09-30 1978-04-06 Harro Hoefliger Geraet zum reinigen und polieren von schuettgut, insbesondere von arzneimittel enthaltenden hartgelatinekapseln oder pillen

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61241059A (ja) * 1985-04-16 1986-10-27 Toshiba Corp 研磨装置
WO1995029039A1 (fr) * 1994-04-22 1995-11-02 Kabushiki Kaisha Toshiba Plaque support de surface de meulage separable et appareil associe
US6083083A (en) * 1994-04-22 2000-07-04 Kabushiki Kaisha Toshiba Separation type grinding surface plate and grinding apparatus using same

Also Published As

Publication number Publication date
DE3319328C2 (enrdf_load_stackoverflow) 1988-12-22
DE3319328A1 (de) 1983-12-08

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