WO1998021755A3 - Patterns of electrically conducting polymers and their application as electrodes or electrical contacts - Google Patents

Patterns of electrically conducting polymers and their application as electrodes or electrical contacts Download PDF

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Publication number
WO1998021755A3
WO1998021755A3 PCT/US1997/020862 US9720862W WO9821755A3 WO 1998021755 A3 WO1998021755 A3 WO 1998021755A3 US 9720862 W US9720862 W US 9720862W WO 9821755 A3 WO9821755 A3 WO 9821755A3
Authority
WO
WIPO (PCT)
Prior art keywords
electrically conductive
electrodes
patterning
patterned
patterns
Prior art date
Application number
PCT/US1997/020862
Other languages
French (fr)
Other versions
WO1998021755A2 (en
Inventor
Marie Angelopoulos
Christos Dimit Dimitrakopoulos
Bruce Kenneth Furman
Teresita Ordonez Graham
Shui-Chih Alan Lien
Original Assignee
Ibm
Marie Angelopoulos
Christos Dimit Dimitrakopoulos
Bruce Kenneth Furman
Teresita Ordonez Graham
Lien Shui Chih Alan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to EP97949443A priority Critical patent/EP0953213A2/en
Priority to JP10522863A priority patent/JP2000505249A/en
Priority to KR1019980705329A priority patent/KR100304402B1/en
Application filed by Ibm, Marie Angelopoulos, Christos Dimit Dimitrakopoulos, Bruce Kenneth Furman, Teresita Ordonez Graham, Lien Shui Chih Alan filed Critical Ibm
Publication of WO1998021755A2 publication Critical patent/WO1998021755A2/en
Priority to US09/113,807 priority patent/US6331356B1/en
Publication of WO1998021755A3 publication Critical patent/WO1998021755A3/en
Priority to US09/950,534 priority patent/US7095474B2/en
Priority to US11/472,776 priority patent/US20070110921A1/en
Priority to US11/472,959 priority patent/US20070057624A1/en
Priority to US11/472,775 priority patent/US20070077371A1/en
Priority to US11/472,982 priority patent/US20060238690A1/en
Priority to US11/472,774 priority patent/US20060238116A1/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1343—Electrodes
    • G02F1/13439—Electrodes characterised by their electrical, optical, physical properties; materials therefor; method of making
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/40—Electrodes ; Multistep manufacturing processes therefor
    • H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
    • H01L29/45—Ohmic electrodes
    • H01L29/456—Ohmic electrodes on silicon
    • H01L29/458—Ohmic electrodes on silicon for thin film silicon, e.g. source or drain electrode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/40—Electrodes ; Multistep manufacturing processes therefor
    • H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
    • H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
    • H01L29/4908—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET for thin film semiconductor, e.g. gate of TFT
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/40—Organic transistors
    • H10K10/43—Bipolar transistors, e.g. organic bipolar junction transistors [OBJT]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/80—Constructional details
    • H10K50/805—Electrodes

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Mathematical Physics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Optics & Photonics (AREA)
  • Electroluminescent Light Sources (AREA)
  • Thin Film Transistor (AREA)
  • Liquid Crystal (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Abstract

Electronic devices having patterned electrically conductive polymers providing electrical connection thereto and methods of fabrication thereof are described. Liquid crystal display cells are described having at least one of the electrodes providing a bias across the liquid crystal material formed from a patterned electrically conductive polymer. Thin film transistors having patterned electrically conductive polymers as source drain and gate electrodes are described. Light emitting diodes having anode and coated regions formed from patterned electrically conductive polymers are described. Methods of patterning using a resist mask; patterning using a patterned metal layer; patterning the metal layer using a resist; and patterning the electrically conductive polymer directly to form electrodes and anode and cathode regions are described.
PCT/US1997/020862 1989-05-26 1997-11-10 Patterns of electrically conducting polymers and their application as electrodes or electrical contacts WO1998021755A2 (en)

