JPS5778758A - Scan type electron microscope - Google Patents

Scan type electron microscope

Info

Publication number
JPS5778758A
JPS5778758A JP15609380A JP15609380A JPS5778758A JP S5778758 A JPS5778758 A JP S5778758A JP 15609380 A JP15609380 A JP 15609380A JP 15609380 A JP15609380 A JP 15609380A JP S5778758 A JPS5778758 A JP S5778758A
Authority
JP
Japan
Prior art keywords
detectors
combined image
scanning line
output
switching circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15609380A
Other languages
Japanese (ja)
Inventor
Masashi Otaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP15609380A priority Critical patent/JPS5778758A/en
Publication of JPS5778758A publication Critical patent/JPS5778758A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Abstract

PURPOSE:To simplify the operation by detecting the signal generated from a specimen through a plurality of detectors then switching said signal to the scanning line unit by means of a switching circuit operating synchronously with the scanning line thereby indicating a combined image. CONSTITUTION:The signal generated from a specimen 2 is detected by detectors 3, 4 and provided to a switching circuit 15 controlled by the output from a pulse generating circuit 14 operating synchronously with the output saw-tooth wave for the lateral axis of a scanning oscillator 13. Then the outputs from the detectors 3, 4 are provided to a Braun tube 10 through a switch 8 thereafter the switches 7a-7c are switched to apply the output from a switching circuit 15 to the Braun tube 10 thus to view the combined image. Consequently the signal from the detectors 3, 4 is switched for every lateral axis scanning line of the Braun tube 10 and displayed as a combined image resulting in the simplification of the operation and the shortening of the time required for the adjustment.
JP15609380A 1980-11-05 1980-11-05 Scan type electron microscope Pending JPS5778758A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15609380A JPS5778758A (en) 1980-11-05 1980-11-05 Scan type electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15609380A JPS5778758A (en) 1980-11-05 1980-11-05 Scan type electron microscope

Publications (1)

Publication Number Publication Date
JPS5778758A true JPS5778758A (en) 1982-05-17

Family

ID=15620150

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15609380A Pending JPS5778758A (en) 1980-11-05 1980-11-05 Scan type electron microscope

Country Status (1)

Country Link
JP (1) JPS5778758A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5857248A (en) * 1981-09-30 1983-04-05 Hitachi Ltd Scanning-type electron microscope
EP0186851A2 (en) * 1984-12-31 1986-07-09 International Business Machines Corporation Apparatus and method for composite image formation by scanning electron beam

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5857248A (en) * 1981-09-30 1983-04-05 Hitachi Ltd Scanning-type electron microscope
JPH0232740B2 (en) * 1981-09-30 1990-07-23 Hitachi Ltd
EP0186851A2 (en) * 1984-12-31 1986-07-09 International Business Machines Corporation Apparatus and method for composite image formation by scanning electron beam

Similar Documents

Publication Publication Date Title
GB1000560A (en) Electron probe system
JPS5778758A (en) Scan type electron microscope
KR830009843A (en) Dual mode horizontal deflection circuit
ES8102359A1 (en) Device for displaying an analog signal on a display screen.
JPS56141156A (en) Sample image display device
JPS5427354A (en) Scan-type electronic microscope
SU1164611A1 (en) Device for generating,controlling and checking sweep operation of cathode-ray oscilloscope
SU426144A1 (en) TELEVISION DEVICE TO DETERMINE THE CENTER OF IMPORTANCE OF FLAT IMAGES
JPS5760649A (en) Strobe electron microscope
SU540627A1 (en) Reaction Measuring Device
SU535754A1 (en) Information display device
JPS5478075A (en) Sample image display device
SU407300A1 (en) MYOGOCHANNAL INDICATOR
SU752801A1 (en) Two-channel electronic switching device
SU828213A2 (en) Device for displaying information on crt screen
SU585447A1 (en) Indicating-measuring device
JPS54145428A (en) Two-beam display system of stillimotiom mode alternation type
SU974565A1 (en) Pulse time position measuring device
JPS57130356A (en) Specimen image display device
SU726546A1 (en) Device for displaying information on crt screen
JPS55163949A (en) Stabilizing circuit for screen size
JPS5672369A (en) Radar display device
JPS6457293A (en) Highly accurate display
SU983822A1 (en) Pulze corpuscular microscore
JPS5760650A (en) Strobe electron microscope