JPS5857248A - 走査形電子顕微鏡 - Google Patents

走査形電子顕微鏡

Info

Publication number
JPS5857248A
JPS5857248A JP56153604A JP15360481A JPS5857248A JP S5857248 A JPS5857248 A JP S5857248A JP 56153604 A JP56153604 A JP 56153604A JP 15360481 A JP15360481 A JP 15360481A JP S5857248 A JPS5857248 A JP S5857248A
Authority
JP
Japan
Prior art keywords
signal
image
sample
detected
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56153604A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0232740B2 (enrdf_load_stackoverflow
Inventor
Naotake Saito
斉藤　尚武
Takashi Nagatani
永谷　隆
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP56153604A priority Critical patent/JPS5857248A/ja
Publication of JPS5857248A publication Critical patent/JPS5857248A/ja
Publication of JPH0232740B2 publication Critical patent/JPH0232740B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP56153604A 1981-09-30 1981-09-30 走査形電子顕微鏡 Granted JPS5857248A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56153604A JPS5857248A (ja) 1981-09-30 1981-09-30 走査形電子顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56153604A JPS5857248A (ja) 1981-09-30 1981-09-30 走査形電子顕微鏡

Publications (2)

Publication Number Publication Date
JPS5857248A true JPS5857248A (ja) 1983-04-05
JPH0232740B2 JPH0232740B2 (enrdf_load_stackoverflow) 1990-07-23

Family

ID=15566111

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56153604A Granted JPS5857248A (ja) 1981-09-30 1981-09-30 走査形電子顕微鏡

Country Status (1)

Country Link
JP (1) JPS5857248A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6175725A (ja) * 1984-09-21 1986-04-18 Taisei Sharyo Kk 長尺物の整列搬送装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5244158A (en) * 1975-10-03 1977-04-06 Hitachi Ltd Scanning electronic microscope
JPS5778758A (en) * 1980-11-05 1982-05-17 Mitsubishi Electric Corp Scan type electron microscope

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5244158A (en) * 1975-10-03 1977-04-06 Hitachi Ltd Scanning electronic microscope
JPS5778758A (en) * 1980-11-05 1982-05-17 Mitsubishi Electric Corp Scan type electron microscope

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6175725A (ja) * 1984-09-21 1986-04-18 Taisei Sharyo Kk 長尺物の整列搬送装置

Also Published As

Publication number Publication date
JPH0232740B2 (enrdf_load_stackoverflow) 1990-07-23

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