JPH0356041Y2 - - Google Patents

Info

Publication number
JPH0356041Y2
JPH0356041Y2 JP1982199917U JP19991782U JPH0356041Y2 JP H0356041 Y2 JPH0356041 Y2 JP H0356041Y2 JP 1982199917 U JP1982199917 U JP 1982199917U JP 19991782 U JP19991782 U JP 19991782U JP H0356041 Y2 JPH0356041 Y2 JP H0356041Y2
Authority
JP
Japan
Prior art keywords
resist
wafer
mounting table
substrate mounting
solvent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982199917U
Other languages
English (en)
Japanese (ja)
Other versions
JPS59104533U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19991782U priority Critical patent/JPS59104533U/ja
Publication of JPS59104533U publication Critical patent/JPS59104533U/ja
Application granted granted Critical
Publication of JPH0356041Y2 publication Critical patent/JPH0356041Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP19991782U 1982-12-29 1982-12-29 レジスト処理装置 Granted JPS59104533U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19991782U JPS59104533U (ja) 1982-12-29 1982-12-29 レジスト処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19991782U JPS59104533U (ja) 1982-12-29 1982-12-29 レジスト処理装置

Publications (2)

Publication Number Publication Date
JPS59104533U JPS59104533U (ja) 1984-07-13
JPH0356041Y2 true JPH0356041Y2 (enrdf_load_stackoverflow) 1991-12-16

Family

ID=30425442

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19991782U Granted JPS59104533U (ja) 1982-12-29 1982-12-29 レジスト処理装置

Country Status (1)

Country Link
JP (1) JPS59104533U (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2743274B2 (ja) * 1988-07-01 1998-04-22 東京エレクトロン株式会社 基板処理装置および基板搬送装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54103034A (en) * 1978-01-30 1979-08-14 Matsushita Electric Ind Co Ltd Automatic developer
JPS6053305B2 (ja) * 1979-01-17 1985-11-25 松下電器産業株式会社 現像方法
JPS55154548U (enrdf_load_stackoverflow) * 1979-04-23 1980-11-07

Also Published As

Publication number Publication date
JPS59104533U (ja) 1984-07-13

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