Priority Applications (10)

Application Number Priority Date Filing Date Title
EP97949443A EP0953213A2 (en) 1996-11-12 1997-11-10 Patterns of electrically conducting polymers and their application as electrodes or electrical contacts
JP10522863A JP2000505249A (en) 1996-11-12 1997-11-10 Patterns of conductive polymers and their application as electrodes or electrical contacts
KR1019980705329A KR100304402B1 (en) 1996-11-12 1997-11-10 Patterns of electrically conducting polymers and their application as electrodes or electrical contacts
US09/113,807 US6331356B1 (en) 1989-05-26 1998-07-09 Patterns of electrically conducting polymers and their application as electrodes or electrical contacts
US09/950,534 US7095474B2 (en) 1989-05-26 2001-10-19 Patterns of electrically conducting polymers and their application as electrodes or electrical contacts
US11/472,776 US20070110921A1 (en) 1989-05-26 2006-06-22 Patterns of electrically conducting polymers and their application as electrodes or electrical contacts
US11/472,774 US20060238116A1 (en) 1989-05-26 2006-06-22 Patterns of electrically conducting polymers and their application as electrodes or electrical contacts
US11/472,982 US20060238690A1 (en) 1989-05-26 2006-06-22 Patterns of electrically conducting polymers and their application as electrodes or electrical contacts
US11/472,959 US20070057624A1 (en) 1989-05-26 2006-06-22 Patterns of electrically conducting polymers and their application as electrodes or electrical contacts
US11/472,775 US20070077371A1 (en) 1989-05-26 2006-06-22 Patterns of electrically conducting polymers and their application as electrodes or electrical contacts

Applications Claiming Priority (16)

Application Number Priority Date Filing Date Title
US3050196P 1996-11-12 1996-11-12
US60/030,501 1996-11-12
US4015997P 1997-03-07 1997-03-07
US4013097P 1997-03-07 1997-03-07
US4062897P 1997-03-07 1997-03-07
US4033597P 1997-03-07 1997-03-07
US4012997P 1997-03-07 1997-03-07
US4013197P 1997-03-07 1997-03-07
US4013297P 1997-03-07 1997-03-07
US60/040,335 1997-03-07
US60/040,129 1997-03-07
US60/040,628 1997-03-07
US60/040,132 1997-03-07
US60/040,159 1997-03-07
US60/040,131 1997-03-07
US60/040,130 1997-03-07

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
US08/476,141 Continuation-In-Part US6746770B1 (en) 1989-05-26 1995-06-07 Electrically conductive and abrasion/scratch resistant polymeric materials, method of fabrication thereof and uses thereof

Related Child Applications (4)

Application Number Title Priority Date Filing Date
US09/036,458 Continuation-In-Part US6967236B1 (en) 1989-05-26 1998-03-06 Methods of processing and synthesizing electrically conductive polymers and precursors thereof to form electrically conductive polymers having high electrical conductivity
US09/113,807 Continuation-In-Part US6331356B1 (en) 1989-05-26 1998-07-09 Patterns of electrically conducting polymers and their application as electrodes or electrical contacts
US09/950,534 Continuation-In-Part US7095474B2 (en) 1989-05-26 2001-10-19 Patterns of electrically conducting polymers and their application as electrodes or electrical contacts
US11/472,776 Continuation-In-Part US20070110921A1 (en) 1989-05-26 2006-06-22 Patterns of electrically conducting polymers and their application as electrodes or electrical contacts

Publications (2)

Publication Number Publication Date
WO1998021755A2 WO1998021755A2 (en) 1998-05-22
WO1998021755A3 true WO1998021755A3 (en) 1998-10-08

Family

ID=27574171

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1997/020862 WO1998021755A2 (en) 1989-05-26 1997-11-10 Patterns of electrically conducting polymers and their application as electrodes or electrical contacts

Country Status (6)

