GB1400543A - Piezoelectric high frequency thickness resonator and manu facturing method for the same - Google Patents

Piezoelectric high frequency thickness resonator and manu facturing method for the same

Info

Publication number
GB1400543A
GB1400543A GB3760672A GB3760672A GB1400543A GB 1400543 A GB1400543 A GB 1400543A GB 3760672 A GB3760672 A GB 3760672A GB 3760672 A GB3760672 A GB 3760672A GB 1400543 A GB1400543 A GB 1400543A
Authority
GB
United Kingdom
Prior art keywords
piezo
high frequency
same
aug
recesses
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3760672A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Publication of GB1400543A publication Critical patent/GB1400543A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezo-electric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator

Abstract

1400543 Piezo-electric devices; gas discharge apparatus NIPPON TELEGRAPH & TELEPHONE PUBLIC CORP 11 Aug 1972 [12 Aug 1971] 37606/72 Headings H1D and H1E A high-frequency thickness resonator consists of a plate of piezo-electric material with at least one recess at least two microns deep formed in at least one side thereof to produce a reduced portion 31, 32 of thickness 1 to 30 microns with electrodes 36, 37, 38, 39 formed on the reduced portions and extending on to the thicker portions for receiving connections. The recesses can be formed by ionic etching in a gas discharge vessel (1), Fig. 1 (not shown) containing argon or argon and oxygen at 10<SP>-3</SP> torr. A discharge is maintained between electrodes 6 and the piezo-electric material is masked to expose the areas where recesses are required and a r.f. source is connected to a support holding the plate and mask to cause bombardment by ions. A water cooler can be provided for the support.
GB3760672A 1971-08-12 1972-08-11 Piezoelectric high frequency thickness resonator and manu facturing method for the same Expired GB1400543A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6124971A JPS4827689A (en) 1971-08-12 1971-08-12

Publications (1)

Publication Number Publication Date
GB1400543A true GB1400543A (en) 1975-07-16

Family

ID=13165756

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3760672A Expired GB1400543A (en) 1971-08-12 1972-08-11 Piezoelectric high frequency thickness resonator and manu facturing method for the same

Country Status (4)

Country Link
JP (1) JPS4827689A (en)
DE (1) DE2239696C3 (en)
GB (1) GB1400543A (en)
NL (1) NL7210965A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2247776A (en) * 1990-09-07 1992-03-11 Toyo Communication Equip Piezo electric resonator

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5371595A (en) * 1976-12-08 1978-06-26 Fujikoshi Kikai Kogyo Kk Piezooelectric resonator
JPS5871709A (en) * 1981-10-26 1983-04-28 Seiko Instr & Electronics Ltd Oscillator
JPS58157213A (en) * 1982-03-15 1983-09-19 Toyo Commun Equip Co Ltd Manufacture and construction of chip oscillator
JPS59128814A (en) * 1983-01-13 1984-07-25 Nippon Dempa Kogyo Co Ltd Piezoelectric oscillator
JPS59128813A (en) * 1983-01-13 1984-07-25 Nippon Dempa Kogyo Co Ltd Piezoelectric oscillator
JPS59128812A (en) * 1983-01-13 1984-07-25 Nippon Dempa Kogyo Co Ltd Piezoelectric oscillator
JPS613513A (en) * 1984-06-18 1986-01-09 Nippon Dempa Kogyo Co Ltd Piezoelectric vibrator
JPH0257625U (en) * 1988-10-20 1990-04-25
JPH03139911A (en) * 1989-10-25 1991-06-14 Nippon Dempa Kogyo Co Ltd Piezoelectric vibrator
US6787048B2 (en) * 2001-03-05 2004-09-07 Agilent Technologies, Inc. Method for producing thin bulk acoustic resonators (FBARs) with different frequencies on the same substrate by subtracting method and apparatus embodying the method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2247776A (en) * 1990-09-07 1992-03-11 Toyo Communication Equip Piezo electric resonator

Also Published As

Publication number Publication date
DE2239696A1 (en) 1973-02-22
JPS4827689A (en) 1973-04-12
DE2239696C3 (en) 1975-11-27
DE2239696B2 (en) 1975-04-17
NL7210965A (en) 1973-02-14

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee