JPS5848940A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS5848940A
JPS5848940A JP14809281A JP14809281A JPS5848940A JP S5848940 A JPS5848940 A JP S5848940A JP 14809281 A JP14809281 A JP 14809281A JP 14809281 A JP14809281 A JP 14809281A JP S5848940 A JPS5848940 A JP S5848940A
Authority
JP
Japan
Prior art keywords
film
polyacethylene
polyimide film
wiring
polyacetylene
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14809281A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0117254B2 (enrdf_load_stackoverflow
Inventor
Nobuo Sasaki
伸夫 佐々木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP14809281A priority Critical patent/JPS5848940A/ja
Priority to EP82304904A priority patent/EP0075454B1/en
Priority to DE8282304904T priority patent/DE3277759D1/de
Publication of JPS5848940A publication Critical patent/JPS5848940A/ja
Priority to US07/008,139 priority patent/US4761677A/en
Publication of JPH0117254B2 publication Critical patent/JPH0117254B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Formation Of Insulating Films (AREA)
  • Local Oxidation Of Silicon (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP14809281A 1981-09-18 1981-09-18 半導体装置の製造方法 Granted JPS5848940A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP14809281A JPS5848940A (ja) 1981-09-18 1981-09-18 半導体装置の製造方法
EP82304904A EP0075454B1 (en) 1981-09-18 1982-09-17 Semiconductor device having new conductive interconnection structure and method for manufacturing the same
DE8282304904T DE3277759D1 (en) 1981-09-18 1982-09-17 Semiconductor device having new conductive interconnection structure and method for manufacturing the same
US07/008,139 US4761677A (en) 1981-09-18 1987-01-22 Semiconductor device having new conductive interconnection structure and method for manufacturing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14809281A JPS5848940A (ja) 1981-09-18 1981-09-18 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS5848940A true JPS5848940A (ja) 1983-03-23
JPH0117254B2 JPH0117254B2 (enrdf_load_stackoverflow) 1989-03-29

Family

ID=15445054

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14809281A Granted JPS5848940A (ja) 1981-09-18 1981-09-18 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS5848940A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0630820U (ja) * 1992-09-16 1994-04-22 日信工業株式会社 回動レバーの取付け構造
WO1998021755A3 (en) * 1996-11-12 1998-10-08 Ibm Patterns of electrically conducting polymers and their application as electrodes or electrical contacts
US6331356B1 (en) 1989-05-26 2001-12-18 International Business Machines Corporation Patterns of electrically conducting polymers and their application as electrodes or electrical contacts
US6746770B1 (en) * 1989-05-26 2004-06-08 Internatonal Business Machines Corporation Electrically conductive and abrasion/scratch resistant polymeric materials, method of fabrication thereof and uses thereof

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5351985A (en) * 1976-10-22 1978-05-11 Hitachi Ltd Semiconductor wiring constitution

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5351985A (en) * 1976-10-22 1978-05-11 Hitachi Ltd Semiconductor wiring constitution

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6331356B1 (en) 1989-05-26 2001-12-18 International Business Machines Corporation Patterns of electrically conducting polymers and their application as electrodes or electrical contacts
US6746770B1 (en) * 1989-05-26 2004-06-08 Internatonal Business Machines Corporation Electrically conductive and abrasion/scratch resistant polymeric materials, method of fabrication thereof and uses thereof
US7095474B2 (en) 1989-05-26 2006-08-22 International Business Machines Corporation Patterns of electrically conducting polymers and their application as electrodes or electrical contacts
JPH0630820U (ja) * 1992-09-16 1994-04-22 日信工業株式会社 回動レバーの取付け構造
WO1998021755A3 (en) * 1996-11-12 1998-10-08 Ibm Patterns of electrically conducting polymers and their application as electrodes or electrical contacts

Also Published As

Publication number Publication date
JPH0117254B2 (enrdf_load_stackoverflow) 1989-03-29

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