Country Link
EP (1) EP0953213A2 (en)
JP (1) JP2000505249A (en)
KR (1) KR100304402B1 (en)
CN (1) CN1170321C (en)
SG (1) SG121693A1 (en)
WO (1) WO1998021755A2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8154015B2 (en) 2001-11-09 2012-04-10 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device including thin film transistor

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US5958634A (en) * 1997-10-30 1999-09-28 Eastman Kodak Company Display apparatus using light patternable conductive traces
US5990994A (en) * 1997-10-30 1999-11-23 Eastman Kodak Company First and second light sensitive conductive layers for use in image displays
GB9907931D0 (en) * 1999-04-07 1999-06-02 Univ Edinburgh An optoelectronic display
GB0024804D0 (en) 2000-10-10 2000-11-22 Microemissive Displays Ltd An optoelectronic device
US6649327B2 (en) * 2001-10-25 2003-11-18 The United States Of America As Represented By The Secretary Of The Navy Method of patterning electrically conductive polymers
CN101009322B (en) * 2001-11-09 2012-06-27 株式会社半导体能源研究所 Light-emitting device
AU2003279014A1 (en) 2002-09-24 2004-04-19 E.I. Du Pont De Nemours And Company Water dispersible polyanilines made with polymeric acid colloids for electronics applications
US7317047B2 (en) 2002-09-24 2008-01-08 E.I. Du Pont De Nemours And Company Electrically conducting organic polymer/nanoparticle composites and methods for use thereof
JP4464277B2 (en) 2002-09-24 2010-05-19 イー・アイ・デュポン・ドウ・ヌムール・アンド・カンパニー Conductive organic polymer / nanoparticle composite material and method of using the same
AU2003275203A1 (en) 2002-09-24 2004-04-19 E.I. Du Pont De Nemours And Company Water dispersible polythiophenes made with polymeric acid colloids
JP2004154301A (en) * 2002-11-06 2004-06-03 Hitachi Medical Corp Receiving coil for head of magnetic resonance imaging equipment
GB0307746D0 (en) * 2003-04-03 2003-05-07 Microemissive Displays Ltd Removing a material from a substrate
US7297621B2 (en) 2003-04-15 2007-11-20 California Institute Of Technology Flexible carbon-based ohmic contacts for organic transistors
US7390438B2 (en) 2003-04-22 2008-06-24 E.I. Du Pont De Nemours And Company Water dispersible substituted polydioxythiophenes made with fluorinated polymeric sulfonic acid colloids
US7221095B2 (en) 2003-06-16 2007-05-22 Semiconductor Energy Laboratory Co., Ltd. Light emitting device and method for fabricating light emitting device
JP4755142B2 (en) * 2003-06-16 2011-08-24 株式会社半導体エネルギー研究所 LIGHT EMITTING DEVICE AND ELECTRONIC DEVICE USING LIGHT EMITTING DEVICE
US7351358B2 (en) 2004-03-17 2008-04-01 E.I. Du Pont De Nemours And Company Water dispersible polypyrroles made with polymeric acid colloids for electronics applications
KR101182435B1 (en) 2005-02-03 2012-09-12 삼성디스플레이 주식회사 Conductive polymer patterned layer and patterning method the layer, organic light emitting device and fabrication method thereof
KR101356296B1 (en) 2005-06-28 2014-02-06 이 아이 듀폰 디 네모아 앤드 캄파니 High Work Function Transparent Conductors
WO2007002740A2 (en) 2005-06-28 2007-01-04 E. I. Du Pont De Nemours And Company Buffer compositions
EP1835552A1 (en) * 2006-03-17 2007-09-19 Festo Ag & Co. Piezoelectric device
EP2071591A4 (en) * 2006-09-29 2010-03-31 Tsurumi Soda Kk Etching liquid for conductive polymer and method for patterning conductive polymer
