JPS5838783U - 量産型薄膜製造装置 - Google Patents

量産型薄膜製造装置

Info

Publication number
JPS5838783U
JPS5838783U JP13374581U JP13374581U JPS5838783U JP S5838783 U JPS5838783 U JP S5838783U JP 13374581 U JP13374581 U JP 13374581U JP 13374581 U JP13374581 U JP 13374581U JP S5838783 U JPS5838783 U JP S5838783U
Authority
JP
Japan
Prior art keywords
thin film
chamber
reaction gas
film manufacturing
mass production
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13374581U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6123011Y2 (enrdf_load_stackoverflow
Inventor
春木　弘
鍋田　修
藤沢　博文
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP13374581U priority Critical patent/JPS5838783U/ja
Publication of JPS5838783U publication Critical patent/JPS5838783U/ja
Application granted granted Critical
Publication of JPS6123011Y2 publication Critical patent/JPS6123011Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP13374581U 1981-09-09 1981-09-09 量産型薄膜製造装置 Granted JPS5838783U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13374581U JPS5838783U (ja) 1981-09-09 1981-09-09 量産型薄膜製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13374581U JPS5838783U (ja) 1981-09-09 1981-09-09 量産型薄膜製造装置

Publications (2)

Publication Number Publication Date
JPS5838783U true JPS5838783U (ja) 1983-03-14
JPS6123011Y2 JPS6123011Y2 (enrdf_load_stackoverflow) 1986-07-10

Family

ID=29927192

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13374581U Granted JPS5838783U (ja) 1981-09-09 1981-09-09 量産型薄膜製造装置

Country Status (1)

Country Link
JP (1) JPS5838783U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5628637A (en) * 1979-08-16 1981-03-20 Shunpei Yamazaki Film making method

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5628637A (en) * 1979-08-16 1981-03-20 Shunpei Yamazaki Film making method

Also Published As

Publication number Publication date
JPS6123011Y2 (enrdf_load_stackoverflow) 1986-07-10

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