JPS5839463Y2 - 転写装置 - Google Patents

転写装置

Info

Publication number
JPS5839463Y2
JPS5839463Y2 JP1976166668U JP16666876U JPS5839463Y2 JP S5839463 Y2 JPS5839463 Y2 JP S5839463Y2 JP 1976166668 U JP1976166668 U JP 1976166668U JP 16666876 U JP16666876 U JP 16666876U JP S5839463 Y2 JPS5839463 Y2 JP S5839463Y2
Authority
JP
Japan
Prior art keywords
lens barrel
reticle
pattern
transfer device
photorepeater
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1976166668U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5384278U (cg-RX-API-DMAC7.html
Inventor
伸樹 河村
幹夫 長田
恒弘 長南
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP1976166668U priority Critical patent/JPS5839463Y2/ja
Publication of JPS5384278U publication Critical patent/JPS5384278U/ja
Application granted granted Critical
Publication of JPS5839463Y2 publication Critical patent/JPS5839463Y2/ja
Expired legal-status Critical Current

Links

JP1976166668U 1976-12-14 1976-12-14 転写装置 Expired JPS5839463Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976166668U JPS5839463Y2 (ja) 1976-12-14 1976-12-14 転写装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976166668U JPS5839463Y2 (ja) 1976-12-14 1976-12-14 転写装置

Publications (2)

Publication Number Publication Date
JPS5384278U JPS5384278U (cg-RX-API-DMAC7.html) 1978-07-12
JPS5839463Y2 true JPS5839463Y2 (ja) 1983-09-06

Family

ID=28774395

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976166668U Expired JPS5839463Y2 (ja) 1976-12-14 1976-12-14 転写装置

Country Status (1)

Country Link
JP (1) JPS5839463Y2 (cg-RX-API-DMAC7.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58108745A (ja) * 1981-12-23 1983-06-28 Canon Inc 転写装置
JPH0712019B2 (ja) * 1992-03-13 1995-02-08 株式会社日立製作所 投影露光方法及び投影露光装置
JP2653356B2 (ja) * 1996-01-29 1997-09-17 株式会社日立製作所 投影露光方法

Also Published As

Publication number Publication date
JPS5384278U (cg-RX-API-DMAC7.html) 1978-07-12

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