JPS59104533U - レジスト処理装置 - Google Patents

レジスト処理装置

Info

Publication number
JPS59104533U
JPS59104533U JP19991782U JP19991782U JPS59104533U JP S59104533 U JPS59104533 U JP S59104533U JP 19991782 U JP19991782 U JP 19991782U JP 19991782 U JP19991782 U JP 19991782U JP S59104533 U JPS59104533 U JP S59104533U
Authority
JP
Japan
Prior art keywords
resist
mounting table
resist processing
substrate mounting
processing equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19991782U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0356041Y2 (enrdf_load_stackoverflow
Inventor
宏 橋本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP19991782U priority Critical patent/JPS59104533U/ja
Publication of JPS59104533U publication Critical patent/JPS59104533U/ja
Application granted granted Critical
Publication of JPH0356041Y2 publication Critical patent/JPH0356041Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP19991782U 1982-12-29 1982-12-29 レジスト処理装置 Granted JPS59104533U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19991782U JPS59104533U (ja) 1982-12-29 1982-12-29 レジスト処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19991782U JPS59104533U (ja) 1982-12-29 1982-12-29 レジスト処理装置

Publications (2)

Publication Number Publication Date
JPS59104533U true JPS59104533U (ja) 1984-07-13
JPH0356041Y2 JPH0356041Y2 (enrdf_load_stackoverflow) 1991-12-16

Family

ID=30425442

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19991782U Granted JPS59104533U (ja) 1982-12-29 1982-12-29 レジスト処理装置

Country Status (1)

Country Link
JP (1) JPS59104533U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02144333A (ja) * 1988-07-01 1990-06-04 Tokyo Electron Ltd 基板処理装置および基板搬送装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54103034A (en) * 1978-01-30 1979-08-14 Matsushita Electric Ind Co Ltd Automatic developer
JPS5596944A (en) * 1979-01-17 1980-07-23 Matsushita Electric Ind Co Ltd Developing method
JPS55154548U (enrdf_load_stackoverflow) * 1979-04-23 1980-11-07

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54103034A (en) * 1978-01-30 1979-08-14 Matsushita Electric Ind Co Ltd Automatic developer
JPS5596944A (en) * 1979-01-17 1980-07-23 Matsushita Electric Ind Co Ltd Developing method
JPS55154548U (enrdf_load_stackoverflow) * 1979-04-23 1980-11-07

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02144333A (ja) * 1988-07-01 1990-06-04 Tokyo Electron Ltd 基板処理装置および基板搬送装置

Also Published As

Publication number Publication date
JPH0356041Y2 (enrdf_load_stackoverflow) 1991-12-16

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