JPS5867032A - 半導体装置 - Google Patents

半導体装置

Info

Publication number
JPS5867032A
JPS5867032A JP56165336A JP16533681A JPS5867032A JP S5867032 A JPS5867032 A JP S5867032A JP 56165336 A JP56165336 A JP 56165336A JP 16533681 A JP16533681 A JP 16533681A JP S5867032 A JPS5867032 A JP S5867032A
Authority
JP
Japan
Prior art keywords
bonding pad
polysilicon
bonding
exposed
impurity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56165336A
Other languages
English (en)
Inventor
Yasuhiko Matsumoto
康彦 松本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP56165336A priority Critical patent/JPS5867032A/ja
Publication of JPS5867032A publication Critical patent/JPS5867032A/ja
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/02Bonding areas ; Manufacturing methods related thereto
    • H01L24/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L24/05Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02Bonding areas; Manufacturing methods related thereto
    • H01L2224/0212Auxiliary members for bonding areas, e.g. spacers
    • H01L2224/02122Auxiliary members for bonding areas, e.g. spacers being formed on the semiconductor or solid-state body
    • H01L2224/02163Auxiliary members for bonding areas, e.g. spacers being formed on the semiconductor or solid-state body on the bonding area
    • H01L2224/02165Reinforcing structures
    • H01L2224/02166Collar structures
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    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02Bonding areas; Manufacturing methods related thereto
    • H01L2224/023Redistribution layers [RDL] for bonding areas
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    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02Bonding areas; Manufacturing methods related thereto
    • H01L2224/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/04042Bonding areas specifically adapted for wire connectors, e.g. wirebond pads
    • HELECTRICITY
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    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02Bonding areas; Manufacturing methods related thereto
    • H01L2224/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/05Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • H01L2224/05001Internal layers
    • H01L2224/05099Material
    • H01L2224/051Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
    • H01L2224/05117Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 400°C and less than 950°C
    • H01L2224/05124Aluminium [Al] as principal constituent
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    • H01L2224/02Bonding areas; Manufacturing methods related thereto
    • H01L2224/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/05Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • H01L2224/0554External layer
    • H01L2224/0555Shape
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    • H01L2224/02Bonding areas; Manufacturing methods related thereto
    • H01L2224/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/05Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • H01L2224/0554External layer
    • H01L2224/0556Disposition
    • H01L2224/05563Only on parts of the surface of the internal layer
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    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/44Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
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    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/44Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001Core members of the connector
    • H01L2224/45099Material
    • H01L2224/451Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45117Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 400°C and less than 950°C
    • H01L2224/45124Aluminium (Al) as principal constituent
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    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
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    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/484Connecting portions
    • H01L2224/4845Details of ball bonds
    • H01L2224/48451Shape
    • H01L2224/48453Shape of the interface with the bonding area
    • HELECTRICITY
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    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/484Connecting portions
    • H01L2224/48463Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/485Material
    • H01L2224/48505Material at the bonding interface
    • H01L2224/48699Principal constituent of the connecting portion of the wire connector being Aluminium (Al)
    • HELECTRICITY
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    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
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    • H01L2924/01014Silicon [Si]

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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Wire Bonding (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。

Description

【発明の詳細な説明】 本発明は集積回路素子などの半導体装置に関し。
特Kjl子表面のボンティングパッドの改善に関する。
従来、集積回路素子には、At蒸1着をし、フォトレジ
スト技術を用いてAL配mlを行なってきた。
さらに、信頼性を上げるため、この配線上にCVD法に
より酸化#(Stow)やプラズマ窒化Jl# (P 
−8iN)を成長させ、At配線の保譲や不純物の混入
による特性の劣化を防いでいた。
ところで、このような構造にしても、電極を取り出すた
めに、ポンディングパッド部の窓開けを行なうため、ど
うしてもムLの一部が表面に露出してしまう、そして、
このような素子を長時間高温、多湿の状況下にお(と、
この亀山したAtは腐蝕しはじめ、ついには、酸化族や
プラズマ電化属に援われている部分のAAにも波及し、
その部分ohtも腐蝕する。
すなわち、第4図は従来の集積回路素子の一部分の断m
WAでbル1図において、シリコン基板10表面にプレ
ーナ技術を用いて不純物拡散領域2を形成する。熱酸化
膜層3を形成した後、コンタクトのための窓開けを行な
い、At蒸着を行なう。
フォトレジスト工程によりsht配fi!41−形成す
る。その後、素子表面を保護するために−s CVD法
により酸化1[5t−成長させ、ボンティングパッド部
6の窓開けを行ないボンディング1IA7ft#:続す
る。
ところで、このような素子を高温、多湿の啄囲気に長時
間保管すると、第2図のごとく、表面に慕出しているポ
ンディングパッド部の6ALの腐蝕によりIl′r憑し
てしまう。
本発明の目的は、露出するポンディングパッド部の湿気
などによる腐蝕による損傷の生じ難い、信頼性の高い半
導体装置を提供することでめる。
本発明では、従来のポンディングパッドのAAO代わり
に不純物を拡散した余りシリコンを用いている。
つぎに本発明を実施例によ)説明する。
第3図は本発明の一実施例の集積回路素子の部分断面図
である。第3図においては、ポンディングパッド部6を
除いた他の部分は、第1図に示した従来例と同じである
。しかして、第3図のポンディングパッド部6は、不純
物を拡散したポリシリコン族8から形成され、AA配線
4と一端部4aで接続されている。
このように、ボンディングのためにどうしても露出せぜ
るを得ないポンディングパッドに、不純物を拡散したポ
リシリコンを用いることにより、高温、多湿の雰囲気に
長時間保管されても、ポリシリコンは安定でおって、従
来のAAのようにはHi!にし七断線することはなく、
信頼性に勝れた半導体装置が得られる。
【図面の簡単な説明】
第1図は従来の集積回路素子の部分断面図、第2図は第
1図の集積回路素子のポンプイングツ(ラドの腐蝕を説
明するための部分断面図、第3図は本発明の一実施例の
部分断面′図である。 1・・・シリコン基板 2 ass不純物拡散領域、3
・・・熱酸化膜、4−ht’#j!、線、5−CVD酸
(ヒM!、6・・・ポンディングパッド部、7・・・ボ
ンディング線、8・・・ポリシリコンのポンプイングツ
くット°。

Claims (1)

    【特許請求の範囲】
  1. 不純物全拡散したポリシリコンにより形成されたポンデ
    ィングパッドを具えたことtI!II徴とする半導体装
    置。
JP56165336A 1981-10-16 1981-10-16 半導体装置 Pending JPS5867032A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56165336A JPS5867032A (ja) 1981-10-16 1981-10-16 半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56165336A JPS5867032A (ja) 1981-10-16 1981-10-16 半導体装置

Publications (1)

Publication Number Publication Date
JPS5867032A true JPS5867032A (ja) 1983-04-21

Family

ID=15810393

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56165336A Pending JPS5867032A (ja) 1981-10-16 1981-10-16 半導体装置

Country Status (1)

Country Link
JP (1) JPS5867032A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009021277A (ja) * 2007-07-10 2009-01-29 Murata Mfg Co Ltd 半導体素子および該半導体素子の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009021277A (ja) * 2007-07-10 2009-01-29 Murata Mfg Co Ltd 半導体素子および該半導体素子の製造方法

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