JPS5838783U - Mass production thin film manufacturing equipment - Google Patents

Mass production thin film manufacturing equipment

Info

Publication number
JPS5838783U
JPS5838783U JP13374581U JP13374581U JPS5838783U JP S5838783 U JPS5838783 U JP S5838783U JP 13374581 U JP13374581 U JP 13374581U JP 13374581 U JP13374581 U JP 13374581U JP S5838783 U JPS5838783 U JP S5838783U
Authority
JP
Japan
Prior art keywords
thin film
chamber
reaction gas
film manufacturing
mass production
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13374581U
Other languages
Japanese (ja)
Other versions
JPS6123011Y2 (en
Inventor
春木　弘
鍋田　修
藤沢　博文
Original Assignee
株式会社富士電機総合研究所
富士電機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社富士電機総合研究所, 富士電機株式会社 filed Critical 株式会社富士電機総合研究所
Priority to JP13374581U priority Critical patent/JPS5838783U/en
Publication of JPS5838783U publication Critical patent/JPS5838783U/en
Application granted granted Critical
Publication of JPS6123011Y2 publication Critical patent/JPS6123011Y2/ja
Granted legal-status Critical Current

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  • Physical Or Chemical Processes And Apparatus (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は量産型薄膜製造装置の従来例の配置図、第２図
は本考案の一実施例の配置図である。 １・・・・・・反応室、２．３・・・・・・電極、４・
・・・・・基板、５・・・・・・排気口、６・・・・・
・導入口、７・・・・・・高周波電源、８・・・・・・
直流電源、９・・・・・・供給管、１０・・・・・・分
岐管、１２・・・・・・小室。FIG. 1 is a layout diagram of a conventional example of a mass-produced thin film manufacturing apparatus, and FIG. 2 is a layout diagram of an embodiment of the present invention. 1...Reaction chamber, 2.3...Electrode, 4.
... Board, 5 ... Exhaust port, 6 ...
・Inlet, 7...High frequency power supply, 8...
DC power supply, 9...supply pipe, 10...branch pipe, 12...small chamber.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 反応室内に収容した多数の電極間に電圧を印加してグロ
ー放電を発生させ、反応室内に供給された反応ガスを分
解して反応ガスの成分を電極に支持された基板上に薄膜
として生成するものにおいて、反応室を寸法および形状
が等しい多数の小室に区分して各小室内の対応する位置
に対向電極を収容するとともに、各小室を真空排気可能
とし、かつ共通の反応ガス源とほぼ等しい抵抗を有する
流路を介して接続したことを特徴とする量産型薄膜製造
装置。A voltage is applied between a number of electrodes housed in the reaction chamber to generate glow discharge, decompose the reaction gas supplied into the reaction chamber, and generate the components of the reaction gas as a thin film on the substrate supported by the electrodes. In this method, the reaction chamber is divided into a number of small chambers of equal size and shape, a counter electrode is housed in a corresponding position within each chamber, each chamber can be evacuated, and the source of the reaction gas is approximately the same as that of a common reaction gas source. A mass-produced thin film manufacturing device characterized in that the device is connected via a flow path having resistance.
JP13374581U 1981-09-09 1981-09-09 Mass production thin film manufacturing equipment Granted JPS5838783U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13374581U JPS5838783U (en) 1981-09-09 1981-09-09 Mass production thin film manufacturing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13374581U JPS5838783U (en) 1981-09-09 1981-09-09 Mass production thin film manufacturing equipment

Publications (2)

Publication Number Publication Date
JPS5838783U true JPS5838783U (en) 1983-03-14
JPS6123011Y2 JPS6123011Y2 (en) 1986-07-10

Family

ID=29927192

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13374581U Granted JPS5838783U (en) 1981-09-09 1981-09-09 Mass production thin film manufacturing equipment

Country Status (1)

Country Link
JP (1) JPS5838783U (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5628637A (en) * 1979-08-16 1981-03-20 Shunpei Yamazaki Film making method

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5628637A (en) * 1979-08-16 1981-03-20 Shunpei Yamazaki Film making method

Also Published As

Publication number Publication date
JPS6123011Y2 (en) 1986-07-10

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