US8153029B2 (en) 2006-12-28 2012-04-10 E.I. Du Pont De Nemours And Company Laser (230NM) ablatable compositions of electrically conducting polymers made with a perfluoropolymeric acid applications thereof
US8062553B2 (en) 2006-12-28 2011-11-22 E. I. Du Pont De Nemours And Company Compositions of polyaniline made with perfuoropolymeric acid which are heat-enhanced and electronic devices made therewith
US20080191172A1 (en) 2006-12-29 2008-08-14 Che-Hsiung Hsu High work-function and high conductivity compositions of electrically conducting polymers
KR101383924B1 (en) * 2007-04-11 2014-04-14 엘지디스플레이 주식회사 Thin Film Transistor Array and Fabricating method thereof
DE102008019129A1 (en) 2007-04-23 2008-10-30 Dongbu Hitek Co., Ltd. image sensor
US8241526B2 (en) 2007-05-18 2012-08-14 E I Du Pont De Nemours And Company Aqueous dispersions of electrically conducting polymers containing high boiling solvent and additives
KR20100037604A (en) * 2007-06-15 2010-04-09 가부시키가이샤 한도오따이 에네루기 켄큐쇼 Display device
JP5103279B2 (en) * 2008-05-29 2012-12-19 株式会社ジャパンディスプレイイースト Liquid crystal display
US8945426B2 (en) 2009-03-12 2015-02-03 E I Du Pont De Nemours And Company Electrically conductive polymer compositions for coating applications
CN102395628B (en) 2009-04-21 2016-01-20 E.I.内穆尔杜邦公司 Conductive polymer compositions and the film obtained by it
WO2010124166A2 (en) 2009-04-24 2010-10-28 E. I. Du Pont De Nemours And Company Electrically conductive polymer compositions and films made therefrom
JP5712438B2 (en) 2010-03-26 2015-05-07 国立大学法人東北大学 Porous structure having pattern made of conductive polymer and method for producing the same
TWI449219B (en) * 2011-01-20 2014-08-11 Innolux Corp Light emitting diode device, and method for fabricating the same
CN104103757A (en) * 2013-04-03 2014-10-15 中国科学院微电子研究所 Preparation method for organic electrode
CN103311436B (en) * 2013-06-04 2016-01-20 中国科学院化学研究所 A kind of manufacture method of polymer template and the application in organic field effect tube thereof
US9728597B2 (en) * 2014-12-04 2017-08-08 Taiwan Semiconductor Manufacturing Co., Ltd. Metal-insulator-metal structure and method for forming the same
CN105185835A (en) * 2015-07-30 2015-12-23 京东方科技集团股份有限公司 Thin film transistor and manufacturing method thereof, array substrate, and display device
CN106009015B (en) * 2016-07-15 2019-04-02 深圳市华星光电技术有限公司 Conducting polymer thin film and preparation method thereof and liquid crystal display panel
CN110854163A (en) * 2019-10-24 2020-02-28 武汉华星光电半导体显示技术有限公司 Display panel and preparation method thereof
CN111158197A (en) * 2020-01-02 2020-05-15 Tcl华星光电技术有限公司 Liquid crystal display panel and preparation method thereof
CN113355107A (en) * 2021-07-05 2021-09-07 合肥中聚合臣电子材料有限公司 Liquid crystal orientation agent

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8154015B2 (en) 2001-11-09 2012-04-10 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device including thin film transistor
US8324618B2 (en) 2001-11-09 2012-12-04 Semiconductor Energy Laboratory Co., Ltd. Light emitting device
US9577016B2 (en) 2001-11-09 2017-02-21 Semiconductor Energy Laboratory Co., Ltd. Light emitting device

Also Published As

Publication number Publication date
JP2000505249A (en) 2000-04-25
EP0953213A2 (en) 1999-11-03
CN1170321C (en) 2004-10-06
KR19990077188A (en) 1999-10-25
KR100304402B1 (en) 2002-03-08
SG121693A1 (en) 2006-05-26
WO1998021755A2 (en) 1998-05-22
CN1240537A (en) 2000-01-05

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