JPS59187135U - Semiconductor thin film forming equipment - Google Patents

Semiconductor thin film forming equipment

Info

Publication number
JPS59187135U
JPS59187135U JP8268383U JP8268383U JPS59187135U JP S59187135 U JPS59187135 U JP S59187135U JP 8268383 U JP8268383 U JP 8268383U JP 8268383 U JP8268383 U JP 8268383U JP S59187135 U JPS59187135 U JP S59187135U
Authority
JP
Japan
Prior art keywords
thin film
semiconductor thin
film forming
forming equipment
forming apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8268383U
Other languages
Japanese (ja)
Inventor
堂城　浩嗣
榎本　敬一
西脇　秀則
大西　三千年
桑野　幸徳
Original Assignee
三洋電機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 三洋電機株式会社 filed Critical 三洋電機株式会社
Priority to JP8268383U priority Critical patent/JPS59187135U/en
Publication of JPS59187135U publication Critical patent/JPS59187135U/en
Pending legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

図面はそれぞれ半導体薄膜形成装置の概略断面図を示し
、第１図は従来例、第２図はこの考案の１実施例である
。 ９・・・反応室、１２・・・高周波電極、１３・・・ア
ース電極、１５・・・基板。The drawings each show a schematic sectional view of a semiconductor thin film forming apparatus, with FIG. 1 showing a conventional example and FIG. 2 showing an embodiment of this invention. 9... Reaction chamber, 12... High frequency electrode, 13... Earth electrode, 15... Substrate.

Claims (1)

【実用新案登録請求の範囲】 一　■　反応室内に設けられた高周波電極とアース電極
との間のグロー放電によりプラズマを発生させるととも
に、前記反応室内に導入された反応ガスを前記プラズマ
中で分解して基板上に半導′　　　　体薄膜を形成する
半導体薄膜形成装置において、前記基板を前記両電極に
垂直に配置した半導体薄膜形成装置。 ■　高周波電極およびアース電極が複数個並設された実
用新案登録請求の範囲第１項に記載の半導体薄膜形成装
置。[Claims for Utility Model Registration] (1) Plasma is generated by glow discharge between a high frequency electrode and a ground electrode provided in a reaction chamber, and a reaction gas introduced into the reaction chamber is decomposed in the plasma. 1. A semiconductor thin film forming apparatus for forming a semiconductor thin film on a substrate using a semiconductor thin film forming apparatus, wherein the substrate is disposed perpendicularly to both the electrodes. (2) A semiconductor thin film forming apparatus according to claim 1, in which a plurality of high-frequency electrodes and a plurality of ground electrodes are arranged in parallel.
JP8268383U 1983-05-30 1983-05-30 Semiconductor thin film forming equipment Pending JPS59187135U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8268383U JPS59187135U (en) 1983-05-30 1983-05-30 Semiconductor thin film forming equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8268383U JPS59187135U (en) 1983-05-30 1983-05-30 Semiconductor thin film forming equipment

Publications (1)

Publication Number Publication Date
JPS59187135U true JPS59187135U (en) 1984-12-12

Family

ID=30212637

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8268383U Pending JPS59187135U (en) 1983-05-30 1983-05-30 Semiconductor thin film forming equipment

Country Status (1)

Country Link
JP (1) JPS59187135U (en)

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