JPS5848445A - 金属リ−ドと電極の接続方法 - Google Patents
金属リ−ドと電極の接続方法Info
- Publication number
- JPS5848445A JPS5848445A JP56147680A JP14768081A JPS5848445A JP S5848445 A JPS5848445 A JP S5848445A JP 56147680 A JP56147680 A JP 56147680A JP 14768081 A JP14768081 A JP 14768081A JP S5848445 A JPS5848445 A JP S5848445A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- film carrier
- film
- gold
- protruded
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- 238000000034 method Methods 0.000 claims abstract description 14
- 239000000758 substrate Substances 0.000 claims abstract description 14
- 229910052751 metal Inorganic materials 0.000 claims abstract description 10
- 239000002184 metal Substances 0.000 claims abstract description 10
- 238000005530 etching Methods 0.000 claims description 5
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 abstract description 15
- 229910052782 aluminium Inorganic materials 0.000 abstract description 12
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract description 12
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract description 9
- 229910052802 copper Inorganic materials 0.000 abstract description 9
- 239000010949 copper Substances 0.000 abstract description 9
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract description 8
- 239000010931 gold Substances 0.000 abstract description 7
- 229910052737 gold Inorganic materials 0.000 abstract description 7
- 230000001681 protective effect Effects 0.000 abstract description 5
- 238000010586 diagram Methods 0.000 abstract description 4
- 238000007747 plating Methods 0.000 abstract description 3
- JVPLOXQKFGYFMN-UHFFFAOYSA-N gold tin Chemical compound [Sn].[Au] JVPLOXQKFGYFMN-UHFFFAOYSA-N 0.000 abstract description 2
- 229910001128 Sn alloy Inorganic materials 0.000 abstract 2
- 229910001020 Au alloy Inorganic materials 0.000 abstract 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 abstract 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 239000013078 crystal Substances 0.000 description 2
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/79—Apparatus for Tape Automated Bonding [TAB]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/50—Tape automated bonding [TAB] connectors, i.e. film carriers; Manufacturing methods related thereto
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01013—Aluminum [Al]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01029—Copper [Cu]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01078—Platinum [Pt]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01079—Gold [Au]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01082—Lead [Pb]
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Wire Bonding (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56147680A JPS5848445A (ja) | 1981-09-17 | 1981-09-17 | 金属リ−ドと電極の接続方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56147680A JPS5848445A (ja) | 1981-09-17 | 1981-09-17 | 金属リ−ドと電極の接続方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5848445A true JPS5848445A (ja) | 1983-03-22 |
JPS6234142B2 JPS6234142B2 (enrdf_load_stackoverflow) | 1987-07-24 |
Family
ID=15435845
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56147680A Granted JPS5848445A (ja) | 1981-09-17 | 1981-09-17 | 金属リ−ドと電極の接続方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5848445A (enrdf_load_stackoverflow) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5999095U (ja) * | 1982-12-23 | 1984-07-04 | 三菱重工業株式会社 | プレス |
US5208186A (en) * | 1989-02-09 | 1993-05-04 | National Semiconductor Corporation | Process for reflow bonding of bumps in IC devices |
JPH08241914A (ja) * | 1996-02-13 | 1996-09-17 | Kyushu Hitachi Maxell Ltd | 電鋳金属体 |
US7197817B2 (en) | 2003-01-17 | 2007-04-03 | Nec Electronics Corporation | Method for forming contact bumps for circuit board |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4869471A (enrdf_load_stackoverflow) * | 1971-12-22 | 1973-09-20 | ||
JPS5469383A (en) * | 1977-11-15 | 1979-06-04 | Toshiba Corp | Production of semiconductor device |
-
1981
- 1981-09-17 JP JP56147680A patent/JPS5848445A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4869471A (enrdf_load_stackoverflow) * | 1971-12-22 | 1973-09-20 | ||
JPS5469383A (en) * | 1977-11-15 | 1979-06-04 | Toshiba Corp | Production of semiconductor device |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5999095U (ja) * | 1982-12-23 | 1984-07-04 | 三菱重工業株式会社 | プレス |
US5208186A (en) * | 1989-02-09 | 1993-05-04 | National Semiconductor Corporation | Process for reflow bonding of bumps in IC devices |
JPH08241914A (ja) * | 1996-02-13 | 1996-09-17 | Kyushu Hitachi Maxell Ltd | 電鋳金属体 |
US7197817B2 (en) | 2003-01-17 | 2007-04-03 | Nec Electronics Corporation | Method for forming contact bumps for circuit board |
Also Published As
Publication number | Publication date |
---|---|
JPS6234142B2 (enrdf_load_stackoverflow) | 1987-07-24 |
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